vii
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Explanation of Label
(1) HOT SURFACE Label
Risk of burn. Keep off from touching surface of the
pump as it is heated.
(2) Pump Securement Label
If the pump is not secured properly, it could
become detached and cause injury or damage to
surrounding equipment. Be sure to secure the
pump according to Section 5.1.2 "Installation of
the Pump".
(3) Remove Label
Do not remove cover, or else it may cause some
changes inside and it is failed.
(4) Cable Label
Be sure to use specified cable for this power
supply. If not, it may cause connector be broken
and power supply itself failed.
(5) Heavy Equipment Label
Be sure to lift by two or more people or use the
lifter or the crane etc. when lifting because this
product is a heavy lift.
(6) SECURITY Seal
This label certificates that the product was made
or maintained by ULVAC or by ULVAC authorized
facility. In case "this label is removed" or "there is
a mark showing once this label has been
removed", ULVAC warranty shall not be applied to
the product.
(7) Name Plate
Содержание UTM3400 Series
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Страница 10: ...viii Location of Label...
Страница 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Страница 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Страница 25: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
Страница 30: ...16 3 3 3 Controller This page is intentionally left blank...
Страница 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
Страница 50: ...36 5 5 5 Notes on Transportation This page is intentionally left blank...
Страница 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...
Страница 73: ...7 7GAS PURGE...
Страница 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Страница 95: ...10 10WARRANTY CLAUSES...
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Страница 100: ...Index Index 2 This page is intentionally left blank...