9.4
Power Failures
73
9
9.4.1 Power Failure Counter-operation
Table 9-3 shows the counter-operations against power interruption which occurred while the
pump rotor is normally rotating.
Table 9-3
Counter-operations Against Power Supply Failure
(Note 1) The time can be changed to 2 seconds from 1 second via communication operation. Refer to
separate manual for serial communication.
(Note 2) For restarting after the power re-supply (restoration), push the RESET button.
(Note 3) The pin numbers are shown in Fig. 6-4 "Arrangement of Remote-control Connector Pins".
(Note 4) Actions can be changed via communication operations. Refer to Section 6.7 "Remote-control
Connector".
Interruption time
1 second or less (Note 1)
Over 1 second (Note 1)
Interrupt/re-supply
During interruption
After re-supply
During interruption
After re-supply
Pump status
Magnetic levitation
Levitation goes on
Levitation goes on
Levitation goes on
Levitation goes on
Run
Decelerates
Returns to before
power-failure running
condition
Decelerates
Decelerates
(Note 2)
Indicator lamp
ROTATION
Lamp ON goes on
Lamp ON goes on
Lamp ON goes on
Lamp ON goes on
STATUS
Before-power-failure
indication goes on
Before-power-failure
indication goes on
Orange lamp turns on Orange lamp ON
goes on
Remote-control output signals (Note 3)
ROTATION
Pin no. (17)-(19)
(18)-(19)
"CLOSE" goes on
"OPEN" goes on
"CLOSE" goes on
"OPEN" goes on
"CLOSE" goes on
"OPEN" goes on
"CLOSE" goes on
"OPEN" goes on
NORMAL
Pin no. (11)-(13)
(12)-(13)
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Contact open
Contact close
"OPEN" goes on
"CLOSE" goes on
ACCELERATION
Pin no. ( 8 )-(10)
( 9 )-(10)
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Contact open
Contact close
"OPEN" goes on
"CLOSE" goes on
BRAKE
Pin no. (14)-(16)
(15)-(16)
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Contact close
Contact open
"CLOSE" goes on
"OPEN" goes on
REMOTE
Pin no. (20)-(22)
(21)-(22)
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Before-power-failure
condition goes on
Contact open
Contact close
Return to Before
power-failure
Return to Before
power-failure
ALARM (Note 4)
Pin no. (27)-(28)
(26)-(28)
"CLOSE" goes on
"OPEN" goes on
"CLOSE" goes on
"OPEN" goes on
Contact open
Contact close
By resetting
Contact close
Contact open
WARNING (Note 4)
Pin no. (29)-(31)
(30)-(31)
"OPEN" goes on
"CLOSE" goes on
"OPEN" goes on
"CLOSE" goes on
"OPEN" goes on
"CLOSE" goes on
By resetting
"OPEN" goes on
"CLOSE" goes on
Содержание UTM3400 Series
Страница 2: ...This page is intentionally left blank...
Страница 10: ...viii Location of Label...
Страница 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Страница 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Страница 25: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
Страница 30: ...16 3 3 3 Controller This page is intentionally left blank...
Страница 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
Страница 50: ...36 5 5 5 Notes on Transportation This page is intentionally left blank...
Страница 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...
Страница 73: ...7 7GAS PURGE...
Страница 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Страница 95: ...10 10WARRANTY CLAUSES...
Страница 98: ...84 10 This page is intentionally left blank...
Страница 100: ...Index Index 2 This page is intentionally left blank...