SECTION 5
INSTALLATION
34
5
5.3
Preparation for Operation
(1) This product is a water cooled model. Always provide a flow of coolant water that meets
the indicated specifications. (Note 1)
(2) Make sure no water is leaking from the coolant lines. Do not spill coolant on the pump.
(3) Confirm the cable from water valve is surely connected to VALVE connector of External
I/F panel.
(4) Make sure that there is no condensation and not high humidity environment. Do not switch
the power supply unit ON with condensation at the location indicated in Fig. 5-12.
(5) If dew condenses inside controller during operation, dew warning turns on and the water
valve is turns off so that the coolant water should not enter in the pump. If the dew is not
disappeared for a while, dew alarm turns on and decelerate the motor to avoid a controller
fault. Please use it at the temperature that the dew condensation is not generated and keep
environment humidity low. Refer to Section 9 "TROUBLESHOOTING" for the alarm.
Even if the power supply unit is OFF, do not flow coolant through it that is below dew point.
(6) Connect the power cable to AC connector of control panel.
(Note 1) Non condensing.
Water Coolant Flow Rate :
3 L/min to 4 L/min
Water Pressure :
0.2 MPa to 0.4 MPa
Temperature :
19 degrees C. to 30 degrees C.
Fig.5-12
Locations to Check for Dew Condensation
Содержание UTM3400 Series
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Страница 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Страница 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Страница 25: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
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Страница 73: ...7 7GAS PURGE...
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Страница 95: ...10 10WARRANTY CLAUSES...
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