6.5
Variable Speed Operation
47
6
6.5.3 O
peration from Rated Speed Rotation to Low Speed Rotation
The following procedure is used to change the rotation speed setting and operate in the low-
speed mode when currently operating at the rated speed or accelerating at a speed greater than
low speed rotation.
6.5.3.1 Remote Control Startup Procedure
(1) Use the serial interface to specify low speed rotation. Once set, it does not need to be set
each time.
(2) Input a low-speed signal via the remote control connector. (Refer to Table 6-4)
(3) This switches the "NORMAL" signal OFF (Refer to Table 6-4) and starts decelerating the
pump. The "BRAKE" signal ON (Refer to Table 6-4), in this product of a standard spec.
(4) Once rotation reaches the low-speed rotation speed, the "NORMAL" signal ON. In this
product of a standard spec, the "BRAKE" signal is switched OFF.
(5) The pump stops decelerating and maintains it current rotation speed.
(Note) If the "LOW SPEED" signal is canceled before reaching low-speed rotation, then it will
function the same as for normal startup mode.
6.5.3.2 Serial Interface Operation
(1) Set rotation to low speed via the serial communication.
(2) "LOW SPEED" command is input via the serial communication.
(3) Status is changed from "NORMAL" to "BRAKE", and status decelerating the pump.
(4) Once rotation reaches the low speed rotation speed, status is changed from "BRAKE" to
"NORMAL". The pump stops decelerating and maintains it current rotation speed.
Содержание UTM3400 Series
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Страница 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Страница 25: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
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