SECTION 9
TROUBLESHOOTING
78
9
Table 9-6
Table of Alarms
Alarm
code
Alarm name
Possible cause
Protective action
11
TD COUNTER LIMIT
Counts of the high speed touch-down counter
exceeded the specified number.
Start-up impossible
(detected during
power supply self-
diagnostics)
12
PF COUNTER LIMIT
Counts of the power failure touchdown counter
exceeded the specified number.
14
AC LOW VOLTAGE
Fall in AC input power voltage.
Regenerative
braking
15
POWER FAILURE
Power failure.
16
TMP:OVERLOAD
After accelerating to 80 % of the designated
speed or low-speed setting, the speed dropped
below 80 % due to overloading etc.
Deceleration
21
TMP TEMP/MB CABLE
Increased pump drive motor temperature.
Free run
(motor stop)
22
TMP:SENSOR ERROR
Pump rotation signal could not be detected
correctly.
23
EI:MOTOR OVERCURR
Overcurrent ran through the motor.
24
TMP:OVER TEMP
Increased pump Temperature
Deceleration
30
EI:CONT. TEMP ERR
Increased temperature inside the control system Deceleration
32
EI:DC-DC OVERTEMP
Increased temperature inside control system.
Free run
(motor stop)
34
EI:INV. OVERCURR
Overcurrent ran through the motor.
35
EI:INV. OVERVOLT
Defective circuit.
36
EI:DC-DC LOW VOLT
Defective circuit.
Regenerative
braking
37
EI:DC-DC OVERCURR
Defective circuit.
Deceleration
38
EI:DC-DC OVERVOLT
Defective circuit.
39
EI:DEW ERROR
Dew ERROR
Deceleration
43
EI:PARAM ERROR
Stored parameters are not correct.
Start-up impossible
(detected during
power supply self-
diagnostics)
44
EI:CPU ERROR
Error in the CPU for inverter control.
Free run
(motor stop)
45
EI:BRAKE OVERTIME
Pump does not stop within the specified time
after the stop operation.
46
MOTOR OVERSPEED
Pump rotation speed is too high.
47
EI:R-SPEED ERROR
Pump rotation speed cannot be detected.
48
EI:ACCEL OVERTIME
Pump does not accelerate to 80 % of the
designated speed or low-speed setting within
the specified time after start-up.
Deceleration
49
TMP:CAN NOT START
Pump fails to rotate within 2 minutes after start-
up.
51
MB:VIBRATION2 X1
Continuous excessive vibration of the magnetic
bearing.
52
MB:VIBRATION2 Y1
53
MB:VIBRATION2 X2
54
MB:VIBRATION2 Y2
55
MB:VIBRATION2 Z
Содержание UTM3400 Series
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Страница 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Страница 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Страница 25: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
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Страница 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
Страница 50: ...36 5 5 5 Notes on Transportation This page is intentionally left blank...
Страница 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...
Страница 73: ...7 7GAS PURGE...
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Страница 95: ...10 10WARRANTY CLAUSES...
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