SECTION 6
OPERATION
46
6
6.5.2 O
peration from Start-up to Low Speed Rotation
This is the procedure until low-speed rotation is achieved when the speed setting is made with
the pump stopped.
6.5.2.1 REMOTE Operation
(1) Start-up begins when the Section 6.2.2 "Start-up Preparation Sequence in REMOTE-
control Connector" is complete.
(2) Set rotation to low speed via the serial interface or the other communication means. Once
it is set, it does not need to be set each time.
(3) Input the "LOW SPEED" signal (Refer to Table 6-4) from the remote-control connector.
(4) Input the "START" signal from the remote-control connector. (Refer to Table 6-4)
(5) The pump starts to accelerate and after a few seconds, the "ROTATION" signal turns on.
In this product of a standard spec, "ACCELERATION" signal (Refer to Table 6-4) from the
remote-control connector turns on when the pump starts to accelerate.
(6) When the rotational speed reaches 80 % of low speed value, the "NORMAL" signal turns
on. In this product of a standard spec, the remote-control connector "ACCELERATION"
signal turns off.
(7) When the pump speed reaches the set low speed value, acceleration stops and the pump
speed is maintained.
(Note) The same operation occurs if the "LOW SPEED" signal is input after the "START"
signal is input but before the pump speed reaches the set low speed value.
6.5.2.2 Serial Interface Operation
(1) Start-up begins when the Section 6.2.3 "Start-up Preparation Sequence in Other
Communication Means" is complete.
(2) Set rotation to low speed via the serial communication.
(3) "LOW SPEED" command is input via the serial communication.
(4) "START" command is input via the serial communication.
(5) The pump acceleration starts. Status is changed from "STOP" to "ACCELERATION".
When the rotational speed reaches 80 % rated value, status is changed from
"ACCELERATION" to "NORMAL".
(6) When the pump speed reaches the set low speed value, acceleration stops and the pump
speed is maintained.
Содержание UTM3400 Series
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Страница 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Страница 25: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
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