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4.2

　

The Maximum Allowable Flow Rate

21

4

4.2

The Maximum Allowable Flow Rate

(Note 1) Consult your ULVAC representative before using gasses except shown in above table.
(Note 2) mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
(Note 3) The maximum allowable flow rate depends on the gas type, the Assuming the parts

connected to the molecular pump inlet and the gas purge flow rate.

4.3

Standards Fulfilled

Description

Gas type

(Note 1)

APC valve

temperature

Gas purge

flow rate

The maximum allowable flow rate

(Note 2) (Note 3)

UTM3400A-MI-AVWX
UTM3400A-MI-AFWX
UTM3400A-MI-AWWX

Ar

45 degrees C.

0 mL/min

1500 mL/min

N

2

2750 mL/min

UTM3400A-MI-CVWX
UTM3400A-MI-CFWX
UTM3400A-MI-CWWX

Ar

45 degrees C.

30 mL/min

1900 mL/min

N

2

2750 mL/min

Safety

EN 61010-1

UL 61010-1

EN 1012-2

EMC

EN 61326-1 Class A

EN 61000-6-2

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Содержание UTM3400 Series

Страница 1: ...7 0012 103 00 263 43458 INSTRUCTION MANUAL Turbo Molecular Pump ULVAC Inc Components Division http www ulvac co jp Before using this product be sure to read this operation manual Keep this manual with...

Страница 2: ...This page is intentionally left blank...

Страница 3: ...from reproducing or copying part or all of this document without permission from ULVAC In an effort to improve the product this document may be revised in the future without notice Every effort has b...

Страница 4: ...proper or cause injury by electrical shock WARNING Decisions on system compatibility should be made by the system designer or the person deciding the specifications after conducting tests as necessar...

Страница 5: ...nstalled to host equipment WARNING Do not remove or do maintenance the turbo molecular pump before safety has been confirmed Improper turbo molecular pump use may be hazardous to operator s health in...

Страница 6: ...ive ray The pump proper is a precision machine Be careful not to apply abnormal vibration shock impact to it during transportation This pump is not an explosion proof product This pump is not intended...

Страница 7: ...on 2 Protect the pump from any and all types of impact during operation Impacts can also be transmitted via the flange so be careful of impacts near the pump as well 3 Do not operate any equipment i e...

Страница 8: ...ng performance When using a hydraulic rotary pump with vibration of wide amplitude as a backing vacuum pump undertake proper anti vibration measure As a guideline control the vibration to 0 1 G 50 Hz...

Страница 9: ...changes inside and it is failed 4 Cable Label Be sure to use specified cable for this power supply If not it may cause connector be broken and power supply itself failed 5 Heavy Equipment Label Be su...

Страница 10: ...viii Location of Label...

Страница 11: ...n 1 OUTLINE AND DESCRIPTIONS 1 1 Outline 2 1 2 Descriptions 3 1 2 1 Outside Drawing of Pump Unit 3 1 2 2 Power Cable 4 1 2 3 Standard Accessories 4 1 2 4 Option 5 1 2 5 Document List 5 Section 2 IDENT...

Страница 12: ...k for Vacuum System 35 5 5 Notes on Transportation 35 Section 6 OPERATION 6 1 Overview 38 6 1 1 Introduction Operation Modes 38 6 2 Startup Preparation 40 6 2 1 Start up Preparation Sequence in LOCAL...

Страница 13: ...re Operation 49 6 7 Remote control Connector 51 6 7 1 Specification 51 6 7 2 Pin Assignment 52 6 7 3 Connector 53 6 8 Communication Specifications 54 6 8 1 RS 232C 54 6 8 1 1 Transfer Specifications 5...

Страница 14: ...ures 72 9 4 1 Power Failure Counter operation 73 9 5 Alarm Detection Capabilities 74 9 5 1 Movement in Alarm Detection Capabilities ALARM 74 9 5 2 Movement in Alarm Detection Capabilities WARNING 74 9...

Страница 15: ...1 1OUTLINE AND DESCRIPTIONS 1 1 Outline 1 2 Descriptions 1 2 1 Outside Drawing of Pump Unit 1 2 2 Power Cable 1 2 3 Standard Accessories 1 2 4 Option 1 2 5 Document List...

Страница 16: ...ng vacuum pump to create a high vacuum in a vacuum chamber Typical Applications Semiconductor equipments Industrial equipments R D applications The other ultra high vacuum applications The turbo molec...

Страница 17: ...TM3400 Series Description Inlet flange A B C D E n d F G UTM3400A MI AVWX UTM3400A MI CVWX VG300 462 288 246 400 370 12 13 333 22 UTM3400A MI AWWX UTM3400A MI CWWX VG350 462 288 246 450 420 12 13 333...

Страница 18: ...Clamp Core Assembling procedure Description Qty Note 1 Gasket inlet flange Note 1 1 VG300 O ring gasket VG350 O ring gasket ISO320F Not included 2 Bolt set inlet flange VG300 Not included VG350 Not i...

Страница 19: ...series Booklet English Joint Orifice size Description 1 KF10 Clamp Centering with O ring 0 5 mm GP ADAPTOR 0 5 KF10 2 KF10 Dust cap 0 5 mm GP ADAPTOR 0 5 KF DUST CAP 3 UJR 6 35 Male 0 5 mm GP ADAPTOR...

Страница 20: ...6 1 1 2 Descriptions This page is intentionally left blank...

Страница 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...

Страница 22: ...FLANGE Outlet flange connect a backing vacuum pump or its related pipe connection KF40 4 COOLING WATER PIPELINE Cooling water pipe connector Rc1 4 5 WATER VALVE For protection from dew Refer to Sectio...

Страница 23: ...ile power on green lights REMOTE MODE blinks LOCAL MODE 6 ROTATION lamp Operation indicator lamp indicating that the pump s rotor is running green 7 STATUS lamp Operation indicator lamp indicating tha...

Страница 24: ...emote control Refer to Section 6 7 Remote control Connector 2 SERIAL connector Connector for RS 232C or RS 485 communication Refer to Section 6 8 Communication Specifications 3 VALVE connector Water v...

Страница 25: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...

Страница 26: ...ate a disk attached to the drive shaft between the axial magnetic bearings Each magnetic bearing is provided with a gap sensor 9 to detect the rotor position Fig 3 2 illustrates the outline of 5 axes...

Страница 27: ...onal Drawing 1 High frequency motor 6 Radial magnetic bearing 11 Outlet flange 2 Drive shaft 7 Axial magnetic bearing 12 Protective net 3 Rotor blade 8 Touch down bearing 13 Cooling water pipeline 4 S...

Страница 28: ...lar pump by controlling the following 5 degrees of freedom excluding the rotational degree Z axis of freedom Fig 3 2 Outline of 5 Axes Control X Y Z rotational axis Parallel movement X Y Y Radial disp...

Страница 29: ...ply to direct current then uses a three phase inverter to control AC frequency If a power interruption occurs when the rotor is rotating at high speed the power supply unit uses the motor as a generat...

Страница 30: ...16 3 3 3 Controller This page is intentionally left blank...

Страница 31: ...4 4SPECIFICATIONS 4 1 Standard Specifications for Pump Unit 4 2 The Maximum Allowable Flow Rate 4 3 Standards Fulfilled...

Страница 32: ...ression ratio N2 He H2 1 109 or more 1 105 6 103 Rated speed 27600 rpm Start up time 16 minutes or less Mounting position In any desired direction Note 4 Vibration level by ULVAC s method 0 01 m or le...

Страница 33: ...ctive functions Alarms STATUS orange lamp illuminates Power Interruption Alarm Decelerated while maintaining levitation using regenerative power After decelerating to specified low speed levitation is...

Страница 34: ...tally or vertically when installing the pump horizontally and obliquely Refer to Section 5 1 1 Pump Mounting Direction for detail Note 5 mL min volume flow rate at 0 degrees C 1 atm Compatible with SC...

Страница 35: ...Assuming the parts connected to the molecular pump inlet and the gas purge flow rate 4 3 Standards Fulfilled Description Gas type Note 1 APC valve temperature Gas purge flow rate The maximum allowable...

Страница 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...

Страница 37: ...struction and Lifting Method 5 1 2 2 Installation of Turbo Molecular Pump 5 1 3 Example of Piping Connection 5 1 3 1 Connection of Exhaust Line 5 1 3 2 Connection of Cooling Water Line 5 2 Connection...

Страница 38: ...zontal inverted or oblique position The outlet port of the turbo molecular pump should face horizontally or vertically when installing the pump horizontally and obliquely When an installation directio...

Страница 39: ...ength in preparation for an emergency accident WARNING Ensure that no oil mist or hazardous substances are present in process line as safe ducting procedure when turbo molecular pump is installed to h...

Страница 40: ...ump inlet or outlet without fail CAUTION The center of gravity of the pump is indicated in Fig 5 3 Be sure that the pump does not move or fall down during installation or storage CAUTION This pump is...

Страница 41: ...g Method Table 5 1 Eyebole Size The center of gravity of the pump is shown in Fig 5 3 Fix securely to avoid moving or falling down in the event of an earthquake Fig 5 3 Center of Gravity of the Pump P...

Страница 42: ...the inlet flange of the pump Make installation with the cylindrical part of the bolt not thread part fit in the mating section of flanges When you connect piping or valve between the chamber and the...

Страница 43: ...ut Half thread Fixing method Only by the inlet flange Inlet flange VG300 VG350 ISO320F Bolt size Quantity M12 12 PC Material Stainless steel Grade A2 70 JIS B 1054 ISO 3506 Washer Plain washer and spr...

Страница 44: ...flange to the outlet flange of the pump Refer to Fig 5 7 marks are not attached to this turbo molecular pump set Fig 5 7 Example of Exhaust Line When gas purge required connect the gas purge pipeline...

Страница 45: ...r pipes to these pumps When connecting the cooling water pipes screw the pipe joint while also holding the nozzle of the pump with a spanner in order to avoid deforming the cooling water pipe as illus...

Страница 46: ...ce or circuit breaker of host equipment should be suitably located and easily reached and it should be marked as the disconnecting device for the equipment Check that the part number stuck on the cabl...

Страница 47: ...3 5 REFERENCE For the specified power voltage refer to the side panel of the power supply unit Fig 5 11 Power Cable Table 5 4 Power Cable CONNECTION Wire color of power cable Green Yellow Black White...

Страница 48: ...inside controller during operation dew warning turns on and the water valve is turns off so that the coolant water should not enter in the pump If the dew is not disappeared for a while dew alarm tur...

Страница 49: ...de a flowmeter on the downstream of cooling water line otherwise the turbo molecular pump will shut down and otherwise set up the interlock which the pump cannot start against cut off of water supply...

Страница 50: ...36 5 5 5 Notes on Transportation This page is intentionally left blank...

Страница 51: ...n 6 4 1 Preparations Prior to Shutting Down Operation 6 4 2 Shutting Down Sequence in LOCAL Mode 6 4 3 Shutting Down Sequence in REMOTE control Connector 6 4 4 Shutting Down Sequence in Other Communic...

Страница 52: ...ump cannot be started stopped using two or more of these ways at the same time Determination of which start stop instruction to be followed depends on the operation mode selected There are five operat...

Страница 53: ...nector serial connector RS 232C RS 485 When using serial communication the pump can be started or stopped by sending an online request command via the corresponding communication specification To retu...

Страница 54: ...blinks when becoming a LOCAL mode 3 Evacuate the turbo molecular pump by using a backing vacuum pump 4 Start up preparation is complete if the pressure in the turbo molecular pump reduces below 200 Pa...

Страница 55: ...lamp Under this condition the rotor of the turbo molecular pump is levitated by the magnetic bearing 3 Online command is demanded from the communication means and confirm the mode was switched to the...

Страница 56: ...or Fig 2 3 1 3 The pump starts to accelerate and after a few seconds the ROTATION signal turns on In this product of a standard spec ACCELERATION signal Refer to Table 6 4 from the remote control conn...

Страница 57: ...mp does not exceed 20 kPa GAUGE CAUTION Electrical energy isolation Lockout Tagout should be achieved by opening the main disconnect device or circuit breaker of host equipment thereby removing power...

Страница 58: ...on means The pump deceleration starts Status is changed from NORMAL or ACCELERATION to BRAKE 2 Wait until status changes to STOP status 3 Turn off the POWER switch 4 Stop the cooling water flow 5 If y...

Страница 59: ...ble 6 4 3 The NORMAL mode or LOW SPEED mode selection can be made before or after start up 4 Set the low speed value between 25 and 100 of the rated speed in 0 1 increments using the serial communicat...

Страница 60: ...to accelerate 6 When the rotational speed reaches 80 of low speed value the NORMAL signal turns on In this product of a standard spec the remote control connector ACCELERATION signal turns off 7 When...

Страница 61: ...e pump The BRAKE signal ON Refer to Table 6 4 in this product of a standard spec 4 Once rotation reaches the low speed rotation speed the NORMAL signal ON In this product of a standard spec the BRAKE...

Страница 62: ...product of a standard spec 4 If the set low speed value exceed 80 rated speed remote control signals remain unchanged and the pump accelerates 5 When the rated speed is reached the pump stops acceler...

Страница 63: ...ARM reset Reset operation when alarm occur Timer Run time Timer and Counter Monitoring and reset maintenance timer Power failure touch down count High speed touch down count MB warning count Setting V...

Страница 64: ...un status STATUS Descripition NORMAL ACCELERATION BRAKE STOP E STOP E BRAKE E IDLE Rotating at rated rotation speed Accelerating Decelerating Stopped Alarm is active stopped Alarm is active decelerati...

Страница 65: ...uit Connection method By momentary type START STOP switch By alternate type switch Wiring connection Control Pump start by short circuiting 2 and 1 Pump stop by opening 3 and 1 Pump start with the con...

Страница 66: ...ion on short circuiting between GND and pin No 4 LOW SPEED 6 Variable speed operation on short circuiting between GND and pin No 6 GND 1 GND Out put ROTATION 17 18 19 During rotation 17 19 open close...

Страница 67: ...ion Pin No ALARM 27 28 26 28 EI 03 Note 1 Alarm occurred Open Close Power OFF and no alarm Close Open SEMI E74 Note 2 Power OFF and active alarm Close Open No alarm Open Close WARNING 30 31 29 31 EI 0...

Страница 68: ...necessary The shield of the cable should be connected to case 3 Cable length Connection cables can be extended up to 15 meters but may be subjects to errors depending on actual operational environmen...

Страница 69: ...Connector Specifications Interface RS 485 2 wire half duplex Synchronous system Asynchronous Transmission rate 9600 bps fixed Character configuration Start bit 1 Data bits 8 Parity None Stop bit 1 Fl...

Страница 70: ...for multidropped turbo molecular pump with another pump or pump to which the computer connects is connected to both ends pump 1 through N 1 in Fig 6 6 However connection of the terminator may prevent...

Страница 71: ...g on actual operational environment 6 8 3 Connector Fig 6 7 Serial Connector Pin Configuration Figure where connector of panel was viewed from the front NOTICE Serial communication specifications conf...

Страница 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...

Страница 73: ...7 7GAS PURGE...

Страница 74: ...m or less in element size Use flow control valve to control the flow rate Fig 7 1 Gas Purging Method adaptor with 0 5 mm orifice Table 7 1 Table of Gas Purge Adaptor Start Gas Supply After starting ba...

Страница 75: ...ITION 8 1 Recommended Maintenance Intervals 8 2 Turbo Molecular Pump Decontamination 8 3 Touch down Bearing Replacement 8 4 Check of the Rotor Blades 8 5 Power Supply Unit Parts Replacement 8 6 Turbo...

Страница 76: ...ity that the following part is exchanged when cleaning TMP 2 Others When exchanging parts it has possibility that other parts are exchanged for improving a reliability Example Old type lower and upper...

Страница 77: ...r rotational resistance and require replacement of touch down bearings The replacement of the touch down bearing is done only by ULVAC or an approved service company 8 4 Check of the Rotor Blades Roto...

Страница 78: ...Doing so may prevent obtaining the maximum performance To obtain ensure the pump and power supply unit operate safely and perform as designed have parts that exceed their expected service life be rep...

Страница 79: ...e performed by ULVAC or an approved service company A copy of this from is printed at the end of this manuals Repair of the Turbo Molecular Pump The following precautions are required before forwardin...

Страница 80: ...or more eyebolts as described in Fig 8 1 when lifting this pump on vertical position Need four eyebolts as described in Fig 8 1 when lifting this pump on inverted position There is a possibility that...

Страница 81: ...please pack it surely so as not to damage it by the impact the vibration and the high temperature and humidity environment etc from the outside Please use the packing materials which were used at shi...

Страница 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...

Страница 83: ...ration 9 3 Nothing Happens After an Operation is Made 9 4 Power Failures 9 4 1 Power Failure Counter operation 9 5 Alarm Detection Capabilities 9 5 1 Movement in Alarm Detection Capabilities ALARM 9 5...

Страница 84: ...and or vibration the turbo molecular pump operation is to be stopped immediately But there is possible that a race of touch down bearing Fig 3 1 8 may make sounds for seconds when the pump internal pr...

Страница 85: ...mode POWER lamp blinks 6 2 Other causes Check the STATUS lamp is not lights in orange If an alarm is indicated correct the malfunction and reset alarm 9 5 3 Remote STOP signal active but the turbo mol...

Страница 86: ...n bearing Table 9 2 shows the number of revolutions and period of time that will elapse before being supported by the touchdown bearing when the power fails at the rated speed Table 9 2 Time and Rotat...

Страница 87: ...output signals Note 3 ROTATION Pin no 17 19 18 19 CLOSE goes on OPEN goes on CLOSE goes on OPEN goes on CLOSE goes on OPEN goes on CLOSE goes on OPEN goes on NORMAL Pin no 11 13 12 13 Before power fa...

Страница 88: ...p start the protective operations shown in Table 9 6 Table of Alarms 4 The detection error is recorded in the error log 9 5 2 Movement in Alarm Detection Capabilities WARNING 1 STATUS orange lamp Fig...

Страница 89: ...as flow rate is not too high 4 1 4 21 24 TMP TEMP MB CABLE TMP OVER TEMP High pump unit temperature Check that the ambient temperature around the pump is within the specified range Check that the temp...

Страница 90: ...RT Pump does not rotate Adhesion of reaction products or damage to the protective bearing is the possible cause Remove the pump from the unit and check that the rotor blades rotate smoothly at the inl...

Страница 91: ...89 90 MB VIB WARN X1 MB VIB WARN Y1 MB VIB WARN X2 MB VIB WARN Y2 MB VIB WARN Z Transient strong external shock or vibrations Continuous operation is possible However if the shock or vibrations occur...

Страница 92: ...Deceleration 32 EI DC DC OVERTEMP Increased temperature inside control system Free run motor stop 34 EI INV OVERCURR Overcurrent ran through the motor 35 EI INV OVERVOLT Defective circuit 36 EI DC DC...

Страница 93: ...R ERR X1 Abnormal output signal from the magnetic bearing sensor 62 MB SENSOR ERR Y1 63 MB SENSOR ERR X2 64 MB SENSOR ERR Y2 65 MB SENSOR ERR Z 66 MB DSP ERROR Error in the DSP for magnetic bearing co...

Страница 94: ...self diagnostics are abnormal Operation is possible detected during power supply self diagnostics 82 MB SELFCHECK Y1 83 MB SELFCHECK X2 84 MB SELFCHECK Y2 85 MB SELFCHECK Z 86 MB VIB WARN X1 Vibration...

Страница 95: ...10 10WARRANTY CLAUSES...

Страница 96: ...service conditions described in this document such as temperature range and power etc b Direct export transaction Product which has damage caused by a failure on delivery In the case of direct export...

Страница 97: ...he reason of failure was improper use which does not conform to the use condition of this Product j Consumable parts k The SECURITY seal certificates that the product was made or maintenanced by ULVAC...

Страница 98: ...84 10 This page is intentionally left blank...

Страница 99: ...as purge 18 I inlet flange 8 13 N NET lamp 9 noise 18 O outlet flange 8 13 P port for gas purge 8 POWER lamp 9 Protective 13 R REMOTE connector 10 RESET button 9 ROTATION lamp 9 rotor 13 S SERIAL conn...

Страница 100: ...Index Index 2 This page is intentionally left blank...

Страница 101: ...ontaminated with reactive products or substances produced by reaction Product model Model Serial No Application Remarks Contaminant Check an applicable box I guarantee that above returned item s is no...

Страница 102: ...c http www ulvac co jp en Service Centers http www ulvac co jp en support service center Sales O ces http www ulvac co jp en support sales o ces TEL 0467 89 2261 TEL 03 5769 5511 TEL 06 6397 2286 ULVA...

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