Ulvac UTM3400 Series, Инструкция по эксплуатации

Страница: 74 / 102

SECTION 7 GAS PURGE
60
7
This product includes a port for purging gasses in optional specification (Fig. 2-1 (2)). Though
not necessary for normal evacuation, use it to inject purging gas to increase maximum allowable
flow rate. A purge gas flow rate 30 mL/min is appropriate.
Be sure not to use the non-chemical type pumps to exhaust of corrosive gasses such as
chlorine type or fluorine type.
Fig. 7-1 is an example of gas purge piping diagram. Use a filter of 5 μm or less in element size.
Use flow control valve to control the flow rate.
Fig.7-1 Gas Purging Method (adaptor with Φ0.5 mm orifice)
Table 7-1 Table of Gas Purge Adaptor
Start Gas Supply After starting backing vacuum pump, but before exhausting process gas
Stop Gas Supply
After thoroughly exhuasting process gas, but before shutting off backing
vacuum pump
Gas Type Nitrogen, purity 4N (99.99 %) or better
Joint Orifice size Description
KF10 (Clamp / Centering with O-ring) Φ0.5 mm GP ADAPTOR, 0.5 KF10
KF10 (Dust cap) Φ0.5 mm GP ADAPTOR 0.5, KF DUST CAP
UJR 6.35 (Male) Φ0.5 mm GP ADAPTOR, 0.5 UJR
SWAGELOK Φ6.35 Φ0.5 mm GP ADAPTOR, 0.5 SWG
4-VCR (Female) Φ0.5 mm GP ADAPTOR, 0.5 VCR