Ulvac UTM3400 Series, Инструкция по эксплуатации, Страница: 80 / 102

SECTION 8 TURBO MOLECULAR PUMP RECONDITION
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8
CAUTION
When pump is removed from a equipment, drain the water from water pipe. If remained water
leak from water pipe, pump body will be corroded.
In the case of the specifications with the water valve, drain the water from water pipe during
pump power on and water valve open.
After the water drained, shut water pipe by the cap which is attached at shipment.
CAUTION
This pump is a heavy equipment.
Lift this pump by two or more people or by using the lifter or the crane, during installation.
Need two or more eyebolts as described in Fig. 8-1 when lifting this pump on vertical position.
Need four eyebolts as described in Fig. 8-1 when lifting this pump on inverted position. There is
a possibility that the pump falls when using less eyebolts, than specified in Table 8-2.
A crane and eyebolts due to lifting operations should withstand the load of five times or more
the weight of the TMP pump, and rope should be seven times or more. Use an eyebolt which
confirms to ISO 3266.
There is a possibility that the pump falls when installing it on other positions.
Fig. 8-1 Way to Remove the Pump
Table 8-2 Eyebolt Size
Position Eyebolt size Number of eyebolts Remark
Vertical M12 2
Not bundled items
Inverted M8 4
Vacuum
chamber
Vacuum
chamber
PUMP
PUMP