Ossila Slot-Die Coater
User Manual
Ossila.com
36
Ossila Limited © 2019
vi.
The coating parameters were programmed
as described in
Section 9.2.4
and the
program run.
vii.
The coated film is shown and achieved a
film thickness of ~80 nm. Note that edge
defects at the start and end of coating can
be minimised by use of ‘sacrificial
substrates’ before and after the main
substrate wishing to be coated.
viii.
The film shown above used a stage speed
of 14 mm/s with a 4 µL/s flow rate.
