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Vacuum System
6
Troubleshooting and Maintenance Manual
131
Vacuum System Components
The parts of the vacuum system are:
•
Foreline (rough) pump
•
High-vacuum turbo pump
•
Front and rear analyzer chambers
•
Collision cell cover
•
Side plates (analyzer doors), and front and rear end plates
•
Vacuum seals
•
Calibration valve and vent valve
•
Vacuum control electronics
•
Vacuum gauges and gauge control electronics
Each of these is discussed in more detail in this chapter.
Figure 19
Major vacuum system components
To foreline pump
Turbo pump
Turbo pump
Analyzer chamber
GC/MS interface
Ion vacuum gauges
cooling fan
Содержание 7000 Triple Quadrupole GC/MS
Страница 24: ...24 Troubleshooting and Maintenance Manual 1 Introduction...
Страница 50: ...50 Troubleshooting and Maintenance Manual 2 General Troubleshooting...
Страница 122: ...122 Troubleshooting and Maintenance Manual 4 General Maintenance...
Страница 144: ...144 Troubleshooting and Maintenance Manual 6 Vacuum System...
Страница 182: ...182 Troubleshooting and Maintenance Manual 8 Electronics...
Страница 193: ...Replacement Parts 9 Troubleshooting and Maintenance Manual 193 Figure 45 Foreline pump top and safety cage parts 1 6 5 7...
Страница 212: ...212 Troubleshooting and Maintenance Manual 9 Replacement Parts Figure 50 CI flow control module 5 3 4 2 1...
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Страница 214: ...Agilent Technologies Agilent Technologies Inc Printed in USA September 2009...