4-13
10) Using the 10 liter data obtained in step 2, calculate the following:
10+ (Reference Indication) - (2500 Indication)
Press [MID FLOW] and enter this calculated value.
11) Using the 20 liter data obtained in step 3, calculate the following:
20+ (Reference Indication) - (2500 Indication)
Press [HIGH FLOW] and enter this calculated value.
12) Press [CALC COEF] to calculate the new flowmeter coefficients.
Count SLPM
*Mass Flow
5000
20
Low
Mid
High
0
10.1
20.20 _
++
--
OOPS
Count SLPM
*Mass Flow
2500
10
Low
Mid
High
0
10.14 _
20
++
--
OOPS
*Mass Flow
5000
20
Low
Mid
High
0
10.1
20.20
Count SLPM
LOW
FLOW
MID
FLOW
HIGH
FLOW
CALC
COEF
