2.4
Attach the pump to the vacuum chamber
Do not stand below the pump while connecting or removing it.
Do not open the packaging until immediately before installation.
Do not remove the covers and blind flanges on the pump until just before
attachment to the equipment to ensure that assembly is carried out under
the cleanest possible conditions.
Never touch the rotor. Touching the rotor may cause injury and damage
the rotor bearing.
The high-vacuum flange must be solidly mounted to the vacuum cham-
ber. If the mounting is not sturdy enough, pump blockage could cause the
pump to break loose; internal pump components could be thrown in all
directions.
Never operate the pump (in bench testing, for example) without proper
flanging to the vacuum chamber.
If the pump should suddenly seize, an ensuing deceleration torque of up to
800 Nm will have to be absorbed by the system. To accomplish this, the fol-
lowing is required:
ISO-K flange: 6 steel clamps, strength at least 8.8, torque 30 Nm
CF flange:
stainless steel screws, strength at least A2-70, torque 20 Nm
Installation
22
130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
Warning
Fig. 2.4 Connection elements
High-vacuum flange
Cooling water connection
Connection thread for the
vibration sensor
Forevacuum connection
Closure screw for the
purge gas connection
Power supply of the
TURBO.DRIVE
Connection cable to
TURBO.DRIVE
Caution
