Index
63
130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
Index
A
Adapter 8, 11, 17, 19, 30, 46
Adsorption trap 25, 31, 54
Air cooler 7-9, 14, 19, 21, 33
Air cooling 8, 10, 19, 21, 26, 27
Ambient temperature 9, 10, 18, 26-28,
35, 48, 56, 57
Anti-suckback valve 25, 50
B
Bakeout 52
Bearing change 54
C
Contamination 10, 54, 59, 62
Cooling 6-10, 14, 19-22, 26-29, 33, 35,
36, 45, 48, 56, 57
Cooling water 10, 22, 28, 29
D
Danger of burns 5, 24, 50
Danger of ignition 39
Deposits 39, 53
Desiccant 8, 24, 53
Dimensional drawings 12, 13
Dripping or spraying water 18
Dust 6, 18, 23, 39, 51, 54
E
Emergency shut down 35, 50
F
Forevacuum connection 9, 22, 23, 25
Forevacuum pressure 8, 9, 25, 27, 48,
52, 55-57
Forevacuum pump 7, 18, 25, 31, 49, 50,
52, 58
Fuse 6, 35
G
Generator 44, 46-48, 50, 57
H
Hazardous gases 5, 25, 53
Heat sink 16, 35, 44
High-vacuum flange 4, 14, 22-24
Holweck stage 8
Humidity 5, 6, 9, 10, 25, 28, 39
I
Interface 6, 14, 36, 40-50, 55, 58
L
LED 5, 6, 32, 36, 38, 42, 49-51, 53, 58
M
Magnetic field 18
Mains power failure 4, 44, 50, 57
Media 6, 18, 39, 50
Motor temperature 40, 44, 45, 48, 56,
57
N
Nitrogen 30, 39
O
Overpressure 4, 18, 30
Oxygen 18, 39
P
Particles 51
PLC 34, 37
Pressure rise 51
Purge gas and venting valve 8, 11, 17,
19, 30, 31, 51
R
Radiation 18, 52
Relay 10, 37, 38, 40, 44, 45
Resonance damper 23, 31
S
Safety valve 4, 18, 25
Shock 49
Splinter guard 8, 9, 17, 23
Split-cage DC motor 8
Starting pressure 49
T
Temperature sensor 8, 57
V
Venting valve 8, 11, 17, 19, 30, 31, 46,
51
Vibration 22, 23, 25, 49, 58