Description
11
130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
Purge gas and venting valve
Part No.
113 50
800152V0019
Gas flow rate at 1 bar
0.2 mbar·l·s
-1
(12 sccm)
Solenoid valves
2, normally closed
Mains supply
24 V DC
230-100 V AC
Power consumption
4 W
6 W
Connection to pump
DN 10 KF
Needed for this:
Adapter M8 – DN10/16KF, P/N
800110V0011
Including O-ring 9.25 x 1.78 and
Adapter centering ring DN 10/16 KF with sinter filter
Gas connection
G1/4-in.
Recommended for this:
Adapter with filter including O-ring and gasket
800110V0012
Dimensions
60 x 65 x 45 mm
61 x 65 x 45 mm
0
50
100
150
200
250
300
350
1
l/s
mbar
10
-2
10
-3
10
-4
10
-5
10
-6
10
-1
S
au
g
ve
rm
ög
en
Hochvakuumdruck
N
2
Ar
T
He
H
2
Fig. 1.2 Pumping speed curves of the SL 300
P
um
pi
ng
sp
ee
d
High-vacuum pressure
