Failure to observe the following precautions could result in serious
personal injury!
Mechanical hazards
Danger of injury!
Avoid exposing any part of the human body to the vacuum. Handle the
equipment only while vented.
The pressure in the pump must not exceed 1.2 bar (absolute). The pump
is only intended for use in a vacuum. If overpressure may occur in the
system you must install a protection device, e.g. an overpressure safety
valve.
Danger of explosion!
The standard version of the equipment is
not suited for operation in
explosion hazard areas
. Contact us before planning to use the pump
under such circumstances.
The high-vacuum flange must be firmly mounted to the vacuum chamber.
If the mounting is not sturdy enough, pump blockage could cause the
pump to break loose; internal pump components could be thrown in all
directions. Never operate the pump (in bench testing, for example) with-
out proper flanging to the vacuum chamber.
Turbopumps as described in the following operation manual contain a
high portion of kinetic energy due to their high rotational speed in combi-
nation with the specific rotor mass. In case of a malfunction of the
system, for example rotor/stator contact or even a rotor crash, the rotatio-
nal energy is released.
To avoid the destruction of the equipment and to prevent injuries of the
operating staff the leading European manufacturers of vacuum pumps
strictly recommend to follow the installation instructions as given in this
manual.
After a mains power failure the pump can run up automatically once
more.
Safety Information
4
130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
Warning
