Description
9
130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
1.3
Technical data
TURBOVAC
SL 300
High-vacuum connection
DN 100 ISO-K / DN 100 CF
Pumping speed (without splinter guard) for
N
2
270 l·s
-1
Ar
260 l·s
-1
He
255 l·s
-1
H
2
190 l·s
-1
Ultimate pressure
with two-stage, oil-sealed rotary vane pump
< 10
-10
mbar
with SCROLLVAC SC 30
< 8
·
10
-10
mbar
with diaphragm pump
< 4
·
10
-9
mbar
Max. permissible forevacuum pressure with N
2
water cooled
< 8 mbar
Weight
Pump with ISO-K flange
5.2 kg
with TURBO.DRIVE 400
5.8 kg
with TURBO.DRIVE 400 and air cooler
6.3 kg
with TURBO.DRIVE 400 and water cooling
6.1 kg
Pump with CF flange
7.4 kg
Recommended forevacuum pumps
TRIVAC
D 2,5 E
SCROLLVAC
SC 5 / SC 15
Diaphragm pump DIVAC
2.5 VT
(at purge gas operation) TRIVAC
D 8 B
Operating speed
60,000 min
-1
Run-up time
approx. 4 min
Power consumption
at run-up
115 W
at ultimate pressure
18 W
Forevacuum connection
DN 16 KF
Purge gas connection
M8 or DN 16 KF
Type of protection
IP 20
Noise level
< 49 dB(A)
Ambient temperature
during operation, water cooled pump
+15 - + 35
°
C
during operation, air cooled pump
+15 - + 30
°
C
storage
-15 - + 70
°
C
Max. rel. air humidity
95% (non-condensing)
Purge gas flow
12 sccm / 0,2 mbar l·s
-1
Purge gas
Nitrogen, Argon or similar
