Installation
18
130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
2
Installation
2.1
Conforming utilization
The TURBOVAC SL 300 is a wide range turbomolecular pump designed to
evacuate vacuum chambers down to pressure levels in the high vacuum
range. It is suitable for pumping air and clean gases. The TURBO.DRIVE 400
frequency converter and a forevacuum pump are required for its operation.
These pumps are
not
suitable for
■
pumping liquids or gases containing dust or particulates
■
pumping corrosive or reactive gases
■
pumping gas mixtures with an oxygen share of > 21 %
■
operation without a forevacuum pump.
f reactive gases in low concentrations must be pumped operate the pump
with purge gas.
Install a micropore filter when pumping media which contains dust.
The pressure in the pump must not exceed 1.2 bar (absolute). The pump is
only intended for use in a vacuum. If overpressure may occur in the system
you must install a protection device, e.g. an overpressure safety valve.
2.2
Operating environment
The maximum permissible ambient temperature is 35
°
C. Do not expose the
pump or the frequency converter to dripping or spraying water.
The pump must not be installed within a magnetic field.
The rotor must not be exposed to hot surfaces above 100 °C. Install an opti-
cal radiation shield if required.
Places of installation up to 1000 m above sea level (3300 ft) are possible
without restrictions. At altitudes over 1000 m heat dissipation by the ambient
air is impaired. Please consult us.
The frequency converter must not be operated in explosive gas atmo-
spheres.
Magnetic field
Overpressure protection
Ambient temperature
Places of installation
Radiation shield
