Installation
27
130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
0
0,5
1
1,5
2
2,5
3
3,5
1,5
3,0
4,5
6,0
7,5
9,0
G
as
flu
ss
in
m
b
ar
.
l/s
VV-Druck in mbar
N
2
10
-2
0,0
0,5
1,0
1,5
2,0
2,5
1,5
3,0
4,5
6,0
7,5
9,0
10,5
12,0
Argon
10
-2
Forevacuum pressure in mbar
G
as
fl
ow
in
m
ba
r·
l/s
Fig. 2.8 Cooling requirements of the SL 300
G
as
fl
ow
in
m
ba
r·
l/s
Forevacuum pressure in mbar
Operation not possible
Water cooling: 50 l/h, 35 °C,
Ambient temperature 40 °C
Air cooling,
Ambient temperature 25 °C
Air cooling,
Ambient temperature 40 °C
For pumps with an ISO-K flange
and aluminium housing
For pumps with a CF flange and
in the case of special applica-
tions please ask us for informa-
tion.
