Description
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130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
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Description
The TURBOVAC SL 300 is a wide range turbomolecular pump designed to
evacuate vacuum chambers down to pressure levels in the high vacuum
range. It is suitable for pumping air and clean gases. The TURBO.DRIVE 400
frequency converter and a forevacuum pump are required for its operation.
Use
Fig. 1.1 Examples of SL 300
TURBOVAC SL 300
... with air cooler and
purge gas connection
... with air cooler and frequency
converter mounted to the pump
... with frequency converter
mounted under the pump
... with water cooling and
frequency converter mounted
under the pump
