Oerlikon Leybold Vacuum Turbovac SL 300 Operating Instructions Manual Download Page 13 | Manualshive

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Description

13

130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum

DN 100 ISO-K

DN 16 KF

19

0

11

0

61

15

28

13

5

h

160

Ø 130

Ø 154

Ø 140

16

°

22

°

93

85

DN 16 KF

h

100 ISO-K 181
100 CF

183

DN

23

100

100

93

38

104

81

31

68

23

4

50

12

6

22

°

16

°

55

°

30

°

Ø 154

Ø 140

Ø 130

Fig. 1.4 Dimensional drawings for SL 300 pumps (combination examples); dimensions in mm

Purge gas connection

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Summary of Contents for Turbovac SL 300

Page 1: ...Part Nos 800170V3005 800170V3006 TURBOVAC SL 300 Wide Range Turbomolecular Pump with Integrated or External Frequency Converter Operating Instructions 130000761_002_A0 ...

Page 2: ...al connection 32 2 8 1 Connecting pump and frequency converter 32 2 8 2 Connecting the power supply 34 2 8 3 Mounting the frequency converter 35 2 8 4 Relay status 38 3 Operation 39 3 1 Media compatibility purge gas 39 3 2 Start up 39 3 3 Interfaces 40 3 3 1 RS 232 C interface SERVICE X5 41 3 3 2 RS 485 interface 42 3 3 3 Profibus DP 43 3 3 4 Ethernet IP interface 43 3 3 5 Parameter list 44 3 3 6 ...

Page 3: ...n and throughout the Operating Instructions The TURBOVAC must only be operated in the proper condition and under the conditions described in the Operating Instructions It must be operated and main tained by trained personnel only Consult local state and national agen cies regarding specific requirements and regulations Address any further safety operation and or maintenance questions to your neare...

Page 4: ...sturdy enough pump blockage could cause the pump to break loose internal pump components could be thrown in all directions Never operate the pump in bench testing for example with out proper flanging to the vacuum chamber Turbopumps as described in the following operation manual contain a high portion of kinetic energy due to their high rotational speed in combi nation with the specific rotor mass...

Page 5: ...204 Part 1 3 30 respectivly 3 55 Thermal hazards During operation the pump can become so hot that there is a danger of burns 70 C 158 F Provide protection against contact with the hot components Hazards caused by materials and substances The forevacuum line must be tight Hazardous gases can escape at leaks or the gases being pumped can react with air or humidity If the pump has previously handled ...

Page 6: ...hreads Do not use connectors with M3 treads The pump may be operated only with suitable connector cables Route all cables so as to protect them from damage Do not expose the pump the frequency converter or the connections to dripping water Disconnect and connect the cable connections only while the pump is turning no longer green status LED off and with the mains power swit ched off yellow power L...

Page 7: ...uum range It is suitable for pumping air and clean gases The TURBO DRIVE 400 frequency converter and a forevacuum pump are required for its operation Use Fig 1 1 Examples of SL 300 TURBOVAC SL 300 with air cooler and purge gas connection with air cooler and frequency converter mounted to the pump with frequency converter mounted under the pump with water cooling and frequency converter mounted und...

Page 8: ... The pump is driven by an electronic frequency converter TURBO DRIVE All functions like for example speed control pump sensing or temperature monitoring are monitored by the TURBO DRIVE This unit is powered by an external power supply The TURBO DRIVE may be installed beside or underneath the pump or up to 5 m away The pumps are equipped with a purge gas facility The purge gas and venting connectio...

Page 9: ... with TURBO DRIVE 400 and air cooler 6 3 kg with TURBO DRIVE 400 and water cooling 6 1 kg Pump with CF flange 7 4 kg Recommended forevacuum pumps TRIVAC D 2 5 E SCROLLVAC SC 5 SC 15 Diaphragm pump DIVAC 2 5 VT at purge gas operation TRIVAC D 8 B Operating speed 60 000 min 1 Run up time approx 4 min Power consumption at run up 115 W at ultimate pressure 18 W Forevacuum connection DN 16 KF Purge gas...

Page 10: ... peak current input side 8 A DC Required power output from the power supply 200 W Max length of the DC cable shielded at 3 x 1 5 mm2 5 m at 3 x 2 5 mm2 20 m Relay output rating 42 V 0 5 A Ambient temperature during operation 5 45 C storage 15 70 C Relative air humidity 5 to 85 non condensing Overvoltage category II Contamination grade 2 Temp of the cooling surface 5 55 C For Part Nos 800073V0004 0...

Page 11: ...10 KF Needed for this Adapter M8 DN10 16KF P N 800110V0011 Including O ring 9 25 x 1 78 and Adapter centering ring DN 10 16 KF with sinter filter Gas connection G1 4 in Recommended for this Adapter with filter including O ring and gasket 800110V0012 Dimensions 60 x 65 x 45 mm 61 x 65 x 45 mm 0 50 100 150 200 250 300 350 1 l s mbar 10 2 10 3 10 4 10 5 10 6 10 1 Saugvermögen Hochvakuumdruck N2 Ar T ...

Page 12: ... h Ø130 Ø 154 Ø 140 22 16 55 3 0 1 7 0 9 3 35 25 6 1 9 5 0 34 67 141 187 Ø 130 Ø 140 104 22 77 1 0 0 50 100 217 160 190 110 3 0 22 Ø154 8 8 19 9 3 h 100 ISO K 181 100 CF 183 DN 5 0 Fig 1 3 Dimensional drawings for SL 300 pumps combination examples dimensions in mm Air cooler connection ...

Page 13: ...16 KF 190 110 61 15 28 135 h 160 Ø 130 Ø 154 Ø 140 16 22 9 3 8 5 DN 16 KF h 100 ISO K 181 100 CF 183 DN 23 100 100 9 3 38 104 81 31 68 234 50 126 22 16 55 3 0 Ø 154 Ø 140 Ø 130 Fig 1 4 Dimensional drawings for SL 300 pumps combination examples dimensions in mm Purge gas connection ...

Page 14: ...g 800152V0023 0 4 m long 800152V0022 1 0 m long 152 47 2 5 m long 864 49 3 0 m long 864 40 5 0 m long 864 50 Mounting kit TD 400 for TURBOVAC SL 300 Including 0 2 m long connection cable pump frequency converter For installing the frequency converter beside the pump 800110V0006 underneath the pump 800110V0009 Water cooling with G 1 8 connections 800135V0002 Accessories for water connections Adapte...

Page 15: ...cable TURBO DRIVE 400 OEM power supply 3 m 200 12 732 5 m 200 12 733 10 m 200 12 734 20 m 200 12 735 Mains cable for power supply 2 m long with EURO plug 800102V0001 with US plug 5 15P 800102V1001 TURBO DRIVE TD 400 DRIVE X3 HEAT SINK HEAT SINK 24 V DC X4 73 3 100 18 2 63 8 15 9 41 0 79 0 100 50 27 6 18 5 Fig 1 5 Dimensional drawing for the frequency converter dimensions in mm 64 2 for Part No 800...

Page 16: ...with start stop switch for the turbomolecular pump remote control status LEDs and status relays 24V DC Control cable TURBO DRIVE 400 TURBO CONTROL 300 1 m 800091V0100 3 m 800091V0300 5 m 800091V0500 10 m 800091V1000 20 m 800091V2000 Mains cable for TURBO CONTROL 300 3 m long with EURO plug 800102V0002 with US plug 6 15P 800102V1002 with UK plug 800102V0003 Mechanical accessories Plug for connector...

Page 17: ...on com in the menu Oerlikon Leybold Vacuum Documentation Download Software Adapter RS232 RS485 for 220 V Euro plug 800110V0101 GSD file for Profibus DP Can be downloaded from www oerlikon com in the menu Oerlikon Leybold Vacuum Documentation Download Software Splinter guard coarse for DN 100 ISO K 800132V0101 Splinter guard fine for DN 100 ISO K 800132V0102 Flange heater DN 100 CF only for pumps w...

Page 18: ...ing media which contains dust The pressure in the pump must not exceed 1 2 bar absolute The pump is only intended for use in a vacuum If overpressure may occur in the system you must install a protection device e g an overpressure safety valve 2 2 Operating environment The maximum permissible ambient temperature is 35 C Do not expose the pump or the frequency converter to dripping or spraying wate...

Page 19: ...tection cap in place on its high vacuum flange Fitting the water cooling Unscrew 2 screws and bend the cooling coil cautiously a little bit open Mount it to the pump and fix the 2 screws The cooling water may be connected radially or axially to the connecting piece of the cooling coil see Fig 2 1 Blank off the unused G 1 8 threads using the screw in stoppers and gaskets supplied Installation 19 13...

Page 20: ...top plate serves as a mounting aid With it the sliding nuts can be moved to their correct position The attached parts may provided flanges and plugs are not in the way be fitted in 90 increments as required When fitting as shown in the figures the 0 2 m long cable will do for the frequency converter When the power supply connector shall point in the other direction then the 0 4 m long cable will b...

Page 21: ...linder head screws Bracket Air cooler socket Air cooler 4 flat cross headed screws Protection cap Insert the connecting cable from the air cooler into the air cooler socket When fitting be sure not to pinch the cable As the purge gas and venting valve use either valves with a M8 screw in thread or screw in the M8 DN16KF adapter and connect the valve to it See also Section 2 7 4 flat head screws ...

Page 22: ...oose internal pump components could be thrown in all directions Never operate the pump in bench testing for example without proper flanging to the vacuum chamber If the pump should suddenly seize an ensuing deceleration torque of up to 800 Nm will have to be absorbed by the system To accomplish this the fol lowing is required ISO K flange 6 steel clamps strength at least 8 8 torque 30 Nm CF flange...

Page 23: ...hat the surface curvature is at the top and apply some pressure lightly at the rim so that the splinter guard engages If dust could pass from the vacuum chamber into the pump then a micropo re filter must be installed between the vacuum chamber and the pump The pump is precision balanced and is generally operated without a reson ance damper To decouple extremely sensitive equipment and to prevent ...

Page 24: ... the hot components Design with ISO K clamp flange Lay the O ring on the centering ring The O ring must be positioned so as to be smooth and flat it must not be twisted Then position the outer ring A collar flange with circlip and the appropriate gasket may be used to connect the pump A collar flange is required when using ultra vacuum sealing gaskets The order numbers for the flange components ar...

Page 25: ...ic diagram of a pump system incorporating a turbo molecular pump and a TRIVAC forevacuum pump with an anti suckback valve A separate safety valve must be provided for oil sealed forevacuum pumps without an anti suckback valve The safety valve prevents oil flowing back from the forevacuum pump into the turbomolecular pump when the system is not running To ensure that the forevacuum space at the tur...

Page 26: ... will shut down High gas throughputs cyclic operation or high ambient temperatures will necessitate air or water cooling Air or water cooling can be mounted to the pump see Section 2 3 Part Nos see Section 1 5 Air cooling When installing air cooled pumps within a system ensure that sufficient quan tities of fresh air are freely available The air cooling facility is powered via the pump Fig 2 7 Pum...

Page 27: ...acuum pressure in mbar Gas flow in mbar l s Fig 2 8 Cooling requirements of the SL 300 Gas flow in mbar l s Forevacuum pressure in mbar Operation not possible Water cooling 50 l h 35 C Ambient temperature 40 C Air cooling Ambient temperature 25 C Air cooling Ambient temperature 40 C For pumps with an ISO K flange and aluminium housing For pumps with a CF flange and in the case of special applica t...

Page 28: ... 25 20 C 20 50 100 90 70 80 60 30 40 5 10 15 20 25 Minimum coolant inlet temperature at which condensation does not yet occur as a function of maximum room temperature and maximum relative humidity Example Max ambient temperature 25 C Min coolant inlet temperature 17 C Max relative humidity 60 Maximum relative humidity Maximum ambient temperature Minimum coolant inlet temperature Fig 2 10 Dewpoint...

Page 29: ...earths max 20 German hardness scale 3 57 mmol l Connecting the cooling water Screw on the cooling water lines Cooling water connection G 1 8 The cooling water may be connected radially or axially to the connecting piece of the cooling coil Blank off the unused G 1 8 threads using the screw in stoppers and gaskets supplied Adjust the cooling water temperature so that the formation of condensate is ...

Page 30: ...nsures that the pump is not vented too fast When having to decide which gases need or not need to be pumped with purge gas we are available to provide assistance Refer to Section 3 1 for suited gases When operating the pump with purge gas the pump needs to be vented via the purge gas valve after having shut down the pump see Section 3 5 Consider the additional purge gas flow when selecting a suita...

Page 31: ...ump system 1 Turbomolecular pump 2 Forevacuum gauge port 3 Forevacuum pump 4 Resonance damper 5 Adsorption trap 6 Forevacuum valve 7 Purge gas and venting valve 8 High vacuum valve 9 Valve in the roughing pump line 10 Frequency converter Roughing line recommend to achieve the shortest possible cycle times ...

Page 32: ... the pump the frequency converter or the connections to water Disconnect and connect the cable connections only while the pump is turning no longer green status LED off and with the mains power switched off yellow power LED off Otherwise there is the risk of damaging the TURBO DRIVE 2 8 1 Connecting pump and frequency converter Connect the pump to the frequency converter using a suitable connectin...

Page 33: ... converter TURBO DRIVE 400 with air cooler TURBOVAC without integrated frequency converter without forced cooling Fig 2 14 Examples for connection Frequency converter TURBO DRIVE 400 Cooler optional TURBOVAC with integrated frequency converter TURBO DRIVE 400 without forced cooling 24 V DC cable max 20 m Installation 33 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum ...

Page 34: ... the frequency converter to the 24 V DC power supply or to the TURBO CONTROL 300 or to the TURBO POWER 300 via the 24 V DC cable Ensure correct polarity Pin 1 24 VDC Pin 2 0 V Pin 3 GND Installation 34 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum Warning REMOTE DRIVE X3 HEAT SINK 24 V DC X4 HEAT SINK 24 V 100 240 V 50 60 Hz REMOTE TURBO POWER 300 T5A 250V T5A 250V 100 240VAC 24 V 100 240 V 50 ...

Page 35: ... ing nuts The bottom side of the frequency converter must be cooled suffi ciently If the frequency converter is mounted without the optional heat sink ensure sufficient cooling by other means Installation 35 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum 1 2 3 Pin 1 24 V Pin 2 0 V Pin 3 GND Shielding Fig 2 16 Pin assignment of the DC connector X4 Model Hirose HS16P 3 1 2 3 4 5 A 60 50 40 30 20 1...

Page 36: ...5 43 2 1 Pump connection Supply voltage connection male 24 V Cooling surfaces 9 pin Sub D connector female for RS 232 interface LEDs REMOTE connector 9 pin Sub D female Fig 2 18 TURBO DRIVE 400 front and rear side Green LED STS off Pump at standstill 3 Hz flashes slowly 1 s Start command is present about 10 s after start flashes fast 3 s Running up or running down on Normal operation Yellow LED PW...

Page 37: ...400 7 8 6 7 2 kΩ 6 2 V Pin assignment for the Start Stop input Switching threshold for the Start Stop control input Low Level 9 V High Level 10 5 V Start Stop operation Example 1 Operation via a PLC Contact open STOP Contact closed START Example 2 Operation via contacts TURBO DRIVE S 5 3 4 n c n o com 2 9 1 n c n o com Relay Normal operation While deceleration acceleration Stop 4 connected to 5 as...

Page 38: ... on passive passive off off Just after start Start yes no no on passive passive flashes off Pump is accelerating Start yes yes no on active passive green off Pump is in the normal operating mode Stop no no yes off passive active off red Error is present pump is at standstill Stop yes no yes off passive active flashes red Error is present pump is decelerating Stop yes yes yes off passive active fla...

Page 39: ...regards the media which can safely be handled with this unit Install a micropore filter when pumping media which contains dust Suited for venting or purging are all gases which will not cause corrosion or pitting in aluminium and steel and which in connection with process deposits in the pump will not cause cor rosion or sticking For venting and as the purge gas we recommend inert gases like nitro...

Page 40: ... can be reduced Starting the pump with a delay if Cost savings through smaller With P36 delay several consumers are power supply units connected to the same PSU if peak loads can be reduced Frequency converter as a simple Dispensing with pressure gauges Monitor motor current P5 second function pressure gauge since for Normal Operation relay relay switches motor current is dependent as soon as the ...

Page 41: ...olling side an RS 232 interface in accordance with the PC standard with a 9 pin Sub D male connector is present then a straight through cable as shown in Fig 3 2 may be used Refer also to Operating Instructions GA 05 281 3 5 2 TURBO DRIVE TxD RxD GND TxD RxD GND 3 5 2 Fig 3 2 Providing a RS 232 connection Shield 9 pin IBM PC RS 232 interface SERVICE X5 1 4 and 6 9 are internally connected and must...

Page 42: ...5 V receiver 0 3 V logic 1 transmitter 1 5 5 V receiver 0 3 V Interface connector 9 way Sub D type socket on the instrument male thread UNC4 40 Note After having changed the bus address through the rotary switch the frequency converter must be switched off yellow power LED off and then on again so as to enable the new address setting Bus addresses over 15 can only be set via Parameter 37 Refer als...

Page 43: ...d to provide detailed information on the hardware and the protocol used for the data Refer also to Operating Instructions GA 05 281 3 3 4 Ethernet IP interface See additional Operating Instructions 17200908 The Operating Instruction will be delivered on a CD with Part No 800073V0007 or can be downloaded from our website 5 V 390 Ω 150 Ω 390 Ω X 5 8 7 TURBO DRIVE X5 7 X5 8 X5 7 X5 8 120 Ω Master X 5...

Page 44: ...u16 Highest permissible frequency 19 Minimum frequency 0 1200 525 Hz r u16 Lowest permissible frequency 20 Critical frequency 0 1200 500 Hz r u16 Minimum frequency level When the pump is accelerating this frequency must be reached within the maximum passing time P183 23 Pump type 0 255 2 r u16 6 SL 300 24 Setpoint frequency 0 1200 1000 Hz r w u16 Setpoint of the rotor frequency 25 Normal operation...

Page 45: ...P122 the normal operation relay is energised 125 Motor temperature 10 150 0 C r i16 like P7 126 Bearing temperature 10 150 60 C r i16 not used for SL 300 warning threshold 127 Motor temperature 10 150 0 C r i16 like P7 128 Motor temperature 10 150 2 C r i16 Falling below the motor temperature lower warning lower warning threshold threshold results in a warning 131 Motor temperature 10 150 10 C r i...

Page 46: ... The actions linked to the other bits are run 180 Resp delay time 0 20 10 ms r w u16 Response delay time Pause time between received and transmitted USS protocol string of the frequency converter s serial interface RS232 and RS485 We recommend not to change the default setting 10ms 182 Watchdog timer USS 0 65535 10 0 1 s r w u16 Delay when cancelling the control rights of the bus adapter and time ...

Page 47: ...ter 8000xxV000x One ASCII char per index 313 Product name 0 127 TD_400 CHAR r u16 Product name of the converter Index 0 10 usable 0 127 CHAR r u16 One ASCII char per index Only for DeviceNet purpose 315 Serial number of 0 127 CHAR r u16 Serial number of the converter converter xxxxxxxxxxx One ASCII char per index Index 0 10 usable 918 Act Profibus addr 0 65535 0 r u16 Active Profibus address 947 C...

Page 48: ...ture of 45 C Improve cooling 2 not used 3 Motor under temperature warning The minimum permis sible motor temperatu re warning threshold is not reached Ambient temperature too low Pump cooling too high Ensure min ambient temperature of 0 C Reduce water cooling 4 5 not used 6 Overspeed warning 7 8 9 10 not used 11 Overload warning The pump speed has dropped under the normal operation threshold Forev...

Page 49: ... 7 and 8 at the REMOTE X1 connector are closed the pump starts automatically when the DC voltage is switched on provided parameter 12 is set to 0 The turbomolecular pump accelerates The green LED flashes When the pump reaches normal operation the green LED lights up permanently Avoid the influences of shock and vibration when the pump is running Exposure of the pump to accelerating forces must be ...

Page 50: ...mps without a vacuum retention valve close the valve in the forevacuum line When the system is not operating ensure that neither ambient air nor clean ing media can enter the pump If a failure occurs the turbomolecular pump will be shut down automatically The red LED at the frequency converter lights up In the case of an emergency shut down the pump is switched off as described above The rotor of ...

Page 51: ...possible from the high vacuum side since here the bearing forces will be lowest When doing so no free jet of gas must be allowed to form on the rotor so as to avoid exposing the rotor to additio nal forces When venting the pump through its foreline connection neither oil nor par ticles may be entrained in the gas flow from the forevacuum side into the pump Speed of the Pressure Rise All turbomolec...

Page 52: ... can be baked out using the flange heater provided for this purpose Protect the rotor against intensive direct heat radiation When baking out at the forevacuum side at a sorption trap for example ensure that the com ponents attached direct are not heated to more than 100 C 212 F The forevacuum pump must be in operation so as to eliminate the vapors liberated at the sorption trap Fig 3 6 Maximum ri...

Page 53: ...se gases may be toxic and hazardous to health In addition deposits with similarly dangerous properties may have formed Many of these gases and deposits form acids when they come into contact with humid air This will result in serious corro sion damage to the pump To avoid health hazards and corrosion damage when the pumps are detached from the system fasten a container of desiccant under the trans...

Page 54: ...uired clean the turbomolecular pump of dust with a dry cloth 4 2 Oerlikon Leybold Vacuum Service Whenever you send us in equipment indicate whether the equipment is con taminated or is free of substances which could pose a health hazard If it is contaminated specify exactly which substances are involved You must use the form we have prepared for this purpose A copy of the form has been reproduced ...

Page 55: ...he frequency converter Connector cable between the frequency converter and the pump Is the forevacuum pressure sufficient After having removed the cause for the error reset the error message at the TURBO DRIVE In case of errors with error codes 1 to 7 by applying a STOP signal via the socket REMOTE X1 or the serial interface or by switching the mains power off In case of error code 8 by switching ...

Page 56: ...ter Ambient temperature too high Poor cooling Ensure max ambient temperature of 45 C Improve cooling yes 6 Run up time error The pump has not rea ched the normal opera ting frequency after the maximum run up time Forevacuum pressure too high Gas flow too high Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process yes 7 Motor tem perature er...

Page 57: ...r the minimum speed Forevacuum pressure too high Gas flow too high Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process yes 111 Motor undertempera ture error The minimum permissi ble motor temperature is not attained Ambient temperature too low Pump cooling too high Ensure min ambient tempera ture of 0 C Reduce water cooing yes 116 Perman...

Page 58: ...l interface REMOTE connector X1 connec ted wrongly REMOTE and SERVICE connec tors mixed up Wrong Profibus address set Use USS protocol Connect bus as shown in Section 3 3 Connect as shown in Fig 2 19 Connect correctly Set address between 0 and 126 Turbomolecular pump produces loud running noises and vibrations Rotor out of balance Bearing defective Balance the rotor Replace the bearing no Turbomol...

Page 59: ...quest Contaminated parts can be detrimental to health and environment Before beginning with any work first find out whether any parts are contamina ted Adhere to the relevant regulations and take the necessary precauti ons when handling contaminated parts Separate clean components according to their materials and dispose of these accordingly We offer this service Further details are available on r...

Page 60: ...60 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum ...

Page 61: ...61 130000761_002_A0 08 2008 Oerlikon Leybold Vacuum ...

Page 62: ..._______ B Condition of the equipment No1 Yes No Contamination No1 Yes 1 Has the equipment been used1 toxic 2 Drained Product service fluid corrosive 3 All openings sealed airtight flammable 4 Purged explosive2 If yes which cleaning agent _______________________________________ radioactive2 and which method of cleaning _______________________________________ microbiological2 1 if answered with No g...

Page 63: ...Forevacuum pressure 8 9 25 27 48 52 55 57 Forevacuum pump 7 18 25 31 49 50 52 58 Fuse 6 35 G Generator 44 46 48 50 57 H Hazardous gases 5 25 53 Heat sink 16 35 44 High vacuum flange 4 14 22 24 Holweck stage 8 Humidity 5 6 9 10 25 28 39 I Interface 6 14 36 40 50 55 58 L LED 5 6 32 36 38 42 49 51 53 58 M Magnetic field 18 Mains power failure 4 44 50 57 Media 6 18 39 50 Motor temperature 40 44 45 48 ...

Page 64: ...lès Valence Cedex Phone 33 4 75 82 33 00 Fax 33 4 75 82 92 69 info vacuum vc oerlikon com Great Britain Oerlikon Leybold Vacuum UK Ltd Unit 2 Silverglade Business Park Leatherhead Road UK Chessington Surrey KT9 2QL Sales Phone 44 13 7273 7300 Fax 44 13 7273 7301 sales vacuum ln oerlikon com Service Phone 44 20 8971 7030 Fax 44 20 8971 7003 service vacuum ln oerlikon com Italy Oerlikon Leybold Vacu...

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