1
．
Inspection
35
No.704-2010-01
⑪
Axis-Z loading position
⑫
Loading axis measure position
When no error occurs, the system is
regarded as normal.
(4) When no abnormality is found, carry out the returning operation to the origin using “<<”,
set the boat at No. 100 and carry out the above procedure till Step (4). When no
abnormality is found, carry out the returning operation to the origin, and close the
“Maintenance” screen.
(5) Close the front cover, turn off the MA-3000 and close the upper panel.
