30
937A Multi-Sensor System
For Slot CC
S 3
B1
Off
B2
On
For Slot A
S 4
B1
Off
B2
On
S 1 S 2
Torr
Off
Off
mbar
On
Off
Pascal Off
On
microns On
On
Thermocouple
A thermocouple module can be installed in Slots
A, B, or both. Either a
single-channel or a dual-channel module is available.
The figure to the right shows the thermocouple module's "D" connector. A
key is placed in contact #8. This key prevents connection of a Pirani,
capacitance manometer, or Convection Pirani sensor cable to a
thermocouple module. (The reverse is possible however. It is possible to
plug a thermocouple cable into a Pirani or Convection Pirani sensor
module, but this should not damage either the sensor or the module.)
Analog Module
Five Controller features may be individually set on this module. Individual
settings are shown on the inside column.
Pressure Units – Switches 1 and 2
All pressure values will display in the unit selected.
If set points are set prior to a pressure unit change,
they must be reset. Capacitance manometer heads
must provide a 0-10V output with full scale range
specified in Torr.
Factory preset units: As requested
Control/Combination Sensor
Channels– Switches 3 and 4
A control sensor switches a cold cathode sensor
on and off at a specific pressure (see Using
Protection and Contol Setpoints, page 60). When
the ranges of these two sensors overlap, the
outputs from the two sensors are also used to
generate a combination output (see page 66).
Cold cathode sensors in Slots
CC and A may have
control sensors. A control sensor can only be
located in channel B1 or B2. Suitable control
sensors are thermocouple, Pirani, convection
Pirani, and 1,10 and 100 Torr capacitance
manometers. Note the ranges of the 10 and 100
Torr capacitance manometer head do not overlap
the cold cathode sensor range, so they can not be
used to generate a combination output.
Factory preset control sensor:
for slot CC
B1
for slot A
B2
Keyed "D"
connector for
thermocouple
sensor module