MKS HPS 937A Series, Owner'S Operation And Maintenance Manual, Page: 22 / 108

14
937A Multi-Sensor System
Controller
Measuring Range** 1 x 10
-11
to 1.0 x 10
+4
Torr
1 x 10
-11
to 1.3 x 10
+4
mbar
1 x 10
-9
to 1.3 x 10
+6
Pa
1 x 10
-8
to 1.0 x 10
+7
microns
Operating Temperature Range 5° to 40°C (41° to 104°F)
Storage Temperature Range -10° to 55°C (14° to 131°F)
Relative Humidity 80% maximum for temperatures
less than 31°C, decreasing linearly
to 50% maximum at 40°C
Altitude 2000 m (6561 ft) maximum
Insulation Coordination Installation (Overvoltage)
Category II, Pollution Degree 2
Power Requirement, Nominal 100, 120, 220, or 230/240 VAC
50/60 Hz
Mains Voltage Fluctuations not to exceed
±10% of nominal
Power Consumption 35 W maximum
Fuse Rating, Size T 0.63A for 100 VAC
T 0.50A for 120 VAC
T 0.315A for 220 VAC
T 0.25A for 230/240 VAC,
Ø 5 mm x 20 mm for all
Process Control Relay 5 nonvolatile, relay set points
(one for each channel)
Relay Rating SPDT, 2 A @ 30 V resistive
Relay Response 150 msec maximum
Specifications*
*Design and/or specifications subject to change without notice
**Measurement range depends upon sensor options selected