MKS HPS 937A Series, Owner'S Operation And Maintenance Manual, Page: 27 / 108

19
937A Multi-Sensor System
Repeatability
CC, Pirani, CEP, TC 5% of indicated pressure at
constant temperature
CM
2% of indicated pressure at
constant temperature
Calibration Gas
CC, Pirani, CEP, TC
Air/nitrogen
CM Any (gas independent)
Installation Orientation
CC, TC, CM,Pirani Any (port down suggested)
CEP
Body horizontal only
Materials Exposed to Vacuum
CC
Series 421 – SS 304, Al 6061,
silver-copper brazing alloy, alumina
ceramic, Elgiloy
®
, OFHC
®
copper
Series 423 – SS 302, SS 304,
glass, Al, Inconel X-750
®
,
alumina ceramic
Pirani 300 series stainless, platinum,
alumina ceramic, silver brazing
alloy, nickel 200
CEP
300 series stainless, nickel, glass,
platinum
CM Inconel ®
TC
Nickel-plated steel, noble metal
alloy, glass
Internal Volume *
CC
Series 421 - 1.8 in.
3
(30 cm
3
)
Series 423 - 0.9 in.
3
(15 cm
3
)
Pirani 0.5 in. 3 (8 cm 3 )
CEP
2.0 in.
3
(33 cm
3
)
CM Type 122 - 0.43 in. 3 (7 cm 3 )
Type 622/626 - 0.38 in. 3 (6.3 cm 3 )
Type 722 -0.07 in. 3 (1.2cm 3 )
*Volume will vary with the type of vacuum conection selected