MKS HPS 937A Series, Owner'S Operation And Maintenance Manual, Page: 26 / 108

18
937A Multi-Sensor System
Relay Set Point Range
CC 2.0 x 10 -10 to 9.5 x 10 -3 Torr
2.7 x 10 -10 to 1.2 x 10 -2 mbar
2.7 x 10 -8 to 1.2 x 10 +0 Pa
2.0 x 10 -7 to 9.5 x 10 +0 microns
Pirani 2.0 x 10
-3
to 9.5 x 10
+1
Torr
2.7 x 10
-3
to 1.2 x 10
+2
mbar
2.7 x 10
-1
to 1.2 x 10
+4
Pa
2.0 x 10
+0
to 9.5 x 10
+4
microns
CEP 2.0 x 10 -3 to 9.5 x 10 +2 Torr
2.7 x 10 -3 to 1.2 x 10 +3 mbar
2.7 x 10 -1 to 1.2 x 10 +5 Pa
2.0 x 10 +0 to 9.5 x 10 +5 microns
CM 1% to 95% of the measurement
range of the head (e.g. 1 Torr head is
1.0 x 10
-2
to 9.5 x 10
-1
Torr,
1.3 x 10
+0
to 1.2 x 10
+2
Pa, etc.)
TC 2.0 x 10 -3 to 9.5 x 10 -1 Torr
2.7 x 10 -3 to 1.2 x 10 +0 mbar
2.7 x 10 -1 to 1.2 x 10 +2 Pa
2.0 x 10 +0 to 9.5 x 10 +2 microns
Response Time
CC 40 msec
Pirani, CEP 150 msec
CM 50 msec
TC 150 msec
Resolution
CC 2 significant digits between 10
-10
and 10
-3
Torr, 1 significant digit
outside that range
Pirani 2 significant digits between 10 -3 and
99 Torr, 1 significant digit outside
that range.
Display will indicate 1x10
+
2, 2x10
+
2,
3x10
+
2, 4x10
+
2 and AA in upper
decade.
CEP, CM, TC 2 significant digits