Inficon UL6000 Fab, Translation Of The Original Operating Instructions

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INFICON Operation | 6
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Inlet pressure < Lower limit: Gas flow is too low through the caliper (blocked caliper).
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Supervisor rights
1 > Setup > Measurement > Sniffing > Capillary surveillance
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You can change the following settings, to view the preset values see “Factory
settings“.
"Lower pressure limit SL200 capillary clogged" (lower limit)
"Upper pressure limit SL200 capillary broken" (upper limit)
"Lower pressure limit SL3000 capillary clogged" (lower limit)
"Upper pressure limit SL3000 capillary broken" (upper limit)
2 Adjust.
3 Save .
6.3.17 Calibrating
In order to be able to measure leak rates correctly, the leak detector has to be
adjusted at regular intervals by calibration. The mass spectrometer is adjusted
automatically.
You can perform the calibration using the device internal calibration leak or using an
external calibration leak. Normally, calibration should take place on a daily basis or if
there is some doubt as to the measurement ability of the device.
► When using hydrogen or helium-3 (
3
He) as tracer gas an internal calibration is not
possible. In this case, use an external calibration leak.
► The operation modes "Vacuum" and "Sniffing" must be separately calibrated when
using an external calibration.
► A calibration should only take place when the device is at operating temperature.
Calibrate at least 20 minutes after switch-on.
► For systems with a greater distance to the test object, we recommend the use of an
external calibration leak at the location of the test object.
► When using the internal calibration leak, observe the setting of the machine factor,
see also “Setting the machine factor [ } 68]“.
6.3.17.1 Internal calibration
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User rights
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The device is in the state "Standby" or "Measure".
1 Press .
2 Select the calibration “Internal”.
3 Press .
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The device performs an internal calibration.