6 | Operation
INFICON
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UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206)
You can automatically purge the backing pump for 20 seconds when you change to
"Standby".
ü
Operator
or
Supervisor
rights
1
> Setup > Measurement > Vacuum > Purge
2
If necessary activate the option "Automatic purge".
ð
If you switch off the automatic purging, you can switch purging on or off in the
standby window by pressing
.
3
Save
.
Regeneration
It may happen that too much helium has entered the interior of the device and no
accurate measurements are possible (helium contamination). The regeneration
provides the user with an automatic start-stop-vent cycle to degrade such elevated
helium background.
An active regeneration is shown in the display.
Regeneration is automatically deactivated after 60 minutes.
ü
Operator
or
Supervisor
rights
ü
You have not activated the setting "No ventilation" under "Ventilation mode", see
above.
►
> Regeneration
ð
You can start the regeneration in the opened window and stop it as desired or
wait for the automatic deactivation of the regeneration after 60 minutes.
6.3.13 Change leak rate filter
The leak rate filter “I•CAL” is preset. I•CAL ensures that the averaging time is optimally
adapted to the leak rate range.
The abbreviation I•CAL stands for “Intelligent Calculation Algorithm for leak rates”.
This ensures that the signals are averaged at optimal time intervals and this is based
on each leak rate range. I•CAL also determines interference spikes, which bear no
relevance to the leak rate signals and delivers unusually short reaction times even
with low leak rate signals. The algorithm used offers excellent sensitivity and response
time.
With the leak rate filter "Fixed" there is also a filter with a fixed time constant available.
Procedure
ü
Supervisor
rights
1
> Setup > Measurement > ZERO and filter
2
Make a selection between “I•CAL“ and “Fixed” under “Leakage rate filter”.
3
Save
.
Summary of Contents for UL6000 Fab
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Page 125: ...INFICON Decommissioning 9 UL6000 Fab PLUS Operating instructions iinc75en1 01 2206 125 152 ...
Page 146: ...11 Appendix INFICON 146 152 UL6000 Fab PLUS Operating instructions iinc75en1 01 2206 ...
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