Inficon UL6000 Fab, Translation Of The Original Operating Instructions

Page: 94 / 152

6 | Operation INFICON
94 / 152 UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206)
6.15 Logging off from the device
1 Press your name, which is displayed in the upper left corner of the display, or
select > User accounts.
ð
The window "User accounts" opens. See also "Modify Personal Settings
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2 You log off from the device via the button "Log off".
ð
The login window opens.
6.16 Switching off the device
NOTICE
Turbo molecular pumps can be damaged
The running turbo molecular pumps can be damaged by jerky movements or foreign
objects.
► Before switching off the device, vent the inlet to ensure that the TMP2 (booster
pump) is slowed down.
► After venting the inlet, avoid jerky movements or vibrations of the device during
operation and until 2 minutes after switching off.
► If you do not vent the inlet, avoid jerky movements or vibrations of the device during
operation and until 6 minutes after switching off.
► Prevent foreign objects from entering the inlet of the device.
You can switch off the device with the power supply switch at any time. The
parameters set in the device remain saved.