Inficon UL6000 Fab, Translation Of The Original Operating Instructions

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INFICON Operation | 6
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6.3 Settings for the measurements
6.3.1 Select operation mode
ü
Operator or Supervisor rights
1 > Operation mode
2 Select between "Vacuum", "Sniffer / SL200" and "Sniffer / SL3000".
3 Save .
6.3.2 Select gas
DANGER
Danger from a Hydrogen explosion
Hydrogen can explode in combination with oxygen. The allowable composition of
venal gas mixtures can be read in the safety data sheets of the respective
manufacturers.
► Ensure that the share of hydrogen does not exceed the described concentration.
ü
Supervisor rights
1 > Setup > Measurement > Mass
2 Make a selection from:
"Hydrogen" H
2
(2 amu)
"Helium"
4
He (4 amu)
"Mass 3"
3
He (3 amu)
3 Save .
6.3.3 Setting setpoints
You can set the leak rate for the setpoint to 1, 2, 3 and 4 separately.
When the setpoints are exceeded:
• If the setpoint 1 or 2 is exceeded, the measurement line in the measurement
window changes color.
• The setpoint relay of the digital output switches, see also "I/O module [ } 130]" or
the interface description.
Also setpoint 1 defines the trigger point for the different alarms, see also "Change
audio settings [
}
58]". It is also the limit for I•ZERO, see “Set and use the function
ZERO [ } 69]“.
ü
Operator or Supervisor rights
1 > Setpoints