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17 | Maintenance
INFICON
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074-471-P1E HAPSITE ER Operating Manual
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If the bakeout is complete, run a blank method. If the bakeout was successful
HAPSITE ER will be operational. If the bakeout was unsuccessful, a high
pressure error will occur.
17.6.1 Reactivating the NEG Pump
Reactivating the NEG pump requires having the Service Module attached to HAPSITE
ER for at least 22 hours. This procedure is the same procedure that is used to activate
a new NEG pump.
1
Click on the
Service Module
tab of the
Properties
menu.
2
Click on the
Service
button.
Summary of Contents for HAPSITE ER
Page 1: ...Operating Manual HAPSITE ER 074 471 P1E ...
Page 2: ...INFICON Two Technology Place East Syracuse NY 13057 9714 ...
Page 13: ...INFICON Declaration of Conformity 1 074 471 P1E HAPSITE ER Operating Manual 13 436 ...
Page 184: ...12 ER IQ Software INFICON 184 436 074 471 P1E HAPSITE ER Operating Manual ...
Page 238: ...13 Data Review INFICON 238 436 074 471 P1E HAPSITE ER Operating Manual 3 Click Search ...
Page 323: ...INFICON Method Editor 15 074 471 P1E HAPSITE ER Operating Manual 323 436 ...
Page 371: ...INFICON Calibration 16 074 471 P1E HAPSITE ER Operating Manual 371 436 ð Click OK ...
Page 381: ...INFICON Calibration 16 074 471 P1E HAPSITE ER Operating Manual 381 436 ...
Page 389: ...INFICON Calibration 16 074 471 P1E HAPSITE ER Operating Manual 389 436 49 Click OK ...
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