CyberOptics WaferSense, User Manual

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vi
List of
Illustrations
Chapter 2
Figure 2.1: The InstallShield Wizard.......................................................2.2
Figure 2.2: Found New Hardware Wizard..............................................2.3
Figure 2.3: Installing the WaferLink Device...........................................2.4
Figure 2.4: Starting the TeachView Application.....................................2.7
Figure 2.5: Calibration Registration Dialog............................................2.8
Figure 2.6: The About TeachView Dialog ..............................................2.9
Figure 2.7: The About your ATS Wafer Dialog.......................................2.9
Chapter 3
Figure 3.1: The TeachView Application .................................................3.3
Figure 3.2: Aligning the Teaching Wafer................................................3.4
Figure 3.3: Target Configuration List .....................................................3.5
Figure 3.4: Numeric Readouts................................................................3.5
Figure 3.5: Target Centered in the Sight Ring........................................3.7
Figure 3.6: Target Overlay ......................................................................3.8
Figure 3.7: Set Target Criteria Dialog................................................... 3.11
Figure 3.8: Logging a Reading ............................................................. 3.13
Figure 3.9: Set Station Information Dialog ........................................... 3.14
Figure 3.10: Temperature Monitoring Gauge ....................................... 3.16
Figure 3.11: Battery Monitor.................................................................. 3.17
Figure 3.12: Wireless Connection Monitor............................................ 3.19
Chapter 4
Figure 4.1: Aligning the Teaching Wafer ................................................4.2
Figure 4.2: Step 1. Position the Wafer .....................................................4.3
Figure 4.3: Step 2. Optimize Lighting.....................................................4.4
Figure 4.4: Step 3. Acquiring Image .......................................................4.5
Figure 4.5: Step 4. Secondary Target Parameter.....................................4.6
Figure 4.6: Step 5. Overlay Alignment, Primary Target..........................4.7
Figure 4.7: Step 5. Overlay Alignment, Secondary Target......................4.8
Figure 4.8: Step 6. Generating Target Parameters..................................4.9