CyberOptics WaferSense, User Manual

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Chapter 4. Creating Target Configuration Files
4.2
Measuring the Target
The TeachTarget application will ask for two critical target measurements:
• Target diameter. The diameter of the target in millimeters. This is the most critical
measurement and should be accurate to 0.01 mm.
• Target distance. The distance (Z), in millimeters, from the bottom of the teaching
wafer to the target. This measurement should be accurate to 0.5 mm.
More accurate you can make these readings give better results, so make them as accurate as you
reasonably can.
Running TeachTarget
To create a target configuration file:
1. Choose the feature of the equipment you will use for the target (see “Choosing a Target,”
on page 4.1 ).
2. Get the target measurements (see “Measuring the Target,” on page 4.2 ).
3. Place the teaching wafer on the equipment. Align the teaching wafer so it matches the
TeachTarget display by rotating the wafer until the WaferSense™ ATS logo is right-side
up and level as you face the wafer, as shown in
Figure 4.1 .
Figure 4.1: Aligning the Teaching Wafer
Logo
W
AFER
S
ENSE
™
ATS
W
A
FE
R
S
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N
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™
A
TS