1.1
Chapter 1
Introduction
The CyberOptics Semiconductor WaferSense™ Automatic Teaching System (ATS) measures
three-dimensional offsets to teach wafer handoff positions. Using machine vision technology, it
“sees” targets inside semiconductor equipment. The TeachView™ software application makes
it easy to precisely adjust equipment. The large display and wireless link let you place the
computer at a convenient distance from the teaching wafer.
ATS consists of the following components:
•
Teaching wafer.
The ATS is designed with a wafer-like form factor, so it can fit in
most wafer-handling equipment. The teaching wafer is also vacuum compatible.
•
TeachView and TeachTarget
™
software.
The TeachView software application
monitors the teaching wafer and displays X, Y, and Z offsets and other status
information in real time. TeachTarget creates target configuration files needed by
TeachView. Both applications run on most personal computers that use the
Microsoft Windows operating system.
•
Wireless link.
The software communicates with the teaching wafer by using a
Bluetooth wireless link that attaches to a USB port on a personal computer.
•
Charging clean box.
The teaching wafer is powered by an internal rechargeable
battery, which you recharge by placing the teaching wafer into the charging clean box.
•
Carrying case.
The carrying case makes it easy to take your complete ATS system
with you in the plant or on the road.
The following chapter gives you instructions for installing your ATS system.
