CyberOptics WaferSense User Manual Download | Manualshive

Page: 21 / 56

background image

Chapter 3. Using Your ATS

3.3

Finding a Target

The camera in the teaching wafer captures live video from within the semiconductor process
equipment. An image processor in the wafer reports the coordinates (X, Y, Z) of the teaching
wafer in relation to a target on the equipment. When you tell ATS to find the target, the
TeachView application displays the coordinates.

In the video image displayed in TeachView, the center of the field of view for the teaching
wafer is indicated by red cross hairs that span the length and width of the video image
(see

). A red circle is centered on the cross hairs and serves as a sight ring for aligning

the target image. When the target is within the sight ring, the equipment is aligned within the
specified tolerances. For more information on setting tolerances, see

“Setting the Target

Criteria,” on page 3.10

.

Figure 3.1: The TeachView Application

Target

Live video

image

Sight ring

«
...
19
20
21
22
23
...
»

Summary of Contents for WaferSense

Page 1: ...CyberOptics Semiconductor WaferSense ATS User s Guide ...

Page 2: ...nstructions may cause harmful interference to radio communications However there is no guarantee that interference will not occur in a particular installation If this equipment does cause harmful interference to radio or television reception which can be determined by turning the equipment off and on the user is encouraged to try to correct the interference by one or more of the following measures...

Page 3: ...rget are trademarks of CyberOptics Semiconductor Inc Third party brands and names are the property of their respective owners Copyright 2006 2007 CyberOptics Semiconductor Inc All rights reserved CyberOptics Semiconductor Inc 13555 S W Millikan Way Beaverton OR 97005 P N 920 0503 01 E mail CSsupport cyberoptics com Phone 503 495 2200 800 366 9131 US and Canada only Fax 503 495 2201 ...

Page 4: ...Support 2 9 Chapter 3 Using Your ATS 3 1 Using the ATS Teaching Wafer Buttons and Status Lights 3 2 Finding a Target 3 3 Using the Target Overlay 3 8 Using Find Once and Continuous Find 3 9 Taking a Single Reading 3 9 Taking Continuous Readings 3 9 Setting the Target Criteria 3 10 Logging Your Readings 3 12 Logging a Reading 3 13 Including User Specified Information in the Log File 3 14 Changing t...

Page 5: ...tings 3 20 Loading Settings from a File 3 20 Chapter 4 Creating Target Configuration Files 4 1 Choosing a Target 4 1 Measuring the Target 4 2 Running TeachTarget 4 2 Chapter 5 Maintaining Your ATS 5 1 Annual Factory Calibration and Battery Replacement 5 2 Battery Use and Disposal 5 2 Updating Your ATS Wafer Firmware 5 3 Chapter 6 Specifications 6 1 System Requirements 6 1 ATS Hardware 6 1 Environm...

Page 6: ...3 5 Figure 3 5 Target Centered in the Sight Ring 3 7 Figure 3 6 Target Overlay 3 8 Figure 3 7 Set Target Criteria Dialog 3 11 Figure 3 8 Logging a Reading 3 13 Figure 3 9 Set Station Information Dialog 3 14 Figure 3 10 Temperature Monitoring Gauge 3 16 Figure 3 11 Battery Monitor 3 17 Figure 3 12 Wireless Connection Monitor 3 19 Chapter 4 Figure 4 1 Aligning the Teaching Wafer 4 2 Figure 4 2 Step ...

Page 7: ...List of Illustrations vii Chapter 5 Figure 5 1 ATS Wafer Calibration Status Dialog 5 2 Figure 5 2 Starting the ATS Firmware Updater Application 5 4 Figure 5 3 Cycle Power dialog 5 5 ...

Page 8: ...eachView and TeachTarget software The TeachView software application monitors the teaching wafer and displays X Y and Z offsets and other status information in real time TeachTarget creates target configuration files needed by TeachView Both applications run on most personal computers that use the Microsoft Windows operating system Wireless link The software communicates with the teaching wafer by...

Page 9: ...he WaferSense ATS software your computer must have the following Windows 2000 Windows XP or Windows Vista operating system One free high power USB 1 1 or USB 2 0 port To install the WaferSense ATS software 1 Log on using an account with Administrator privileges Caution Dropping the teaching wafer or hitting it against a hard object can bend break or chip the housing damage the internal components ...

Page 10: ...ded by the wizard to install the software 4 After you complete the instructions for all of the wizard screens click Finish If Windows notifies you that the drivers have not passed Windows logo testing just click Continue Anyway to complete the installation By default the Setup program installs the TeachView and TeachTarget applications in a new program group called WaferSense ATS Setup also instal...

Page 11: ...t work 3 The USB cable provided with your ATS has a different plug on each end Locate the end with the plug that matches the USB port on your computer and plug the cable into the port 4 Plug the other end of the cable into the link module The Windows operating system recognizes the new link module hardware and displays the Found New Hardware Wizard as shown in Figure 2 2 If the wizard your system ...

Page 12: ...u already installed the WaferSense ATS software see Installing the Software on page 2 1 Windows will automatically find the drivers If not the drivers are located in the Utilities folder on the installation CD ROM 7 After you complete the instructions for all of the wizard screens click Finish The Power light on the module turns on indicating that the module is getting power from the USB port Igno...

Page 13: ... on your teaching wafer and link might not be paired with each other To reset the pairing see Changing the Pairing Between the Teaching Wafer and Link on page 3 19 4 Immediately after turning on the teaching wafer the Connection Status lights on the teaching wafer and link will blink slowly After a few seconds the teaching wafer and link will connect and both lights will be on and no longer blinki...

Page 14: ...r WaferSense ATS teaching wafer with the factory When you start the TeachView application see Running the TeachView Application on page 2 7 it prompts you to register your teaching wafer for calibration You can also register your teaching wafer in any of the following ways On the Internet www CyberopticsSemi com ws_register html By phone 800 366 9131 US and Canada only By faxing the WaferSense ATS...

Page 15: ... TeachView application starts as shown in Figure 2 4 Initializing communications usually takes less than a second For information on using TeachView see Chapter 3 Using Your ATS If you haven t registered your teaching wafer TeachView also displays the Calibration Registration dialog To complete the registration proceed to the next step Figure 2 4 Starting the TeachView Application ...

Page 16: ...on Registration dialog as shown in Figure 2 5 you haven t registered your teaching wafer Follow the instructions in the dialog to complete the registration Figure 2 5 Calibration Registration Dialog The TeachTarget application is described in Chapter 4 Creating Target Configuration Files ...

Page 17: ...on about your computer including manufacturer CPU type version of Windows and memory size The version of the TeachView application The software version is available in the TeachView application by choosing the Help About TeachView menu item Figure 2 6 The About TeachView Dialog If you are using TeachTarget a similar dialog is available from the Help About TeachTarget menu item The serial number of...

Page 18: ...10 Technical support is available Monday through Friday 8 00 A M to 5 00 P M Pacific Time Voice 503 495 2200 Toll free 800 366 9131 US and Canada only Fax 503 495 2201 E mail CSsupport cyberoptics com Internet www CyberopticsSemi com ...

Page 19: ... measurement Using the target overlay Using find once and continuous find Setting the target criteria for measurements Logging your readings Printing the TeachView window Monitoring the operating temperature Using the rechargeable battery Monitoring the connection between the teaching wafer and link module Changing the pairing between the teaching wafer and link module Saving your settings ...

Page 20: ...atus lights On Glows red while the teaching wafer is turned on Charging Glows red when the teaching wafer is being charged in the charging case Charging Done Glows red when the battery has reached at least 90 of full charge Connection Status Glows red when the teaching wafer has established communication with the link Blinks slowly while the teaching wafer is trying to establish a connection with ...

Page 21: ...ates In the video image displayed in TeachView the center of the field of view for the teaching wafer is indicated by red cross hairs that span the length and width of the video image see Figure 3 1 A red circle is centered on the cross hairs and serves as a sight ring for aligning the target image When the target is within the sight ring the equipment is aligned within the specified tolerances Fo...

Page 22: ...p to 30 ft 10 m 2 Place the teaching wafer on the equipment you want to check Align the teaching wafer so it matches the TeachView display by rotating the wafer until the WaferSense ATS logo is right side up and level as you face the wafer as shown in Figure 3 2 Figure 3 2 Aligning the Teaching Wafer WAFERSENSE ATS Logo W A F E R S E N S E A T S ...

Page 23: ...n t choose a target configuration file ATS can t search for the target and the Find Once button and Continuous find box are disabled For information on creating target configuration files see Creating Target Configuration Files on page 4 1 Figure 3 3 Target Configuration List 4 Click Find Once see Figure 3 4 After a few seconds the teaching wafer finds the target and sends the information to the T...

Page 24: ...particular verify that the Z distance you have specified in the target criteria is within 1 mm of the Z distance used to create the target configuration file The acceptable range for the Z distance is displayed in the Set Target Criteria dialog see Figure 3 7 on page 3 11 Wafer to target distance You might have the teaching wafer too close or too far from the target The distance from the bottom of...

Page 25: ...Y values are zero or close enough see Figure 3 5 Figure 3 5 Target Centered in the Sight Ring You can resize the TeachView window to make the video image larger or smaller The numeric readouts and other controls don t change size when you change the size of the TeachView window For information on the accuracy of the readings see Range and Accuracy on page 6 1 ...

Page 26: ...truct the ATS to find the target if the overlay is not centered on the target the ATS is not correctly recognizing the target If the target doesn t overlay the feature in the image check the following Video stopped Maker sure the wafer is still sending live video You can do this by moving the wafer a small amount and watching the video image If the video isn t tracking the movement turn off the wa...

Page 27: ...uous Find You can instruct the teaching wafer to take a single reading of the target position or to make continuous readings Note that whether you are taking a single reading or continuous readings the video image is updated continuously Taking a Single Reading As described in Finding a Target on page 3 3 you can use the Find Once button to have the ATS make a single measurement of the target coor...

Page 28: ... tolerance for the Z coordinate The specified range for Z is 6 4 mm 45 mm 0 25 1 8 The target configuration file that TeachView uses to recognize a given target is created from an image of the target that was captured at a specific Z value for more information see Creating Target Configuration Files on page 4 1 When you use a particular target configuration file the teaching wafer will be able to ...

Page 29: ... tolerance criteria for both X and Y 3 Fill in the tolerances you want to specify Tolerances must be entered as positive numbers must be in millimeters and must be 0 01 mm to 0 5 mm for X and Y and 0 1 mm to1 0 mm for Z 4 If you don t want to set a target value for the Z measurement check the box ignore z target value Otherwise uncheck the box and fill in your desired value for z target value The ...

Page 30: ...of the teaching wafer above the target see Setting the Target Criteria on page 3 10 Tolerance met Whether the coordinate measurements were within tolerances Z target ignored Whether the Z value is ignored in deciding if the current readings are within tolerance see Setting the Target Criteria on page 3 10 Temperature The current operating temperature of the teaching wafer in C see Monitoring the O...

Page 31: ...sts entries to the log file on your command To post an entry to the log file In the main TeachView window click Log a Reading see Figure 3 8 TeachView immediately writes a log entry each time you click the button Figure 3 8 Logging a Reading Log a Reading button ...

Page 32: ...your text into the Operator Tool Station and Comment text fields 3 Click Apply to accept the changes without closing the dialog To accept the changes and close the dialog click OK instead You can leave the Set Station Information dialog open while using TeachView drag it off to the side so it doesn t cover the TeachView window Doing so makes it easy to change the Comment or other fields each time ...

Page 33: ... values CSV text format The file is read only to avoid accidental data corruption Files in CSV text format are easy to import into spreadsheet and word processing programs Printing the TeachView Window You can print an image of the TeachView window to have a graphical record of the session To print an image of the TeachView window 1 Choose File Print 2 In the Print dialog click OK You can also sel...

Page 34: ...re Monitoring Gauge The temperature bar changes color to indicate where the current temperature is relative to the accurate operating range Blue Less than 20 C the teaching wafer is operating below the range where it produces accurate readings Green 20 C to 50 C the teaching wafer is operating in its optimum temperature range where it produces readings meeting the specified accuracy Orange 51 C to...

Page 35: ... from the teaching wafer on the state of the teaching wafer s battery The Battery indicator in the ATS wafer status area of the TeachView window shows the approximate percentage of operating time remaining before you must charge the battery Figure 3 11 Battery Monitor Charging the Battery To charge the teaching wafer s battery 1 Use only the battery charger supplied with your gapping wafer Using a...

Page 36: ...ve the teaching wafer in the charging case when not in use the battery won t overcharge Monitoring the Wireless Connection to the Teaching Wafer The TeachView application communicates with the teaching wafer by using a Bluetooth wireless link The wireless link has a range of up to 30 ft 10 m The Connection indicator in the ATS wafer status area of the TeachView window shows the quality of the wire...

Page 37: ...nd link that block the signal If TeachView indicates that the connection isn t good try moving the wireless link module a few feet closer to the teaching wafer After turning off the teaching wafer the Connection indicator might not change to red for a few seconds Changing the Pairing Between the Teaching Wafer and Link Each teaching wafer is paired with a specific link module at the factory and wi...

Page 38: ...n have TeachView read those settings back at any time This lets you have several different configurations for TeachView and be able to switch between them easily without having to reenter the settings To save your settings in a file you specify 1 Choose the File Save Settings As menu item 2 In the ATS Settings File dialog specify the directory and file name and click Save TeachView saves your sett...

Page 39: ...designed specifically for the task of creating target configuration files Choosing a Target Before you can create a new target configuration file you need to decide which feature of the equipment to use for the target Look for a hole or similar round feature that is located in the center of the equipment A feature with a diameter of a few millimeters up to a few centimeters works best A target tha...

Page 40: ...you can make these readings give better results so make them as accurate as you reasonably can Running TeachTarget To create a target configuration file 1 Choose the feature of the equipment you will use for the target see Choosing a Target on page 4 1 2 Get the target measurements see Measuring the Target on page 4 2 3 Place the teaching wafer on the equipment Align the teaching wafer so it match...

Page 41: ... module about 30 ft 10 m 7 Resize the TeachTarget window until the target feature in the video image is easy to see Use the DARKER and LIGHTER buttons in TeachTarget to adjust the image so that you can distinguish the target from the background This adjustment is only for your convenience it doesn t affect the creation of the target configuration file 8 Step 1 Position the Wafer Move the teaching ...

Page 42: ...ation Files 4 4 9 Step 2 Optimize Lighting TeachTarget performs this step all by itself When Optimization complete is displayed below the indicator bar see Figure 4 3 click Next Figure 4 3 Step 2 Optimize Lighting Optimization complete ...

Page 43: ...image is displayed When the step is complete the video image appears and TeachTarget displays Image retrieval complete below the indicator bar see Figure 4 4 Note that from this point on the image displayed in TeachTarget is the captured image rather than live video When you are ready to proceed click Next Figure 4 4 Step 3 Acquiring Image Image retrieval complete ...

Page 44: ...cognition fewer than 80 pixels in diameter TeachTarget asks you to identify a possible secondary target for more information on secondary targets see Choosing a Target on page 4 1 If you have a feature that you can use for a secondary target fill in the diameter of the target feature in the Secondary target area If the equipment doesn t have a secondary target feature fill in zero and TeachTarget ...

Page 45: ...he previous step TeachTarget adds the red rings to the secondary target as shown in Figure 4 7 on page 4 8 14 If the rings aren t centered on the target use the Ring position buttons to center them 15 Use the GROW and SHRINK buttons to adjust the size of the rings until they just enclose the edge of the target feature see Figure 4 6 For a secondary ring shaped target choose either the target s inn...

Page 46: ...eating Target Configuration Files 4 8 Figure 4 7 Step 5 Overlay Alignment Secondary Target 16 When you have the rings aligned on the target click Next Overlay rings enclosing the inner edge of the secondary target ...

Page 47: ...k Save By default target configuration files are saved in c Documents and Settings All Users Application Data CyberOptics Semiconductor ATS Target Files Figure 4 8 Step 6 Generating Target Parameters 18 When you have finished saving the file click Done TeachTarget exits The target configuration file you just created is ready to use Be sure to click Done to exit TeachTarget or use the menu File Exi...

Page 48: ...Semiconductor factory Cleaning the Teaching Wafer If cleaning is required wipe the outside of the teaching wafer with IPA isopropyl alcohol If the teaching wafer is used in a clean environment follow proper procedures for cleaning devices for this environment Warning The edges of the ATS teaching wafer are thin It may be possible to sustain an injury from these edges if the teaching wafer is not h...

Page 49: ...will occasionally notify you by displaying the ATS Wafer Calibration Status dialog as shown in Figure 5 1 Figure 5 1 ATS Wafer Calibration Status Dialog If you drop the teaching wafer or suspect that it is no longer in calibration contact CyberOptics Semiconductor technical support see Technical Support on page 2 9 Battery Use and Disposal Your ATS teaching wafer contains a lithium polymer battery...

Page 50: ...called ATS Firmware Updater for updating the firmware that is onboard the ATS teaching wafer The current firmware version is available by choosing the Help About your ATS Wafer menu item in either TeachView or TeachTarget To update the firmware on your ATS teaching wafer 1 Turn on the teaching wafer 2 If either TeachView or TeachTarget is running on the computer exit the application 3 From the Win...

Page 51: ... File dialog find and select the firmware file and click Open By default the ATS Firmware Updater looks for firmware files in c Documents and Settings All Users Application Data CyberOptics Semiconductor ATS Firmware Caution In the next step you will start the load firmware process Once you start the process the firmware is automatically uploaded to the wafer committed and verified Do not interrup...

Page 52: ...ress When the firmware has been verified you will be prompted to cycle the power on the teaching wafer as shown in Figure 5 3 Figure 5 3 Cycle Power dialog 8 Press the ON OFF button on the teaching wafer to turn off the wafer then press it again to turn on the wafer The teaching wafer doesn t start using the new firmware until you cycle the power 9 Click OK to close the dialog 10 Choose File Exit ...

Page 53: ...ng temperature range 0 C to 45 C Operating temperature range Optimum 20 C to 50 C Can withstand exposure to 120 C 5 minutes or less if not in direct contact with heating element Power Battery charger requires 100 240 VAC at 47 63 Hz input Battery usage on a full charge approximately 2 hours Battery performance degrades at temperatures outside the optimum operating temperature range Typical battery...

Page 54: ...status light 3 2 Charging status light 3 2 cleaning the teaching wafer 5 1 Comment including in log file 3 14 communications initializing 2 7 5 3 components ATS 1 1 Connection Status light 3 2 D displaying log entries 3 15 F FCC standards ii finding a target 3 3 3 9 firmware version 5 3 firmware updating 5 3 H hardware specifications 6 1 I installation ATS 2 1 firmware updating 5 3 link module 2 3...

Page 55: ...g 3 19 preferences see settings printing 3 15 R radio interference ii rechargeable battery 3 17 recharging 3 17 replacement 5 1 registering your teaching wafer 2 6 S saving settings 3 20 serial number teaching wafer 2 9 settings log file 3 15 optimize lighting 3 6 3 8 saving 3 20 target configuration file 3 5 target criteria 3 10 software installation 2 1 software version 2 9 specifications 6 1 st...

Page 56: ... serial number 2 9 status lights 2 5 3 2 3 19 3 20 TeachTarget 4 1 4 9 TeachView 3 1 3 20 main window 3 3 software installation 2 1 starting the application 2 7 version 2 9 technical support 2 9 temperature monitoring 3 16 Tool including in log file 3 14 U USB port 2 1 2 3 V version of firmware 5 3 version of software 2 9 video frozen image 3 8 optimize lighting 3 6 3 8 W Windows operating system ...

Reviews:

No comments

Related manuals for WaferSense

Brand: GOWIN Pages: 19

Brands by name

0 1 2 3 4 5 6 7 8 9 A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

Popular brands

Load more brands