Chapter 4. Creating Target Configuration Files
4.6
11.
Step 4, Target Parameters.
Enter the diameter of the target and the distance from the
bottom of the teaching wafer to the target (Z distance). For more information on these
values, see
“Measuring the Target,” on page 4.2
. After entering the values, click
Next
.
12. If the image of the target is too small for good recognition (fewer than 80 pixels in
diameter), TeachTarget asks you to identify a possible secondary target (for more
information on secondary targets, see
“Choosing a Target,” on page 4.1
). If you have a
feature that you can use for a secondary target, fill in the diameter of the target feature in
the
Secondary target
area. If the equipment doesn’t have a secondary target feature, fill
in zero, and TeachTarget will use the primary target. After entering the secondary target
value, click
Next
.
Figure 4.5: Step 4. Secondary Target Parameter
Primary
target
Secondary
target
