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Agilent E5250A User’s Guide, Edition 11

Setting up Measurement Environment
Mounting Connectors Directly

For highly accurate current forcing and measurements while minimizing leakage,
surround all force and sense lines from SMU by a guard as far as possible, and make
cables stable by taping.

For reducing capacitance measurement error, tape the cables to any grounded
materials such as shielding box. If you use probe card, grounding the probe card also
reduces capacitance measurement error.

NOTE

Low-Noise Coaxial Cable

When you make a SMU output connection by using low-noise coaxial cable
(Agilent part number: 8121-1191), shave the Conductive layer and the Insulator
(clear) by knife so that the Center Conductor is insulated from the Conductive layer.
Refer to following figure.

Insulator (black)

Outer conductor
(for Guard signal)

Insulator (clear)

Conductive layer (black)

Center conductor
(for Force/Sense signal)

approx. 10 to 15 mm

min 2 mm

Cover here using sleeve

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Summary of Contents for Agilent E5250A

Page 1: ...Agilent Technologies Agilent E5250A Low Leakage Switch Mainframe User s Guide ...

Page 2: ...consequential damages in connection with the furnishing use or perfor mance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the sep arate agreement shall control Technology Licenses The hardware and or software describ...

Page 3: ...0 4 2 1995 A1 1998 A2 2001 IEC 61000 4 3 2002 A1 2002 EN 61000 4 3 2002 A1 2002 IEC 61000 4 4 2004 EN 61000 4 4 2004 IEC 61000 4 5 2001 EN 61000 4 5 1995 A1 2001 IEC 61000 4 6 2003 EN 61000 4 6 1996 A1 2001 IEC 61000 4 11 2004 EN 61000 4 11 2004 Canada ICES NMB 001 2004 Australia New Zealand AS NZS CISPR 11 2004 Limit Group 1 Class A 4 kV CD 8 kV AD 3 V m 80 MHz 1 GHz 1 4 2 GHz 1 V m 2 2 7 GHz 0 5...

Page 4: ...ronic product in domestic household waste Product Category With reference to the equipment types in the WEEE Directive Annex I this product is classed as a Monitoring and Control instrumentation product Do not dispose in domestic household waste To return unwanted products contact your local Agilent office or see www agilent com environment product for more information Microsoft Windows Visual C a...

Page 5: ...ent chassis and cabinet must be connected to an electrical ground The power terminal and the power cable must meet International Electrotechnical Commission IEC safety standards DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE Do not operate the instrument in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard KEEP AW...

Page 6: ...d Service Office for services and repair to ensure that safety features are maintained DANGEROUS PROCEDURE WARNINGS Warnings such as example below precede potentially dangerous procedures throughout this manual Instructions contained in the warnings must be followed WARNING Dangerous Voltage capable of causing death are present in this instrument Use extreme caution when handling testing and adjus...

Page 7: ...iring terminals to indicate the terminal which must be connected to ground before operating equipment Frame or chassis terminal A connection to the frame chassis of the equipment which normally includes all exposed metal structures Indicates earth ground terminal Alternating current Direct current ON Supply OFF Supply STANDBY Supply Means INSTALLATION CATEGORY I Measurement terminals on the rear p...

Page 8: ...A input and how to connect the E5250A output to your wafer prober or test fixture Controlling the E5250A Introduces several methods for controlling the E5250A gives basic information for controlling the relay switches on the plug in cards and describes how to use Virtual Front Panel VFP utility furnished with the E5250A Programming the E5250A Describes how to create programs that contain SCPI comm...

Page 9: ...escribes the error messages for the E5250A SCPI Command Summary This is a quick reference for the SCPI subsystem commands available for the E5250A Text Conventions The following text conventions are used in this manual Screen Text Represents text that appears on screen of the controller Italic Refers to a related document or is used for emphasis ...

Page 10: ......

Page 11: ...iption 1 8 1 11 Options and Accessories 1 12 2 Installation 2 2 To Inspect the E5250A and Accessories 2 3 Requirements 2 4 Power Requirements 2 4 Power Cable 2 4 Operating Environment 2 6 Storage and Shipping Environment 2 6 Installing the E5250A 2 7 2 7 To Install Plug in Card 2 8 To Install Blank Panel 2 9 To Configure E5255A 2 10 2 11 2 12 E5255A Configuration Examples 2 13 To Set GPIB Address ...

Page 12: ...1 To Execute Self Test 3 12 To Execute Leak Test 3 15 4 Setting up Measurement Environment Connector Plates 4 3 Connector Plates for the E5252A 4 3 Connector Plates for E5255A 4 3 Blank Plate 4 4 Connecting 8 Channel Shielded Coaxial Cable 4 5 4 5 Mounting Connectors Directly 4 6 To Make Interlock Circuit 4 8 To Connect Connectors to DUT 4 13 Connecting the E5250A Input 4 15 To Connect Instruments...

Page 13: ...iguration 5 6 Connection Rule 5 9 Connection Sequence 5 10 Bias Mode 5 11 Couple Port 5 13 E5252A Channel List 5 15 E5255A Channel List 5 19 Using Virtual Front Panel Utility 5 25 Functions of Virtual Front Panel Utility 5 26 Requirements 5 27 Starting the Virtual Front Panel Utility 5 27 Confirming the E5250A Card Configurations 5 28 Changing the VFP Setup Mode 5 29 Defining Labels for the E5250A...

Page 14: ...Examples 6 13 Channel Creation Example 6 14 Bias Mode Example 6 16 Couple Port Example 6 19 Using the VFP Data Upload Library 6 22 VFP Data Upload Library 6 23 Programming Example 6 25 Before Executing Your Program 6 26 Error Messages 6 27 Using the Capacitance Compensation Routine 6 28 Capacitance Compensation Routine 6 29 Required Conditions 6 30 Programming Example 6 32 Before Executing Your Pr...

Page 15: ...y Driver System Requirements 8 3 Installing VXIplug play Driver 8 4 Driver Functions 8 5 9 Executing Sample Programs Vth and Capacitance Measurement Program 9 3 Introduction 9 3 Setting up the Measurement Environment 9 7 Executing the Program 9 9 Modifying the Program 9 11 HCI Measurement Program 9 17 Introduction 9 17 Adding the Bias Source Control Routine 9 23 Setting up the Measurement Environm...

Page 16: ...Contents 6 Agilent E5250A User s Guide Edition 11 Contents 12 SCPI Command Summary ...

Page 17: ...1 Introduction ...

Page 18: ... Guide Edition 11 Introduction This chapter gives an overview of Agilent E5250A E5252A and E5255A Agilent E5250A Product Description Agilent E5252A Product Description Agilent E5255A Product Description Options and Accessories ...

Page 19: ...e E5250A has four slots for installing the modules plug in cards listed in Table 1 1 These cards can be used in various switching matrix configurations in the E5250A For example using four E5252As you can configure a maximum 10 input 48 output switching matrix or using four E5255As you can configure a maximum 2 input 96 output multiplexer Table 1 1 Available Plug in Cards for E5250A Figure 1 1 E52...

Page 20: ...tem Fail LED Turns on if system error occurs in the E5250A Contact your nearest Agilent Technologies Service Center Fail LED Turns on if the E5250A fails Self test including Relay Test If this LED turns on after executing Relay Test a plug in card may be defective And if this LED turns on after turning the E5250A on again the E5250A is defective If so contact your nearest Agilent Technologies Serv...

Page 21: ...2A and are not used with the E5255A CAUTION The maximum measurement voltage that can be applied to any input terminal is 200 Vdc The maximum measurement current is 1 Adc at 200 Vdc The maximum voltage that can be applied between input terminals is 300 Vdc Do not apply an input signal over these limits to the E5250A inputs If you do the E5250A will be damaged If you use a bias source that has curre...

Page 22: ...that need to switch some instruments connected to Device Under Test DUT or need to scan instrument input output for many DUTs automatically The E5250A can be installed with maximum four E5252As And the input terminals of the E5252As are connected together inside the E5250A So the E5250A can configure a 10 24 matrix two E5252As 10 36 matrix three E5252As and 10 48 matrix four E5252As The E5252A blo...

Page 23: ...paths you can only use one input port at a time For example you cannot use HF1 and CV1 input ports at the same time Output Ports The E5252A has 12 output ports Two ports can be coupled for Kelvin connection output for a maximum of six Kelvin outputs OUTPUT1 and OUTPUT2 OUTPUT3 and OUTPUT4 OUTPUT5 and OUTPUT6 OUTPUT7 and OUTPUT8 OUTPUT9 and OUTPUT10 OUTPUT11 and OUTPUT12 The output ports are triaxi...

Page 24: ...exers six 16 output multiplexers four 24 output multiplexers three 32 output multiplexers two 48 output multiplexers or one 96 output multiplexer The E5255A block diagram is shown in Figure 1 5 BIAS Input The BIAS INPUT ports are used to apply ac or dc bias to DUT BIAS INPUT ports are BNC connectors Each BIAS INPUT port is assigned to a 2 8 multiplexer block as shown in Table 1 2 And you can make ...

Page 25: ...cut the initial resistors Then if you need 0 Ω resistors again use the ones listed above WARNING Be careful about the following when selecting protective resistors If only one E5255A is installed in the mainframe total power consumption by resistors must be less than 16W If multiple E5255As are installed in the mainframe total power consumption by resistors must be less than 32W Consider the curre...

Page 26: ...5255A Product Description Figure 1 5 E5255A Block Diagram BIAS Input 1 Outpu t Resistor IV Input 1 BLOCK 1 1 2 3 4 5 6 7 8 BIAS Input 3 Outpu t Resistor IV Input 3 BLOCK 3 17 18 19 20 21 22 23 24 BIAS Input 2 Outpu t Resistor IV Input 2 BLOCK 2 9 10 11 12 13 14 15 16 ...

Page 27: ... The maximum voltage that can be applied to any input terminal is 200 Vdc The maximum current is 1 Adc at 200 Vdc The maximum voltage that can be applied between input terminals is 300 Vdc Do not apply an input signal over these limits to the E5255A inputs If you do the E5255A will be damaged If you use a bias source that has current limit capability set the bias source current limit to less than ...

Page 28: ...ts the options and accessories available for the E5250A Table 1 3 lists the options available for the E5250A Table 1 3 Options Model Number Option Item Description E5250A Low Leakage Switch Mainframe E5250A 301 Relay Test Adapter E5250A A6J ANSI Z540 compliant calibration E5250A UK6 Commercial cal certificate w test data ...

Page 29: ...o www agilent com and type in E5250A in the Search field at the top of the page 1 Agilent E5250A Program Disk LIF format 3 5 inch disk 1 Module Extractor 1 Wrench for removing plug in card 1 Power Cable 1 E5252A Agilent E5252A Installation Guide 1 Wrench for removing plug in card 1 E5255A Agilent E5255A Installation Guide 1 BNC Short Cap 3 BIAS Input Modification Kit BNC Open Cap 2 wire 2 1 0 Ω Re...

Page 30: ...am Runs on HP BASIC Refer to Chapter 6 Capacitance Compensation Routine Subprogram to compensate for capacitance error caused by the E5250A and E5252A Runs on HP BASIC This subprogram is used to compensate the capacitance data measured by Agilent 4284A Precision LCR Meter Refer to Chapter 6 Sample Programs Three sample programs one for Vth and C measurement using the E5252A and two for HCI test an...

Page 31: ...n Triaxial Cable 4142 kelvin to E5250 kelvin 16494C 001 1 5 m length 16494C 002 3 m length 16494D 8 Channel Shielded Coaxial Cable 16494D 001 1 5 m length 16494D 002 3 m length 16494E Wide Temperature 8 Channel Shielded Coaxial Cable 16494E 001 3m length 16495C Connector plate with 6 connectors for 16494D 16495D Connector plate with 12 connectors for 16494D 16495E Blank plate 16495F Connector plat...

Page 32: ...1 16 Agilent E5250A User s Guide Edition 11 Introduction Options and Accessories ...

Page 33: ...2 Installation ...

Page 34: ...o install the E5250A Maintenance describes about performance verification and cleaning WARNING The maximum input voltage of the E5250A is 200 V And dangerous voltages may be present at the E5250A output terminals To prevent electric shock you must observe the following safety precautions when using the E5250A Use a three conductor ac power cable to connect cabinet if used and the E5250A to an elec...

Page 35: ... Dents Scratches Cuts Water marks When you open the boxes that contain the E5250A check the components against the contents lists that are attached to the boxes After installing the E5250A check the E5250A operation by executing self test shown in Chapter 3 If anything is wrong notify your local Agilent Technologies sales office When shipping the E5250A When you unpack the E5250A retain all packin...

Page 36: ...ent is equipped with a three wire power cable When connected to an appropriate ac power outlet this cable grounds the instrument frame The type of power cable shipped with each instrument depends on the country of destination Refer to the following table for the part numbers of the power cables available If the plug on the cable does not fit the power outlet or the cable is to be attached to a ter...

Page 37: ...SR 107 2 D1 250 V 10 A PN 8120 2956 Plug IS 1293 and IS 6538 250 V 10 A PN 8120 4211 Plug JIS C 8303 125 V 12 A PN 8121 0743 Plug Israel SI 32 250 V 10 A PN 8120 5182 Plug IRAM 2073 10A 250 V 10 A PN 8120 6870 Plug CEI 23 16 250 V 10 A PN 8120 6978 Plug GB 1002 figure 3 250 V 10 A PN 8120 8376 Plug SANS 164 1 250 V 10 A PN 8120 4211 8121 0564 Plug TISI 166 250 V 10 A PN 8121 1866 Plug NBR 14136 25...

Page 38: ...ntal conditions Temperature 5 C to 40 C 41 F to 104 F Humidity 5 to 80 RH at 40 C 104 F non condensing Altitude 0 m to 2000 m Storage and Shipping Environment The E5250A should be stored or shipped in environments within the following limits Temperature 40 C to 70 C 40 F to 158 F Humidity 5 to 90 RH at 65 C 149 F Altitude 0 m to 15 240 m Protect the E5250A from temperature extremes to prevent cond...

Page 39: ...y Use clean handling and anti static procedures when removing configuring and installing the modules The modules contain components that can be damaged by static electricity NOTE Plug in module is shipped from the factory after the specifications are confirmed Agilent can guarantee that the modules will function and that the module performance is designed to meet its specifications However if you ...

Page 40: ...or is furnished with the E5250A b Loosen the screws on left and right edges of the card by using the wrench furnished with the E5250A c Gently pull the Module Extractor to extract the card from the card slot 3 Install the card as follows a Align the card with the left and right slot guide rails The component side should be facing up b Push the card into the slot until you feel it seat firmly into ...

Page 41: ...re that blank panels Agilent part number E5250 60003 are installed in all unused slots If the blank panel is not installed to cover an unused slot install the blank panel as follows 1 Align the blank panel over the unused slot 2 Screw in the screws on the left and right edges of the blank panel by using the wrench furnished with the E5250A Module Extractor Screw Hole for Module Extractor Agilent E...

Page 42: ... setting of DIP switch shown in Figure 2 2 For actual examples of modifications see E5255A Configuration Examples Each DIP switch has four bit switches Bits 1 to 3 are used to specify which SMU input connector is connected to the IV input Bit 4 of DIP switch is used to specify whether the protective resistors are 0 Ω or not The DIP switches must be set properly after you complete the internal conn...

Page 43: ... mainframe internal bus So if multiplexers on different E5255As use the same module pin the IV inputs are connected together via the internal bus SMU6 SMU5 SMU4 SMU3 SMU2 SMU1 IVout3 connector IVout2 connector IVout1 connector IVin1 cable IVin3 cable IVin2 cable DIP SW2 DIP SW3 DIP SW1 Resistors Total 24 Resistor holder 1 Screws Total 48 Block 1 Block 3 Block 2 Resistor holder 3 Resistor holder 2 ...

Page 44: ...nfirm that the resistors are held properly Resistors should be mounted on each multiplexer block that you will use 8 resistors block 4 Set bit 4 to ON 1 for the DIP switch of the related block For example if you mount resistors for Block 1 and 2 multiplexers set bit 4 to ON for DIP SW1 and SW2 To Select Protective Resistors Be careful about the following when selecting protective resistors Also be...

Page 45: ...lexer 1 BIAS input 1 IV input 4 modules 24 output multiplexer 3 BIAS inputs 1 IV input 1 module To make this multiplexer you need a E5255A See Figure 2 3 for example setup The example uses the SMU INPUT 1 connector as the IV input and uses 0 Ω resistors Figure 2 3 24 output multiplexer 3 BIAS inputs 1 IV input 1 module 1 Connect the IVin1 cable to the SMU1 input connector on the E5255A 2 Connect t...

Page 46: ...ule To make this multiplexer you need a E5255A two wires furnished and two BNC open caps furnished See Figure 2 4 for example setup The example uses the SMU INPUT 1 connector as the IV input and uses 0 Ω resistors Figure 2 4 24 output multiplexer 1 BIAS input 1 IV input 1 module 1 Connect the IVin1 cable to the SMU1 input connector on the E5255A 2 Connect the IVin2 cable to the IVout1 connector 3 ...

Page 47: ...connect the BNC open caps to the unused BIAS INPUT connectors Otherwise you will be shocked if you touch the connectors while bias is applied DO NOT connect the BNC short cap to the connectors If you do the E5255A and the Bias Source will be destroyed when the bias is applied To connect BIAS inputs externally You can use the BIAS INPUT connectors instead of the BIASin out internal connections show...

Page 48: ...o Install Plug in Card on page 2 8 3 Connect BNC open caps to the BIAS INPUT 51 connector of the module in the slot 1 and all BIAS INPUT 52 connectors 4 Connect BNC cables between the following connectors BIAS INPUT 51 slot 4 and BIAS INPUT 53 slot 3 BIAS INPUT 51 slot 3 and BIAS INPUT 53 slot 2 BIAS INPUT 51 slot 2 and BIAS INPUT 53 slot 1 So the BIAS INPUT 53 connector of the module in the slot ...

Page 49: ...s set to 22 To Connect GPIB Cable To connect the E5250A with a computer or peripheral device via GPIB IEEE Std 488 connect an GPIB cable between the GPIB connector on the E5250A rear panel and the GPIB connector on the peripheral device Including the controller a total of 15 GPIB interfaces can be connected on the same GPIB bus The following are rules for connecting GPIB interfaces If total number...

Page 50: ...ondition It is recommended to perform the performance verification once a year at least For the performance verification contact your nearest Agilent Technologies Service Center Trained service personnel will perform the performance verification Cleaning Before performing cleaning turn off the instrument and disconnect power cable from the rear panel Use a dry cloth to clean the external case part...

Page 51: ...3 Executing Self Test and Leak Test ...

Page 52: ...r Analyzer with the Self Test Utility program that is on the E5250A Program Disk furnished with the E5250A NOTE Performance Verification The Self Test and the Leak Test cannot be used to verify the specifications of the E5250A E5252A and E5255A To verify the specifications return the E5250A with the cards installed to your nearest Agilent Technologies Service Center The performance verification sh...

Page 53: ... operation of the E5250A firmware Turning on the E5250A page 3 4 Entering SCPI Command page 3 6 Using Self Test Utility page 3 10 Front Panel Interface Test Checks the operation of the LEDs and key that are on the E5250A front panel Entering SCPI Command page 3 6 Using Self Test Utility page 3 10 Relay Test Checks the operation of the relays on the cards installed in the E5250A Pressing the Local ...

Page 54: ...ocedure 1 Disconnect all cables from the E5250A input connectors 2 Open all outputs of the plug in cards as follows If cable is connected to output connector of plug in card open output at DUT end of cable If end of cable is Kelvin connection disconnect the cable or make non Kelvin connection at end of cable 3 Attach the Relay Test Adapter to the E5250A input connectors as shown in Figure 3 1 4 Se...

Page 55: ...onnected or a cable is still connected to input connector Output is not open See step 2 of previous procedure You did not properly install the E5255A See To Configure E5255A on page 2 10 A plug in card may be defective Contact your nearest Agilent Technologies Service Center Figure 3 1 Relay Test Adapter Connection NOTE Settings after Relay Test After Relay Test the E5250A settings are changed to ...

Page 56: ...s DIAG The DIAG commands ignore the E5250A channel configuration mode NORMAL or AUTO For DIAG commands that require a card number you specify 1 2 3 4 or ALL If the Fail LED turns on after executing the Self Test the E5250A or modules may be defective Contact your nearest Agilent Technologies Service Center NOTE Before executing Relay Test be careful about following Attach the Relay Test Adapter to...

Page 57: ...rns on the Fail LED If you pressed Local Self Test key within 10 seconds and the Fail LED still turns on it means the Local Self Test key is defective If you find any problem contact your nearest Agilent Technologies Service Center Test Item Description SCPI Command Controller Test Executes Controller Test then returns test result DIAG TEST FRAM EXEC CONT Returns test result DIAG TEST FRAM STAT CO...

Page 58: ...GOTO 160 140 DISP Failed Press Continue to go to I F Test 150 GOTO 170 160 DISP Passed Press Continue to go to I F Test 170 PAUSE 180 Front Panel I F Test 190 OUTPUT Hp5250 DIAG TEST FRAM EXEC FPAN 200 DISP Press Local Self Test Key within 10 sec 210 ENTER Hp5250 A 220 IF A 0 THEN GOTO 250 230 DISP Failed Press Continue to go to Relay Test 240 GOTO 260 250 DISP Passed Press Continue to go to Relay...

Page 59: ...ber Description 30 to 90 Clears all previous test results 100 to 170 Executes the Controller Test then returns test result 180 to 260 Executes the Front Panel Interface Test then returns the test result 270 to 340 Executes the Relay Test for the card installed in slot 1 of the E5250A then returns test result 350 to 410 Executes the Relay Test for the card installed in slot 2 of the E5250A then ret...

Page 60: ...elf Test items and Leak Test interactively using softkeys from the 4155 4156 This section explains the operation of the Self Test Utility Requirements To Start the Self Test Utility To Execute Self Test To Execute Leak Test Requirements The following equipment is required to execute the Self Test Utility Table 3 3 Required Equipment Agilent Model PartNo Description Qty Usage 4155 or 4156 Semicondu...

Page 61: ...156 front panel 6 Select GET softkey on the 4155 4156 screen The following is displayed GET _ 7 Type SELFTEST between the double quotations of GET statement Then press Enter key Wait until the 4155 4156 finishes getting the file 8 Press Run key which is in the IBASIC area on the 4155 4156 front panel The following message is displayed Input Agilent E5250A GPIB Address default 722 9 To use default ...

Page 62: ... E5255A Relay Test N CARD4 RELAY Start Slot4 E5255A Relay Test N CONTROLLER Start E5250A Controller Test P FRONT PANEL Start E5250A Front Panel UIF Test N MAIN MENU Return to MAIN MENU P indicates test was passed F indicates test was failed N indicates test was not executed Prepare the relay test adapters before you select CARDn RELAY key Select desired softkey _ Softkey Description CARD1 RELAY Fo...

Page 63: ... PANEL softkey 2 Confirm that the following four LEDs on the E5250A front panel are blinking And press the Local Self Test key on the E5250A front panel within 10 seconds Remote LED System Fail LED Fail LED Local Self Test LED NOTE Fail Condition for Front Panel Interface Test If an LED does not blink after selecting the FRONT PANEL softkey the LED is defective If you do not press the Local Self T...

Page 64: ...input terminals And attach the Relay Test Adapter to the E5250A input terminals For each E5255A card connect a BNC short cap to each E5255A BIAS INPUT port 3 Open all outputs of the plug in cards as follows If cable is connected to output connector of plug in card open output at DUT end of cable If end of cable is Kelvin connection disconnect the cable or make non Kelvin connection at end of cable...

Page 65: ...the leakage current The test limits are shown in Table 3 4 You specify an input port of the E5250A and specify the 4155 4156 SMU to use The Leak Test automatically connects the specified input port to each output port consecutively and uses the 4155 4156 SMU to measure the leakage current for each channel You need to execute this test for each input port Table 3 4 Test Limits of Leak Test Card Ins...

Page 66: ...he LEAK TEST MENU with the following softkeys are displayed 3 Select START TEST softkey Following message softkeys are displayed Select IV Port of Leak Test by softkey Softkey Description START TEST For defining the Leak Test connection Need to define the E5250A input port and 4155 4156 SMU port MAIN MENU Returns to MAIN MENU of the Self Test Utility Softkey Description IVn n 1 to 6 For specifying...

Page 67: ...ollowing message and the softkeys are displayed Select SMU channel for IVn leak measurement by softkey Where n 1 to 6 Softkey Description YES Declares that the port specified by the IVn softkey is used for the Kelvin connection NO Declares that the port specified by the IVn softkey is used for the non Kelvin connection CANCEL Cancels the Leak Test execution Softkey Description SMUm m 1 to 6 Declar...

Page 68: ...al cable or Kelvin triaxial cable to the 4155 4156 SMU terminal you specified in step 5 because the next step executes the zero offset cancel 7 Select the CONTINUE softkey The following message is displayed depending on the connection type Message for Kelvin connection Connect SMUm to IVn by Kelvin cable Message for non Kelvin connection Connect SMUm to IVn by cable Where m 1 to 6 specified by SMU...

Page 69: ...TINUE softkey to execute the Leak Test After the Leak Test is completed for the input port specified by the IVn softkey the test result PASS or FAIL is displayed on the 4155 4156 screen And the following softkeys are displayed To display the leak current measurement data on the 4155 4156 screen press the REPORT CRT softkey 10 To return to the LEAK TEST MENU select the LEAK TEST softkey And to perf...

Page 70: ...3 20 Agilent E5250A User s Guide Edition 11 Executing Self Test and Leak Test Using the Self Test Utility ...

Page 71: ...4 Setting up Measurement Environment ...

Page 72: ...ure refer to Agilent 16495 Installation Guide Connecting 8 Channel Shielded Coaxial Cable explains how to use the 16494E coaxial cable which is used to directly connect the E5255A output to the DUT DUT socket or any fixture you want without using a connector plate Mounting Connectors Directly describes connector hole dimensions for mounting connectors directly on your own connector plate or test f...

Page 73: ...and a GNDU connector The back of each connector is designed for soldering 16495G Full size connector plate for E5252A 16495G 001 has 24 triaxial through connectors female to female an Intlk connector and a GNDU connector triaxial through female to female The back of the Intlk connector is designed for soldering 16495G 002 has 24 triaxial connectors an Intlk connector and a GNDU connector The back ...

Page 74: ...or Plates Blank Plate 16495E Half size blank plate This plate is used to cover openings when you made too big openings for mounting the connector plate You will use this plate to cover openings if you mount the half size connector plate in openings made for the full size connector plate ...

Page 75: ...255A output directly to the DUT DUT socket or any fixture you want without using the connector plate One 16494E is used for one 8 channel output connector of the E5255A To use 24 output channels three 8 channel output connectors you need three 16494Es Instrument Side The instrument side of the 16494E cable can be connected directly to the E5255A output DUT Side Solder the open side of the 16494E d...

Page 76: ... has dimension information about the holes you need to make Do the following 1 Select the appropriate parts for your situation Refer to Table 4 1 2 Make holes and mount the connectors Refer to Table 4 2 For kelvin connection use the 16494B Kelvin cable Kelvin cable requires the kelvin triaxial connector which has two connector holes and three screw holes 3 Make interlock circuit as shown in To Mak...

Page 77: ...E5252A output 1250 2457 Triaxial Connector female 8121 1191 Low Noise Coaxial Cable Connecting E5255A output 1251 2367 Connector Frame female 1251 0179 Coaxial Connector female 8ea required for one frame 0380 3070 Screw 2ea required for one frame 2260 0002 Nut 2ea required for one frame 2190 0913 Washer 2ea required for one frame 8121 1191 Low Noise Coaxial Cable Kelvin Triaxial Connector in mm Tr...

Page 78: ... voltages of up to the maximum voltage of SMUs may be present at force guard and sense terminals when the interlock terminals are shorted To Install Interlock Circuit Install the interlock circuit as follows 1 Mount two mechanical switches on your shielding box so that the switches close when the door of the shielding box is closed and open when the door is opened For the dimensions of the switch ...

Page 79: ...ide Edition 11 4 9 Setting up Measurement Environment Mounting Connectors Directly Figure 4 3 Dimensions of Interlock Switch Agilent part number 3101 0302 Figure 4 4 Dimensions of Interlock Switch Agilent part number 3101 3241 ...

Page 80: ...d between pin 4 and pin 5 or 6 of the interlock connector the LED lights to indicate high voltage output when more than 40 V is forced from an SMU in the 4155 4156 To install LED circuit on your shielding box do following 1 Mount LED on your shielding box For the dimensions of the LED refer to Figure 4 5 2 Use wire to connect the LED between pin 4 and pin 5 or 6 of the interlock connector Refer to...

Page 81: ...55 4156 You can connect it directly without using any adapter For the instruments which has a BNC Type interlock connector If you use an instrument that has a BNC type interlock connector such as Agilent 4142B connect interlock connectors of instrument and the interlock circuit as follows Required Parts Procedure 1 Connect interlock connector of instrument to the BNC connector of the 16435A interl...

Page 82: ...panel key then select CALIB DIAG primary softkey to display the SYSTEM SELF CALIBRATION DIAGNOSTICS page 3 In the CALIB DIAG field select DIAG secondary softkey 4 In the CATEGORY field select I O PERIPH secondary softkey 5 Move pointer to the 403 INT Interlock LED field 6 Select EXECUTE secondary softkey 7 Confirm the following LED turns on within 1 sec from when interlock circuit is shorted LED t...

Page 83: ...tions non Kelvin connections This connection is available only for the Kelvin connectors This connection can cancel effects of cable resistance by connect sense line and force line as close as possible to DUT terminal Following connection is for the Kelvin connectors For the triaxial connectors or the 8 ch shielded connectors ignore SENSE terminal and make connection only for FORCE terminal Measur...

Page 84: ...s such as shielding box If you use probe card grounding the probe card also reduces capacitance measurement error NOTE Low Noise Coaxial Cable When you make a SMU output connection by using low noise coaxial cable Agilent part number 8121 1191 shave the Conductive layer and the Insulator clear by knife so that the Center Conductor is insulated from the Conductive layer Refer to following figure In...

Page 85: ...us voltage To Connect Instruments to Input Connectors The E5250A input connector has six SMU input connectors and four AUX input connectors Table 4 3 shows cables required to connect the instrument for typical applications using the E5250A You can make Kelvin connections when using the 4156 HRSMU 41501 HPSMU 4142B SMU E5270 SMU Use cables as follows 4156 41501 Agilent 16494B 003 Kelvin triaxial ca...

Page 86: ...C cable VMU AUX1 to 4 BNC cable Intlk 16493J Interlock cable for direct connection to Connector Plate 41501 HPSMU SMU1 to 6 16494B 003 Kelvin Triaxial cable or 16494A 003 Triaxial cable MPSMU SMU1 to 6 16494A 003 Triaxial cable PGU HF1 or 2 BNC cable GNDU SMU1 to 6 16493H GNDU cable and E5250 60004 Adapter 16493H GNDU cable for direct connection to Connector Plate 4142B SMU SMU1 to 6 16494C 001 Ke...

Page 87: ...ment output that uses banana plug to AUX connector use Dual Banana plug to BNC Adapter Agilent part number 1251 2277 Figure 4 6 shows an example of connecting the E5250A to the 4156 Figure 4 6 Connection Example with Agilent 4156 C Measurement C Meter High Low CV1 and 2 BNC cable Pulse Input Pulse Generator OUTPUT HF1 or 2 BNC cable Bias Input Power Supply OUTPUT AUX1 to 4 BNC cable Application In...

Page 88: ...4156 is usually connected to GNDU connector on the connector plate by using Agilent 16493H GNDU cable This connection allows current over 1A If you want to connect the GNDU through the E5250A to connector plate test fixture or DUT connect the GNDU to the E5250A input as shown below CAUTION Make sure current to GNDU is less than 1 A if you connect GNDU to the E5250A The maximum input current of the...

Page 89: ...gnal for SMU INPUT connectors is as follows If you make non Kelvin connection for the E5250A outputs use the odd input port only Because non Kelvin connection uses only Force signal for measurement SMU INPUT AUX To SMU 1 2 3 4 5 6 Agilent E5250A From GND TRIAX DUAL TRIAX Adapter Agilent 16493H Cable To SMU INPUT To GNDU SMU INPUT Port Number Input Signal 1 3 or 5 Force 2 4 or 6 Sense ...

Page 90: ...52A Output The E5252A output connector is shown in Figure 4 8 The E5250A input signal SMU input or AUX input appears at the E5252A output connector as shown in Figure 4 8 when input output switching path is made Figure 4 8 E5252A Output Connector and Output Signal You can easily connect the E5252A output connector to the connector plate or your test fixture by using cables shown in Table 4 4 Table...

Page 91: ... output port 1 3 5 7 9 and 11 couple two E5252A output ports as follows Figure 4 9 shows the 16494B Kelvin triaxial cable for the E5252A Figure 4 9 16494B Kelvin Triaxial Cable for E5252A Kelvin Output Port Output Port Number 1 1 Force and 2 Sense 3 3 Force and 4 Sense 5 5 Force and 6 Sense 7 7 Force and 8 Sense 9 9 Force and 10 Sense 11 11 Force and 12 Sense Connector Plate Side E5252A Side ...

Page 92: ...utput Connector and Output Signal You can easily connect the E5255A output to the connector plate or your test fixture by using the cable shown in Table 4 5 and Figure 4 11 The cable can be connected to the E5255A output ports labeled as 1 8 1 8 9 16 or 1 8 17 24 Table 4 5 E5255A Output Cable Figure 4 11 16494D 8 Channel Shielded Coaxial Cable for E5255A B A SMU Input BIAS B A Force Bias line Guar...

Page 93: ...f the guard capacitance is approximately 900 pF So you add the following and total must be less than 900 pF Guard capacitance of cable from SMU to E5250A SMU INPUT Guard capacitance of E5250A and installed plug in cards Guard capacitance of cable from plug in card output to connector plate Guard capacitance of cable from connector plate to DUT Other capacitances such as for probe card The followin...

Page 94: ... pF E5250A and Plug in Card E5252A only 1 card is installed 145 pF E5252A more 1 card 8 pF extra card E5255A only 1 card is installed 180 pF E5255A more 1 card 60 pF extra card from Card Output to Connector Plate 16494A 001 for non Kelvin 1 5 m 125 pF 16494A 002 for non Kelvin 3 m 240 pF 16494B 001 for Kelvin 1 5 m 140 pF 16494B 002 for Kelvin 3 m 260 pF 16494C 001 for 4142B 1 5 m 140 pF 16494C 00...

Page 95: ...5 Controlling the E5250A ...

Page 96: ... the E5250A introduces several methods for controlling the E5250A Switch Control Basics introduces basic information for controlling the relay switches on the E5252A and E5255A plug in cards Using Virtual Front Panel Utility describes how to use Virtual Front Panel VFP utility furnished with the E5250A The VFP is for Agilent 4155 4156 users ...

Page 97: ...you can use the Capacitance Compensation Routine and the VFP Data Upload Library furnished with the E5250A Capacitance Compensation Routine This routine is an subprogram runs on HP BASIC and is used to compensate for the capacitance measurement error caused by the E5250A when the E5252A is installed This subprogram is used with Agilent 4284A Precision LCR Meter You enter the capacitance data measu...

Page 98: ...ect the relay If the relay is opened and output voltage reaches the relay the relay may be damaged or its service life reduced Modifying a Sample Program The sample programs furnished with the E5250A are useful for creating your program on HP BASIC You can create your desired program easily by modifying a sample program To understand the sample programs and how to modify refer to Chapter 9 Also yo...

Page 99: ...ntrol Basics Switch Control Basics This section introduces basic information for controlling the relay switches on the E5252A and the E5255A Channel List and Channel Configuration Connection Rule Connection Sequence Bias Mode Couple Port E5252A Channel List E5255A Channel List ...

Page 100: ...ed later In the channel_list you can specify one or more channels Each specified channel consists of five digits as follows Card Number One digit decimal number 0 to 4 Specifies the slot number of the card that you want to control Depends on Channel Configuration mode Refer to Table 5 2 Channel Number Four digit decimal number First two digits specifies input port Last two digits specifies output ...

Page 101: ...ans 11010 and 20102 Colon use to specify a range of channels as in following examples 10101 10103 means 10101 10102 and 10103 10112 10202 means 10112 10201 and 10202 11012 20102 means 11012 20101 and 20102 As shown in last two examples you can specify a range across input ports and card slots NOTE In the Auto Configuration mode you can omit any zeros at beginning of channel For example channel 001...

Page 102: ...u specify actual card number and channel number input port number and output port number Auto Configuration To use this mode the same type of card must be installed in the E5250A slots from slot number 1 continuously slots 1 2 or slots 1 2 3 or slots 1 2 3 4 The installed cards are treated as one card for the output ports For example if the E5252As are installed in slots 1 2 3 you can specify outp...

Page 103: ...y one input port So existing connection to a port must be disconnected when a new connection is made If normal configuration mode is set to the E5250A with multiple cards an input output path is effective for each card For example if normal configuration mode is set to the E5250A with two E5252As and single route is set to both cards the following connection is possible Free Each input port can be...

Page 104: ...ce by using the ROUTe CONNection SEQuence command described in Chapter 7 You can select one of the three connection sequences shown in Table 5 3 for each card installed in the E5250A When an existing connection is changed to a new connection the relays are opened closed as follows Table 5 3 Connection Sequence Connection Sequence Relay Operation Break Before Make 1 Disconnect previous route 2 Wait...

Page 105: ...t ports that are not connected to any other input ports You cannot directly control which output ports are connected to the input Bias Port If another input port is disconnected ROUT OPEN command from a bias enabled output port the output port is automatically connected to the input Bias Port If another input port is connected ROUT CLOS command to a bias enabled output port the output port is auto...

Page 106: ...s Port When the Bias Mode is turned ON all bias enabled output ports that are not connected to other input ports are connected to the input Bias Port So the output ports that are connected to input port 1 and 3 are not connected to the input Bias Port Close Open Connect to Bias port Connect to Input 1 Connect to Input 3 Input 01 Input 03 Input 02 Bias Port Input 10 Output Port ...

Page 107: ...TATe command in Chapter 7 For a programming example refer to Chapter 6 The input ports 1 and 2 3 and 4 5 and 6 7 and 8 or 9 and 10 can be coupled together See Table 5 4 For example if you specify input port number 1 in the ROUTe COUPle PORT command input ports 1 and 2 are coupled together Table 5 4 Couple Port Number and Output Port Number Couple Port No Input Ports Available Output Port No 01 SMU...

Page 108: ...that the Couple Port mode is ON 1 If ROUT CLOS command specifies to connect channel 0105 relays are closed to realize two channels 0105 and 0206 2 If ROUT OPEN command specifies to disconnect channel 0105 all four relays between the two input ports and two output ports are opened Figure 5 3 Couple Port Relay Connections NOTE For each E5252A installed in the E5250A you can independently specify the...

Page 109: ...nel Number Four digits XXYY XX input port number 01 to 10 YY output port number 01 to 12 Channel Number assignment is shown in Figure 5 4 NOTE For the following two cases three ports share one input path Do not specify two of the input ports at same time SMU5 HF1 and CV1 Input Port No 05 07 and 09 SMU6 HF2 and CV2 Input Port No 06 08 and 10 For example if you specify input port 05 then you cannot ...

Page 110: ...1 HF1 SMU6 SMU5 SMU4 SMU3 0601 0602 0603 0604 0605 0606 0607 0608 0609 0610 0611 0612 0501 0502 0503 0504 0505 0506 0507 0508 0509 0510 0511 0512 0401 0402 0403 0404 0405 0406 0407 0408 0409 0410 0411 0412 0301 0302 0303 0304 0305 0306 0307 0308 0309 0310 0311 0312 XXXX Channel No 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 0901 0902 0903 0904 0905 0906 0907 0908 0909 0910 0911 091...

Page 111: ...n mode you can omit any zeros at beginning of channel For example channel 00101 can be expressed by 101 NOTE For the following two cases three ports share one input path Do not specify two of the input ports at same time SMU5 HF1 and CV1 Input Port No 05 07 and 09 SMU6 HF2 and CV2 Input Port No 06 08 and 10 For example if you specify input port 05 then you cannot specify input ports 07 and 09 You ...

Page 112: ...U5 SMU4 SMU3 0601 0602 0603 0604 0605 0606 0501 0502 0503 0504 0505 0506 0401 0402 0403 0404 0405 0406 0301 0302 0303 0304 0305 0306 XXXX Channel No 1001 1002 1003 1004 1005 1006 0901 0902 0903 0904 0905 0906 0801 0802 0803 0804 0805 0806 0701 0702 0703 0704 0705 0706 0245 0246 0247 0248 0145 0146 0147 0148 48 47 46 45 0645 0646 0647 0648 0545 0546 0547 0548 0445 0446 0447 0448 0345 0346 0347 0348...

Page 113: ...ng E5255A Channels in Normal Config Mode Slot No E5255A is installed Block No ofE5255A One Channel 5 digits CardNumber first 1 digit Channel Number 4 digits Input Port No next 2 digits Output Port No last 2 digits 1 1 1 IV Input 01 BIAS Input 51 01 to 08 2 IV Input 02 BIAS Input 52 3 IV Input 03 BIAS Input 53 2 1 2 IV Input 01 BIAS Input 51 01 to 08 2 IV Input 02 BIAS Input 52 3 IV Input 03 BIAS I...

Page 114: ...h the E5250A SMU Input is connected to the IV Input YY output port number 01 to 08 Channel Number assignment is shown in Figure 5 6 Figure 5 6 E5255A Channel Number in Normal Config Mode Block 1 Block 3 Block 2 1 8 7 6 5 4 3 2 BIAS Input 51 IV Input Output 0101 0102 0103 0104 0105 0106 0107 0108 5101 5102 5103 5104 5105 5106 5107 5108 1 8 7 6 5 4 3 2 IV Input Output 0301 0302 0303 0304 0305 0306 0...

Page 115: ...Minimum output port number is 01 Maximum output port number is the total number of output ports for the E5255A blocks connected to the same input port For each configured multiplexer output port number 01 is assigned to first output port of smallest block number on card in the lowest slot number IV Port Input Connection SMU Input Port No One Channel 5 digits Card Number first 1 digit Channel Numbe...

Page 116: ...nput port is internally connected to SMU1 input port Slot3 and Slot4 Both Block1 used together to make 2 16 multiplexer 1 IV input port is internally connected to SMU2 input port Both Block2 used together to make 2 16 multiplexer 2 IV input port is internally connected to SMU3 input port Block3 of Slot3 makes 2 8 multiplexer 1 IV input port is internally connected to SMU4 input port Block3 of Slot...

Page 117: ...nput 11 01 to 24 2 48MUX with slot 2 card 2 1 to 3 SMU1 0 IV Input 01 BIAS Input 11 25 to 48 2 48MUX with slot 1 card 3 1 SMU2 0 IV Input 02 BIAS Input 12 01 to 08 2 16MUX 1 with block1 in slot 4 card 2 SMU3 0 IV Input 03 BIAS Input 13 01 to 08 2 16MUX 2 with block2 in slot 4 card 3 SMU4 0 IV Input 04 BIAS Input 14 01 to 08 2 8MUX 1 4 1 SMU2 0 IV Input 02 BIAS Input 12 09 to 16 2 16MUX 1 with bloc...

Page 118: ...d in Slot 4 1 48 47 3 2 BIAS Input 11 IV Input SMU1 01 Output 0101 0102 0103 0147 0148 1101 1102 1103 1147 1148 1 16 15 3 2 BIAS Input 13 IV Input SMU3 03 Output 0301 0302 0303 0315 0316 1301 1302 1303 1315 1316 Made from Block 2 of Cards in Slot 3 and 4 Block 2 of each card should be connected in series 1 8 7 3 2 BIAS Input 14 Output 0401 0402 0403 0407 0408 1401 1402 1403 1407 1408 IV Input SMU4...

Page 119: ...arameter Analyzer s built in IBASIC controller You can control the E5250A interactively from the 4155 4156 by using the VFP utility This section describes how to use the VFP utility Functions of Virtual Front Panel Utility Requirements Starting the Virtual Front Panel Utility Confirming the E5250A Card Configurations Changing the VFP Setup Mode Defining Labels for the E5250A Input Ports Making Con...

Page 120: ... data Save load the setup data to from a file The setup data has 24 setup memories One setup memory is used for one measurement setup and is the minimum unit of the E5250A setup data For example one setup memory is used for MOSFET Vth measurement another setup memory is used for Capacitance measurement and so on One setup memory is used for the connection data of all installed cards The data creat...

Page 121: ...e IBASIC area on the 4155 4156 front panel 6 Select the GET softkey This softkey is displayed on right side of the 4155 4156 screen The following statement is displayed on the 4155 4156 GET _ 7 Type VFP between the double quotations of the GET statement Then press Enter key Wait until the 4155 4156 finishes getting the file 8 Press the Run key which in the IBASIC area on the 4155 4156 front panel ...

Page 122: ...MU input port is connected to the IV input of each multiplexer block The next parameter indicates if resistor is used between input Bias Port and IV Input ports as follows No Resistance no resistor used With Resistance resistor is used Softkey Description SHOW CONFIG For confirming which cards are installed in each E5250A slot SETUP MODE For changing the VFP setup mode Channel Configuration mode B...

Page 123: ...menu Softkey Description CHANGE CONFIG For changing the channel configuration mode See next page CARDn n 1 to 4 For selecting which card to change the Bias Port and Bias Mode state CARDn softkeys are displayed only in NORMAL configuration mode Displays the BIAS STATE BIAS PORT and RETURN softkeys Select RETURN softkey to display CARDn softkey again so you can select another card to change the Bias...

Page 124: ...Select the BIAS PORT softkey The following message is displayed Input Bias Port Number Type input port number 1 to 10 is available to use as bias port then press Enter key To cancel operation press Enter key without typing a number To change the Bias Mode state Select BIAS STATE softkey This softkey toggles the state OFF ON To enter cancel the changes and return to the VFP main menu Select MAIN ME...

Page 125: ...aracters then press the Enter key If you press the Enter key without typing any characters the label is cleared Softkey Description E5250A INPUT For displaying softkeys to select the desired input ports See below CARDn INPUT n 1 to 4 For selecting the E5255A You can define a label for the input Bias Port of selected E5255A This softkey is displayed only for card slots that have the E5255A installe...

Page 126: ...thout typing any characters the label is cleared Figure 5 10 Example of DEFINE LABEL MENU Agilent E5250A Virtual Front Panel Utility DEFINE LABEL MENU E5250A INPUT1 IV1 INPUT2 IV2 INPUT3 IV3 INPUT4 IV4 INPUT5 IV5 INPUT6 IV6 INPUT7 HF1 INPUT8 HF2 INPUT9 CV1 INPUT10 CV2 CARD1 E5252A No Bias Input Port CARD2 E5252A No Bias Input Port CARD3 E5255A BIAS1 C3B1 BIAS2 C3B2 BIAS3 C3B3 CARD4 E5255A BIAS1 C4...

Page 127: ...anges Current Setup Memory to specified setup memory number MODIFY SETUP For modifying settings in Current Setup Memory See later MORE Displays more softkeys See below table MAIN MENU Returns to the VFP main menu Softkey Description CLEAR SETUP For clearing settings of specified setup memory See later The setup memory is changed to Open All no connection setup COPY SETUP For copying a setup memory...

Page 128: ...e the E5250A setup to specified setup memory Select the GOTO SETUP softkey The following message is displayed Input setup memory number to be connected Type the desired setup memory number then press the Enter key Current Setup Memory changes to the specified setup memory and the E5250A changes to the new settings If you press Enter key without typing a number the operation is canceled To copy a s...

Page 129: ...cancel Type the setup memory number where you want to insert a new setup memory then press the Enter key For example if you specify 12 setup memory 24 is deleted setup memories 12 to 23 are shifted up by one and new setup memory 12 is set to Open All If you press Enter key without typing a number operation is canceled To clear setup memory To clear a setup memory select the CLEAR SETUP softkey The...

Page 130: ...on data of all installed cards For Auto Config mode settings for all cards are on one MEMORY SETUP PANEL For Normal Config mode each card uses a different MEMORY SETUP PANEL Figure 5 12 Memory Setup Panel for the E5252A in Auto Config Agilent E5250A Virtual Front Panel Utility MEMORY SETUP PANEL Current Setup Memory 1 Comment MOSFET Vth Card Number 0 111111111122222222223333333333444444444 Input 1...

Page 131: ...NEL Current Setup Memory 1 Comment MOS CAP Card Number 1 Input 12345678 IV1 BS1 IV1 BS1 IV1 BS1 Use softkeys to move cursor and to change status Figure 5 14 Memory Setup Panel for the E5255A in Auto Config 2 X 24 multiplexer Agilent E5250A Virtual Front Panel Utility MEMORY SETUP PANEL Current Setup Memory 1 Comment MOS CAP Card Number 0 111111111122222 Input 123456789012345678901234 IV1 BS1 Use s...

Page 132: ...WITCH PAGE Displayed only for AUTO Config mode not NORMAL Config mode Displays other page of MEMORY SETUP PANEL if more than 48 output ports This softkey is displayed if the E5250A is configured for multiplexer that has more than 48 outputs example 2 96 multiplexer This softkey toggles between the MEMORY SETUP PANEL for outputs 1 to 48 and for 49 to 96 NEXT SETUP Changes the Current Setup Memory t...

Page 133: ...desired setup memory number then press the Enter key Current Setup Memory changes to the specified setup memory and the E5250A changes to the new settings To cancel this operation press the Enter key without typing a number To change the settings in a setup memory Select the CHANGE CHAN softkey A cursor for selecting input output crosspoints is displayed And the following softkeys are displayed fo...

Page 134: ... input bias port this softkey changes the relay state open close and bias disabled means open means close means bias disabled When bias mode is ON if you disconnect a bias enabled output port from a non bias input port the output port is automatically connected to the input bias port UP Moves the cursor upward LEFT Moves the cursor to the left RIGHT Moves the cursor to the right DOWN Moves the cur...

Page 135: ...e input Bias Port OPEN ROW Opens all relays of row at cursor If Bias Mode is ON then closes relays to connect bias enabled output ports that are not connected to other input ports to the input Bias Port CLOSE ROW Closes all relays of row at cursor And all output ports are disconnected from the input Bias Port MORE Displays softkey menu 1 RETURN Displays the previous level of softkey menu Softkey D...

Page 136: ...ta from diskette Select the LOAD FILE softkey The following message is displayed Input Load file name Type the file name of setup data you want to load then press the Enter key The VFP setup data is loaded into the VFP To cancel this operation press the Enter key without typing the file name After loading the file the E5250A changes to the setting of setup memory 1 Softkey Description CATALOG List...

Page 137: ...6 Programming the E5250A ...

Page 138: ...5250A and runs on HP BASIC Creating a Control Program shows typical programming flow for controlling the E5250A Programming Examples provides some examples of the E5250A programming Using the VFP Data Upload Library explains how to use the VFP Data Upload Library furnished with the E5250A Using the Capacitance Compensation Routine explains how to use the Capacitance Compensation Routine furnished ...

Page 139: ...SCPI Programming Basics SCPI Programming Basics This section describes the structure of SCPI commands and the basics of using an program that contains SCPI commands to control the E5250A and runs on HP BASIC SCPI Command Hierarchy Controlling E5250A by Using HP BASIC ...

Page 140: ...sub level 2 The colon at the beginning of the command means root The colons between two command keywords means moving down to a lower level NOTE Using a Semicolon to Reduce Typing A semicolon enables two commands to be sent on the same line For example ROUT CONN RULE ALL FREE SEQ ALL BBM is the same as the following two commands ROUT CONN RULE ALL FREE ROUT CONN SEQ ALL BBM So using a semicolon re...

Page 141: ...ple 10 REAL Complete 20 30 ASSIGN Hp5250 TO 722 40 50 OUTPUT Hp5250 RST 60 70 OUTPUT Hp5250 ROUT FUNC NCON 80 OUTPUT Hp5250 ROUT CONN RULE ALL FREE 90 OUTPUT Hp5250 ROUT CONN SEQ ALL BBM 100 OUTPUT Hp5250 ROUT CLOS 10101 10202 110 120 OUTPUT Hp5250 OPC 130 ENTER Hp5250 Complete 140 150 END Line Number Description 10 Declares Complete as a real number 30 Assigns I O path to control the E5250A 50 Re...

Page 142: ...ection Sequence Using Bias Mode Using Couple Port for E5252A only Controlling Relay Switching Table 6 1 summarizes the commands for each part of the control program for the E5250A In the table default setting means the instrument state by the RST command or power on CAUTION The SCPI commands introduced in this section are ROUTe subsystem commands for controlling the E5250A There are also other SCP...

Page 143: ... output ports ROUT BIAS CHAN ENAB LIST channel_list All enabled Bias disables all output ports ROUT BIAS CHAN DISA CARD card_no All enabled Bias disables specified output ports ROUT BIAS CHAN DISA LIST channel_list All enabled Sets Bias Mode ON OFF ROUT BIAS STAT card_no state ALL OFF 5 Using Couple Port for E5252A Sets up Couple Port ROUT COUP PORT card_no input_port_no No couple ports Sets Coupl...

Page 144: ...5250A to Normal channel configuration mode Defining Connection Rule Following commands are used to set the Connection Rule For details refer to Connection Rule on page 5 9 Example 100 OUTPUT Hp5250 ROUT CONN RULE ALL FREE 110 Sets all cards to Free Connection rule Command Description ROUT FUNC NCON Sets Normal Channel Configuration mode ROUT FUNC ACON Sets Auto Channel Configuration mode Command D...

Page 145: ...r details refer to Connection Sequence on page 5 10 Example 100 OUTPUT Hp5250 ROUT CONN SEQ ALL BBM 110 Sets all cards to Break before Make connection sequence Command Description ROUT CONN SEQ card_no NSEQ Connection sequence not specified ROUT CONN SEQ card_no BBM Specifies Break before Make connection sequence ROUT CONN SEQ card_no MBBR Specifies Make before Break connection sequence ...

Page 146: ... on all cards 140 OUTPUT Hp5250 ROUT BIAS STAT ALL ON 150 Turns on the Bias Mode for all cards Command Description ROUT BIAS PORT card_no input_port_no input_port_no specifies which input port on specified card to be the input Bias Port Command Description ROUT BIAS CHAN ENAB CARD card_no Bias enables all output ports on specified card ROUT BIAS CHAN ENAB LIST channel_list Bias enables the specifi...

Page 147: ...ns the Couple Port Mode ON or OFF Example 100 OUTPUT Hp5250 ROUT COUP PORT ALL 1 3 110 Sets up two couple ports 1 2 and 3 4 on all cards 120 OUTPUT Hp5250 ROUT COUP STAT ALL ON 130 Turns on the couple port mode for all cards Command Description ROUT COUP PORT card_no input_port_no Sets up couples ports determined by input_port_no on card specified by card_no Command Description ROUT COUP STAT card...

Page 148: ...of channel_list see Channel List and Channel Configuration on page 5 6 Example 100 OUTPUT Hp5250 ROUT CLOS 10101 10202 110 Closes relays to create channels 10101 and 10202 Command Description ROUT CLOS channel_list Close the relays specified by channel_list ROUT OPEN channel_list Open the relays specified by channel_list ROUT OPEN CARD card_no Open all relays on card specified by card_no ...

Page 149: ...in the HP BASIC language and can be executed without any modifications But the program examples do not include instrument control routines so to make a measurement you need to add the desired routines This section explains the following three examples Channel Creation Example Bias Mode Example Couple Port Example For each example the required conditions program list and program description are giv...

Page 150: ...Couple Port are not used in this example Figure 6 1 MOSFET Connection Example Required Conditions This program assumes the following conditions E5250A Installed Cards Slot 1 E5252A Slot 2 to 4 not used E5250A Input Ports SMU INPUT 1 to 4 should be connected to instrument SMU INPUT 5 to 6 not used AUX INPUTs not used E5252A Output Ports Output 1 to 4 are used in the program and should be connected ...

Page 151: ...R Hp5250 Complete 190 200 Put Measurement Routine here 210 220 OUTPUT Hp5250 ROUT OPEN CARD ALL Opens all relays 230 OUTPUT Hp5250 OPC 240 ENTER Hp5250 Complete 250 260 OUTPUT Hp5250 RST 270 280 END Line Number Description 40 Declares data size of Channel which is used as channel_list parameter 60 Defines the desired channel_list 80 Here insert the initialization routine for your measurement instr...

Page 152: ...the following conditions E5250A Installed Cards Slot 1 E5255A Slot 2 to 4 not used E5250A Input Ports SMU INPUT 1 should be connected to instrument SMU INPUT 2 to 6 not used AUX INPUTs not used E5255A Connection IV Input Connection IVin1 should be connected to the E5250A SMU INPUT 1 Bias Input Connection BIAS INPUT 51 should be connected to bias source E5255A Output Ports Block 1 outputs 1 to 8 ar...

Page 153: ...5250 ROUT BIAS STAT 1 ON Line Number Description 40 Declares data size of Channel which is used as channel_list parameter 50 Defines the desired channel_list 70 Here insert the initialization routine for your measurement instrument 100 Resets the E5250A 110 Sets the E5250A to Normal channel configuration mode 120 Sets the connection rule to FREE 130 This line is not used commented for the E5255A I...

Page 154: ... Hp5250 Complete 290 300 OUTPUT Hp5250 RST 310 320 END Line Number Description 170 Here insert your bias source control routine 190 Disconnects all output ports of block 1 from the input Bias Port then connects the output ports to the IV input port 200 to 210 Waits until the channel connections are completed 230 Here insert measurement routine for your measurement instrument 250 Turns off the Bias...

Page 155: ...ng conditions E5250A Installed Cards Slot 1 E5252A must be installed Slot 2 to 4 not used E5250A Input Ports SMU INPUT 1 and 2 should be connected to instrument SMU INPUT 3 4 and 5 6 should be connected to instrument Couple port AUX INPUTs not used The program couples SMU INPUT 3 4 and couples SMU INPUT 5 6 For each Couple Port use Kelvin triaxial cable for instrument connection E5252A Output Port...

Page 156: ...OUTPUT Hp5250 RST 120 OUTPUT Hp5250 ROUT FUNC ACON 130 OUTPUT Hp5250 ROUT CONN RULE ALL SROU 140 OUTPUT Hp5250 ROUT CONN SEQ ALL BBM Line Number Description 40 Declares data size of Channel which is used as channel_list parameter 60 Defines the desired channel_list 80 Here insert the initialization routine for your measurement instrument 110 Resets the E5250A 120 Sets the E5250A to Auto channel co...

Page 157: ... Hp5250 ROUT OPEN CARD ALL 250 OUTPUT Hp5250 OPC 260 ENTER Hp5250 Complete 270 280 OUTPUT Hp5250 RST 290 300 END Line Number Description 150 Sets up SMU3 4 and SMU5 6 input ports as Couple Ports 160 Turns on the Couple Port mode 180 Closes relays to create channels specified by Channel 190 to 200 Waits until the relay close operation is completed 220 Here insert measurement routine for your measur...

Page 158: ...is section introduces and explains how to use the VFP Data Upload Library VFP Data Upload Library Programming Example Before Executing Your Program Error Messages For information about using the VFP refer to Using Virtual Front Panel Utility on page 5 25 CAUTION The VFP Data Upload Library can be used only in an program runs on HP BASIC ...

Page 159: ...E Setup_data Parameters Address_5250 GPIB address of the E5250A LOAD_FILE File name of data you want to load Setup_data Data string for internal use in the library Must declare 14000 byte data size Example CALL Load_vfp_data 722 MAT48_1 Mat48_data Init_vfp_setup subprogram Initializes the E5250A based on the setup mode data loaded by the Load_vfp_data subprogram This subprogram sets the following ...

Page 160: ...e in the library Must declare 14000 byte data size Setup_num Setup Memory number 1 to 24 Example CALL Connect_vfp Mat48_data 1 FNGet_vfp_comment subprogram Returns comment from the specified Setup Memory Comments for all 24 Setup Memories were loaded by the Load_vfp_data subprogram Syntax FNGet_vfp_comment Setup_data Setup_num Parameters Setup_data Data string for internal use in the library Must ...

Page 161: ...p_setup Mat48_data 120 130 DISP SETUP IN PROGRESS SETUP NO Setup_num 140 CALL Connect_vfp Mat48_data Setup_num 150 160 Comment FNGet_vfp_comment Mat48_data Setup_num 170 180 DISP SETUP WAS COMPLETED SETUP COMMENT Comment 190 200 END Line Number Description 30 Declares data size of Mat48_data which is for internal use by the library Size must be 14000 40 Declares data size of Comment which is for s...

Page 162: ...from the E5250A Program Disk GET UPLOAD b RE STORE the file RE STORE U_LIB c LOAD your program d Link the library to your program by using the LOADSUB statement LOADSUB ALL FROM U_LIB 2 Change the mass storage device Before executing your program you must set the mass storage device to the device that has the file that will be loaded by Load_vfp_data subprogram For example if the file is on the de...

Page 163: ...t E5250A Instrument specified by GPIB address XXX is not E5250A Confirm GPIB address for the E5250A and enter the correct value Note XXX is the number you specified for the parameter Address_5250 in the Load_vfp_data subprogram File data is not VFP format or is broken Cannot load the data because the data format is not for VFP or the data is broken Enter the correct file name GPIB address connecti...

Page 164: ...ation Routine can be used only in an program runs on HP BASIC Corrected data by the routine is not guaranteed But typical data supplemental data is as follows Capacitance measurement accuracy 1 0 5 pF This typical data is for the following measurement conditions Frequency 1 kHz to 1 MHz Measurement Range Maximum 1000 pF Measurement Terminal At the end of the Agilent 16494A 001 1 5 m triaxial cable...

Page 165: ... connector plate L2_h Length in meters of triaxial cable connected from connector plate to DUT High terminal of capacitor If you do not use triaxial cable enter 0 for this parameter L2_l Length in meters of triaxial cable connected from connector plate to DUT Low terminal of capacitor If you do not use triaxial cable enter 0 for this parameter L3_h Length in meters of coaxial cable connected from ...

Page 166: ...5250A Input port CV1 and CV2 Connection of E5252A output To Connector Plate Use Agilent 16494A Triaxial Cable From Connector Plate to DUT Use low noise coaxial cable Agilent part number 8121 1191 for minimizing the compensation error You can also use another type of coaxial cable triaxial cable or combination of these See Using Other than Recommended Cable Using Other than Recommended Cable If you...

Page 167: ... 12 User Coax Cbl H 1450 DATA 114 00E 3 544 00E 9 130 00E 12 User Coax Cbl L FORCE or SENSE A FORCE or SENSE B Insulator Triaxial Cable GUARD C GUARD D GROUND F GROUND E Measurement Parameter Measurement Frequency Measurement Function Measurement Terminals a R 1 kHz to 1 MHz b A and B L SERIES see note c C PARALLEL A and C a See figure above b Select 1 point in the frequency range c For triaxial c...

Page 168: ...SET 16048D LENGTH 220 OUTPUT Hp4284 TRG 230 ENTER Hp4284 C_m G_m Stat 240 250 Ccompen_5250 Freq L1 L2_h L2_l L3_h L3_l C_m G_m C_c G_c 260 DISP CORRECTED C DATA C_c 270 DISP CORRECTED G DATA G_c 280 290 END Before Executing Your Program Before executing a program that uses the capacitance compensation subprogram you must link the subprogram to your program as follows The subprogram is in an ASCII ...

Page 169: ...7 Command Reference ...

Page 170: ... some are general purpose Subsystem commands have a hierarchical structure that uses a colon between mnemonics keywords such as DIAG TEST CARD RES Commands for the following subsystems are available for the E5250A DIAGnostic commands for performing self test ROUTe commands for signal routing SYSTem commands for controlling other functions that are not related to instrument performance Commands are...

Page 171: ...ot required for execution of the command sequence For example for the ROUTe BIAS PORT command you can execute ROUT BIAS PORT or BIAS PORT which are exactly the same italic font Text you supply For example for card_number you enter an allowed card number Also used to represent response data Vertical bar can be read as or and is used to separate alternative parameter options Braces curly brackets ar...

Page 172: ... table shows some common commands that are supported for the E5250A Common Commands for E5250A Mnemonic Name CLS Clear Status ESE Standard Event Status Enable Command Query ESR Standard Event Status Register Query IDN Identification Query OPC Operation Complete Command Query RST Reset Command SRE Service Request Enable Command Query STB Read Status Byte Query TST Self Test Query WAI Wait to Contin...

Page 173: ...ponse enable_number newline END enable_number is decimal integer value that is the sum of the binary weighted values of the Enable register bits Semantics The Standard Event Status Enable Register determines which bits of the Standard Event Status Register are enabled Enabled bits are ORed together and the result is reported to bit5 of the Status Byte Register The Standard Event Status Enable Regi...

Page 174: ...UTPUT Hp5250 ESE 32 using decimal numeric OUTPUT Hp5250 ESE B100000 using binary numeric OUTPUT Hp5250 ESE Q40 using octal numeric OUTPUT Hp5250 ESE H20 using hexadecimal numeric The following is example for query OUTPUT Hp5250 ESE ENTER Hp5250 A bit binary weight description 0 1 OPC Operation Complete 1 2 not used 2 4 QYE Query ERROR 3 8 DDE Device Dependent ERROR 4 16 EXE Execution ERROR 5 32 CM...

Page 175: ...tandard Event Status Register and the binary weighted decimal value of each bit Example OUTPUT Hp5250 ESR ENTER Hp5250 A Parameter Explanation register decimal integer value that is the sum of the binary weighted values for the set bits bit binary weight description 0 1 OPC Operation Complete 1 2 not used always 0 2 4 QYE Query ERROR 3 8 DDE Device Dependent ERROR 4 16 EXE Execution ERROR 5 32 CME...

Page 176: ...0A Syntax IDN Query response HEWLETT PACKARD model 0 revision newline END Example DIM A 50 OUTPUT Hp5250 IDN ENTER Hp5250 A PRINT A An example result of above program is HEWLETT PACKARD E5250A 0 A 01 00 Response Type Explanation model character model number E5250A revision character revision number A 01 00 or later ...

Page 177: ... all pending operations are completed So OPC command is required to enable the OPC bit To stop monitoring pending operations disable OPC bit execute the CLS command For details about the Standard Event Status Register refer to Standard Event Status Register on page 7 53 Also see WAI command Syntax OPC Query response 1 newline END OPC places ASCII character 1 into the Output Queue when all pending ...

Page 178: ...e Free Connection Sequence Break Before Make Bias Mode Off Bias Port E5252A 10 E5255A None Bias Enabled Channels All channels output ports are bias enabled Couple Port Mode Off Couple Port No Couple Port Card Channel Status All relays open Self Test Result No Change Syntax RST Example OUTPUT Hp5250 RST NOTE This command does not change the self test result For the power on settings see SYSTEM CPON...

Page 179: ... enabled bits are ORed together and the result of OR is output to bit6 Master Summary Status bit of Status Byte Register For details refer to Status Reporting Structure on page 7 48 The following table shows the bits of the Status Byte Register and the binary weighted decimal value of each bit Parameter Explanation enable_number decimal integer that is the sum of the binary weighted values for the...

Page 180: ...our lines enable the same bits bit 4 and 5 OUTPUT Hp5250 SRE 48 using decimal numeric OUTPUT Hp5250 SRE B110000 using binary numeric OUTPUT Hp5250 SRE Q60 using octal numeric OUTPUT Hp5250 SRE H30 using hexadecimal numeric The following is example for query OUTPUT Hp5250 SRE ENTER Hp5250 A ...

Page 181: ...wline END Semantics The following table shows the bits of the Status Byte Register and the binary weighted decimal value of each bit Example OUTPUT Hp5250 STB ENTER Hp5250 A Parameter Explanation register decimal integer value that is the sum of the binary weighted values for the set bits bit binary weight description 0 1 not used always 0 1 2 not used always 0 2 4 not used always 0 3 8 not used a...

Page 182: ...50A becomes same status as after RST command execution Syntax TST Query response test_result newline END Example OUTPUT Hp5250 TST ENTER Hp5250 A WAI This command stops execution of any commands until the Operation Complete OPC bit is set to 1 which means there is no pending operation Refer to OPC command Syntax WAI Example OUTPUT Hp5250 WAI test_result Explanation 0 pass 1 fail ...

Page 183: ...ter 3 NOTE The DIAGnostic subsystem commands ignore the E5250A channel configuration mode For DIAG commands that require a card number you specify 1 2 3 4 or ALL DIAGnostic Command Tree Parameter values card_number 1 2 3 4 Command Parameter DIAGnostic TEST CARD CLEar card_number ALL EXECute card_number ALL STATe card_number FRAMe CLEar CONTroller FPANel EXECute CONTroller FPANel STATe CONTroller F...

Page 184: ...the relay test for specified card then returns the pass fail result For more info see Chapter 3 NOTE You must attach the relay test adapter before executing this command This command changes all settings of card to same state as after executing SYST CPON command Syntax DIAGnostic TEST CARD EXECute card_number Query response test_result newline END 1 Fail card exists 0 Pass Example OUTPUT Hp5250 DI...

Page 185: ...y response test_result newline END 1 Fail 0 Pass 1 Not Tested Example OUTPUT Hp5250 DIAG TEST CARD STAT 1 ENTER Hp5250 A DIAGnostic TEST FRAMe CLEar This command clears test result of the specified E5250A test Syntax DIAGnostic TEST FRAMe CLEar CONTroller FPANel Example OUTPUT Hp5250 DIAG TEST FRAM CLE CONT Parameter Explanation card_number card number 1 2 3 4 Parameter Explanation CONTroller Cont...

Page 186: ... same as after RST command execution After DIAG TEST FRAM EXEC FPAN execution the E5250A status is not changed NOTE The DIAG TEST FRAM EXEC FPAN command requires key input from the front panel If key is not pressed within 10 seconds this test result will be fail Syntax DIAGnostic TEST FRAMe EXECute CONTroller FPANel Query response test_result newline END 1 Fail 0 Pass Example OUTPUT Hp5250 DIAG TE...

Page 187: ...urns the most recent test result pass fail of the specified E5250A test Syntax DIAGnostic TEST FRAMe STATe CONTroller FPANel Query response test_result newline END 1 Fail 0 Pass 1 Not Tested Example OUTPUT Hp5250 DIAG TEST FRAM STAT CONT ENTER Hp5250 A Parameter Explanation CONTroller Controller test FPANel Front panel interface test ...

Page 188: ... from output port Close a channel closes relays to connect the channel that is connects input port to output port ROUTe Command Tree Command Parameter ROUTe BIAS CHANnel DISAble CARD card_number ALL LIST channel_list LIST channel_list ENABle CARD card_number ALL LIST channel_list LIST channel_list PORT card_number ALL bias_port PORT card_number STATe card_number ALL state STATe card_number CLOSe C...

Page 189: ...FF 0 1 rule FREE SROU channel_config ACON NCON sequence NSEQ BBM MBBR Command Parameter ROUTe CONNection RULE card_number ALL rule RULE card_number SEQuence card_number ALL sequence SEQuence card_number COUPle PORT card_number ALL couple_port PORT card_number STATe card_number ALL state STATe card_number FUNCtion channel_config FUNCtion OPEN CARD card_number ALL LIST channel_list LIST channel_list...

Page 190: ...om the output ports specified by channel_list Refer to ROUTe BIAS STATe At RST all output ports are bias enabled Syntax ROUTe BIAS CHANnel DISable LIST channel_list The input ports specified by the channel_list are ignored The input port is always the input Bias Port So in the channel_list only the card numbers and output ports have meaning But you cannot omit the input port in the channel_list Ex...

Page 191: ...t is always the input Bias Port So in the channel_list only the card numbers and output ports have meaning But you cannot omit the input port in the channel_list Query response disable_status disable_status newline END 1 disabled 0 enabled Example OUTPUT Hp5250 ROUT BIAS CHAN ENAB CARD ALL OUTPUT Hp5250 ROUT BIAS CHAN DIS 10101 OUTPUT Hp5250 ROUT BIAS CHAN DIS 10101 10102 10201 ENTER Hp5250 A In a...

Page 192: ...nd closes relays to connect the input Bias Port to all output ports that are not already connected by ROUT CLOS command to other input ports Refer to ROUTe BIAS STATe At RST all output ports are bias enabled Syntax ROUTe BIAS CHANnel ENABle CARD card_number Example OUTPUT Hp5250 ROUT BIAS CHAN ENAB CARD ALL Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Conf...

Page 193: ...T all output ports are bias enabled Syntax ROUTe BIAS CHANnel ENABle LIST channel_list The input ports specified by the channel_list are ignored The input port is always the input Bias Port So in the channel_list only the card numbers and output ports have meaning But you cannot omit the input port in the channel_list Example OUTPUT Hp5250 ROUT BIAS CHAN ENAB 10401 10502 In above example the input...

Page 194: ... is always the input Bias Port So in the channel_list only the card numbers and output ports have meaning But you cannot omit the input port in the channel_list Query response enable_status enable_status newline END 1 enabled 0 disabled Example OUTPUT Hp5250 ROUT BIAS CHAN DIS CARD ALL OUTPUT Hp5250 ROUT BIAS CHAN ENAB 10101 OUTPUT Hp5250 ROUT BIAS CHAN ENAB 10101 10102 10201 ENTER Hp5250 A In abo...

Page 195: ...to same port number This command selects which input port is the Bias Port on the specified card For each card you can specify the same or different Bias Port For details refer to Bias Mode in Chapter 5 At RST Bias Port is set to 10 for the E5252A Syntax ROUTe BIAS PORT card_number bias_port Example OUTPUT Hp5250 ROUT BIAS PORT ALL 6 Parameter Explanation card_number card number For Auto Config mo...

Page 196: ...built in Bias Port This query command returns the input Bias Port number for the specified card Syntax ROUTe BIAS PORT card_number Query response port_number newline END port_number 1 to 10 Example OUTPUT Hp5250 ROUT BIAS PORT ALL 4 OUTPUT Hp5250 ROUT BIAS PORT 1 ENTER Hp5250 A For above example A will be as follows 4 Parameter Explanation card_number card number For Auto Config mode 0 For Normal ...

Page 197: ...S PORT When Bias Mode is ON you cannot directly specify Bias Port connections by ROUT OPEN or ROUT CLOSE Refer to those commands for details Bias disabled output ports are never connected to the input Bias Port when Bias Mode is ON When Bias Mode is OFF the input Bias Port is the same as the other input ports so relays can be controlled directly to connect to output ports At RST the value of this ...

Page 198: ...UTe CLOSe CARD This query command returns channel_list of all closed connected channels for the specified card Syntax ROUTe CLOSe CARD card_number Query response channel_list newline END Example OUTPUT Hp5250 ROUT OPEN CARD ALL OUTPUT Hp5250 ROUT CLOS 10101 10202 OUTPUT Hp5250 ROUT CLOS CARD 1 ENTER Hp5250 A A will be 10101 10202 For the meaning of channel_list refer to Chapter 5 Parameter Explana...

Page 199: ... input port Refer to ROUTe BIAS STATe Syntax ROUTe CLOSe LIST channel_list Example OUTPUT Hp5250 ROUT CLOS 10101 10202 ROUTe CLOSe LIST This query command returns 0 or 1 for each channel specified by channel_list in same order as specified by channel_list 0 channel is opened not connected 1 channel is closed connected Syntax ROUTe CLOSe LIST channel_list Query response close_status close_status ne...

Page 200: ...LE This query command returns the connection rule of the specified card For details refer to Connection Rule in Chapter 5 Syntax ROUTe CONNection RULE card_number Query response FREE or SROU newline END Example OUTPUT Hp5250 ROUT CONN RULE ALL SROU OUTPUT Hp5250 ROUT CONN RULE 1 ENTER Hp5250 A In above example A will be SROU Parameter Explanation card_number card number For Auto Config mode 0 or A...

Page 201: ... details refer to Connection Sequence in Chapter 5 The connection sequence is used only for cards that have been set to SROUte connection rule Refer to ROUTe CONNection RULE At RST BBMake is selected Syntax ROUTe CONNection SEQuence card_number sequence Example OUTPUT Hp5250 ROUT CONN SEQ ALL MBBR Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Config mode 1 ...

Page 202: ... card For details refer to Connection Sequence in Chapter 5 Syntax ROUTe CONNection SEQuence card_number Query response NSEQ or BBM or MBBR newline END Example OUTPUT Hp5250 ROUT CONN SEQ ALL MBBR OUTPUT Hp5250 ROUT CONN SEQ 0 ENTER Hp5250 A In above example A will be as follows MBBR Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 ...

Page 203: ...COUP STAT For each card you can set up the same or different couple ports This command overwrites the previous couple port setting for the card At RST no input ports are coupled Syntax ROUTe COUPle PORT card_number couple_port Example OUTPUT Hp5250 ROUT COUP PORT ALL 1 OUTPUT Hp5250 ROUT CLOS 10103 This example connects input port 1 to output port 3 and connects input port 2 to output port 4 The l...

Page 204: ...upled pair For details refer to Couple Ports in Chapter 5 Syntax ROUTe COUPle PORT card_number Query response port_number port_number newline END port_number 1 or 3 or 5 or 7 or 9 Example OUTPUT Hp5250 ROUT COUP PORT ALL 1 3 OUTPUT Hp5250 ROUT COUP PORT 1 ENTER Hp5250 A In above example A will be as follows 1 3 Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config ...

Page 205: ...Mode for the specified card For details refer to Couple Ports in Chapter 5 To set up the couple ports refer to ROUT COUP PORT At RST the value of this parameter is OFF Syntax ROUTe COUPle STATe card_number state Example OUTPUT Hp5250 ROUT COUP STAT ALL ON Parameter Explanation card_number card number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL state ON or 1 turn ON the Coup...

Page 206: ... Couple Port Mode of the specified card For details refer to Couple Ports in Chapter 5 Syntax ROUTe COUPle STATe card_number Query response 0 or 1 newline END 0 Couple Port Mode is OFF 1 Couple Port Mode is ON Example OUTPUT Hp5250 ROUT COUP STAT ALL ON OUTPUT Hp5250 ROUT COUP STAT 2 ENTER Hp5250 A For above example A will be as follows 1 Parameter Explanation card_number card number For Auto Conf...

Page 207: ...ame status as after SYSTem CPON ALL command execution At RST this parameter is set to NCONfig Syntax ROUTe FUNCtion channel_config Example OUTPUT Hp5250 ROUT FUNC ACON ROUTe FUNCtion This query command returns the present channel configuration For details refer to Channel List and Channel Configuration in Chapter 5 Syntax ROUTe FUNCtion Query response ACON or NCON newline END Example OUTPUT Hp5250...

Page 208: ...s as specified in channel_list For some modes such as Single Route Mode Couple Port Mode and Bias Mode more complex disconnections may occur For details refer to Chapter 5 For example if Bias Mode is ON you cannot directly specify the input Bias port But if you use ROUT OPEN to disconnect a bias enabled output port from another input port the output port is automatically connected to the input Bia...

Page 209: ...onnected 1 channel is opened not connected Syntax ROUTe OPEN LIST channel_list Query response open_status open_status newline END 1 opened 0 closed Example OUTPUT Hp5250 ROUT OPEN CARD ALL OUTPUT Hp5250 ROUT CLOS 10101 10202 OUTPUT Hp5250 ROUT OPEN 10101 10102 10201 10202 ENTER Hp5250 A In above example A will be as follows 0 1 1 0 Parameter Explanation channel_list Channels to check For details a...

Page 210: ...Tem subsystem is a collection of functions that are not related to instrument performance SYSTem Command Tree Parameter values card_number Auto Config Mode 0 Normal Config Mode 1 2 3 4 Command Parameter SYSTem CCONfig card_number CDEScription card_number CPON card_number ALL CTYPe card_number ERRor VERSion ...

Page 211: ... as follows A indicates input port 1 to 6 that is connected to block 1 B indicates if resistance is set for block 1 Bias Port 1 resistance set 0 not set C indicates input port 1 to 6 that is connected to block 2 D indicates if resistance is set for block 2 Bias Port 1 resistance set 0 not set E indicates input port 1 to 6 that is connected to block 3 F indicates if resistance is set for block 3 Bi...

Page 212: ...esponse is one of following E5252A 10x12 Matrix Switch E5252A 10x24 Matrix Switch E5252A 10x36 Matrix Switch E5252A 10x48 Matrix Switch For E5252A in Normal Config mode E5252A 10x12 Matrix Switch For E5255A in Auto Config mode E5255A I1 I2 I3 I4 I5 I6 Channel Multiplexer Where In is the number two characters of output ports for each input port n For example E5255A 24 24 0 16 16 16 Channel Multiple...

Page 213: ...ee Connection Sequence Break Before Make Bias Mode Off Bias Port E5252A 10 E5255A None Bias Enabled Channels All channels output ports are bias enabled Couple Port Mode Off Couple Port No Couple Ports Card Channel Status All relays open in present channel configuration mode Self Test Result No Change For the device reset state see RST Syntax SYSTem CPON card_number Example OUTPUT Hp5250 SYST CPON ...

Page 214: ...Tem CTYPe card_number Query response HEWLETT PACKARD model 0 revision newline END model E5252A or E5255A revision A 01 00 or later version NOTE If designated card is not installed or initialize failed this command returns NONE NONE 0 0 Example OUTPUT Hp5250 SYST CTYPE 1 ENTER Hp5250 A Parameter Explanation card_number card number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 ...

Page 215: ...esponse data and message is string response data If there has been no error error queue is empty the response to this query is as follows 0 No error Example OUTPUT Hp5250 SYST ERR ENTER Hp5250 A B SYSTem VERSion This command returns the SCPI version number for which the E5250A complies This command has query form only Syntax SYSTem VERSion Query response YYYY V newline END YYYY is the year for exa...

Page 216: ...ed in Common Commands on page 7 4 Status Reporting Structure The status reporting structure consists of the following Status Byte Register Service Request Enable Register Standard Event Status Register Standard Event Status Enable Register Output Queue In general the status reporting structure is used to request service via Service Request SRQ or to indicate a specific condition such as operation ...

Page 217: ...condition occurs that requires service the instrument sets Request Service bit RQS bit6 of Status Byte and sends a Service Request SRQ via GPIB bus to the controller So the controller can execute an interrupt service routine must be in the program that uses a Serial Poll to read Status Byte of each instrument to determine which instrument requested service See Status Byte Register on page 7 50 ...

Page 218: ... and Table 7 1 for the E5250A Status Byte Register Figure 7 2 Status Byte Register of E5250A The Status Byte Register can be read with either a serial poll or the STB common query command refer to Common Commands on page 7 4 Serial poll is a low level GPIB command that can be executed by SPOLL in HP BASIC such as the following Status SPOLL Hp5250 Both serial poll and STB read the Status Byte Regis...

Page 219: ...d Always zero 4 Message Available MAV Queue Summary Message Indicates whether Output Queue is empty If unread message exists this bit is set to 1 Otherwise this bit is set to 0 Refer to Output Queue on page 7 55 5 Standard Event Status Bit ESB Summary Message Indicates whether one or more of the enabled Standard Events Status Register bits is set 6 Request Service RQS Message Indicates whether a S...

Page 220: ...ister Service Request Enable Register The Service Request Enable Register is an 8 bit register that can be used by the programmer to select which summary messages in the Status Byte Register may cause service requests Refer to Figure 7 3 Figure 7 3 Service Request Enable Register of E5250A ...

Page 221: ...Command Reference Standard Event Status Register Standard Event Status Register The Standard Event Status Register has specific events assigned to specific bits Refer to Figure 7 4 and Table 7 2 Figure 7 4 Standard Event Status Register of E5250A ...

Page 222: ...eration Complete OPC This event bit has meaning only if a request to monitor is set by the OPC command Refer to OPC on page 7 9 This bit is set to 1 if there are no pending operations 1 Not Used Always 0 2 Query Error QYE An attempt is being made to read data from the Output Queue when no data is present or pending Data in the Output Queue has been lost 3 Device Dependent Error DDE This event bit ...

Page 223: ...s Byte Register is set to 1 So Bit4 is used to synchronize information exchange with the controller Refer to Figure 7 5 Figure 7 5 Output Queue of E5250A The Response Formatter places Data Byte Messages and END messages into the Output Queue in response to query commands These messages are removed from the Output Queue as they are read by the controller As long as the Output Queue contains an unre...

Page 224: ...7 56 Agilent E5250A User s Guide Edition 11 Command Reference Output Queue ...

Page 225: ...8 VXIplug play Driver ...

Page 226: ...r s Guide Edition 11 VXIplug play Driver This chapter introduces the VXIplug play driver available for Agilent E5250A and consists of the following sections System Requirements Installing VXIplug play Driver Driver Functions ...

Page 227: ...t Visual Basic Microsoft Visual C Borland C Builder National Instruments LabWindows or LabVIEW or Agilent VEE It must be supported by the VISA I O library GPIB IEEE 488 Interface and VISA I O Library Agilent GPIB interface with Agilent IO Libraries or equivalent Computer and peripherals Required specifications depend on the application development environment See manual of the application developm...

Page 228: ...nstall VISA I O library Follow the instructions in the I O library s setup program 3 Configure and check the GPIB interface See the I O library manual 4 Install the programming software Follow the setup program instructions 5 Install the VXIplug play driver as shown below a Insert the E5250A Plug Play Driver disk into the drive connected to your PC b Execute the SETUP EXE program stored on the dis...

Page 229: ...rror hpe5250a_revision_query Queries for the E5250A firmware driver revisions hpe5250a_timeOut Sets the timeout hpe5250a_timeOut_Q Queries for the timeout setting hpe5250a_errorQueryDetect Sets the automatic error checking hpe5250a_errorQueryDetect_Q Queries for the automatic error checking setting hpe5250a_dcl Sends the Device Clear hpe5250a_esr_Q Queries for the ESR status hpe5250a_readStatusByt...

Page 230: ...pe5250a_testClear Clears the test result Passthrough Functions hpe5250a_cmd Sends a command hpe5250a_cmdInt Sends a command with an integer parameter hpe5250a_cmdReal Sends a command with a real parameter hpe5250a_cmdData_Q Sends a command to read any data hpe5250a_cmdString_Q Sends a command to read string response hpe5250a_cmdInt16_Q Sends a command to read 16 bit integer response hpe5250a_cmdIn...

Page 231: ...biasChanList This function will enable or disable bias on all the output ports specified by the biaschan_list The parameter biaschan_list is an array of integers with each integer representing one channel The last number of the biaschan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 Syntax ViStatus _VI_FUNC hpe5...

Page 232: ...st parameter Syntax ViStatus _VI_FUNC hpe5250a_biasChanList_Q ViSession vi ViInt16 bias_disen ViInt32 _VI_FAR biaschan_list ViInt32 _VI_FAR bias_status Parameters vi Instrument handle returned from hpe5250a_init bias_disen Bias status for the query 0 confirms if the port is the bias enabled 1 confirms if the port is the bias disabled biaschan_list Channel numbers to know the bias status 5 digits i...

Page 233: ...guration mode see hpe5250a_func bias_port Input port number to be set to the bias port 1 to 10 input port 1 to input port 10 hpe5250a_biasState This function controls the bias mode for the specified card When Bias Mode is ON the input Bias Port is connected to all bias enabled output ports that are not connected to any other input ports Bias disabled output ports are never connected to the input B...

Page 234: ...for the channels closed of the specified card The parameter closechan_list contains the channel numbers returned by the instrument This will be an array of integers terminated by zero to identify the end of the list Array of enough length should be passed to the function Syntax ViStatus _VI_FUNC hpe5250a_closeCard_Q ViSession vi ViInt16 close_card ViInt32 _VI_FAR closechan_list Parameters vi Instr...

Page 235: ...han_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 Syntax ViStatus _VI_FUNC hpe5250a_closeList ViSession vi ViInt32_VI_FAR closechan_list Parameters vi Instrument handle returned from hpe5250a_init closechan_list Channel numbers to connect 5 digits integer ABCDE where A card number BC input port number DE output...

Page 236: ...n_list parameter Syntax ViStatus _VI_FUNC hpe5250a_closeList_Q ViSession vi ViInt32_VI_FAR closechan_list ViInt32 _VI_FAR close_status Parameters vi Instrument handle returned from hpe5250a_init closechan_list Channel numbers to know the close status 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 ch...

Page 237: ..._init cmd_str Instrument command cannot exceed 256 bytes in length size Length of result in bytes 2 to 32767 result Response from instrument hpe5250a_cmdInt This function passes the cmd_str string to the instrument This entry point passes the string in cmd_str followed by a space and then the integer in value Note that either an Int16 or 32 can be passed as the Int16 will be promoted Syntax ViStat...

Page 238: ...arameters vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 result Response from instrument count Count of valid items in result hpe5250a_cmdInt16_Q This function passes the cmd_str string to the instrument This command expects a response that can be returned as a 16 bit int...

Page 239: ...arameters vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 result Response from instrument count Count of valid items in result hpe5250a_cmdInt32_Q This function passes the cmd_str string to the instrument This command expects a response that can be returned as a 32 bit int...

Page 240: ...d cannot exceed 256 bytes in length value Parameter for command 1E 300 to 1E 300 hpe5250a_cmdReal64Arr_Q This function passes the cmd_str string to the instrument This command expects a response that is a definite arbitrary block of 64 bit reals You specify the cmd_str and size parameters and get result and count Syntax ViStatus _VI_FUNC hpe5250a_cmdReal64Arr_Q ViSession vi ViString cmd_str ViInt3...

Page 241: ...nt command cannot exceed 256 bytes in length result Response from instrument hpe5250a_cmdString_Q This function passes the cmd_str string to the instrument This entry point will wait for a response which must be a string character data You specify the cmd_str and size parameters and get result Syntax ViStatus _VI_FUNC hpe5250a_cmdString_Q ViSession vi ViString cmd_str ViInt32 size ViChar _VI_FAR r...

Page 242: ...nstrument handle returned from hpe5250a_init frequency Measurement frequency 1E 3 to 1E 6 Hz len_hptrx Agilent 16494A triaxial cable 1 5 or 3 0 m len_usrtrx_h Triaxial cable length in m between connector plate and DUT high terminal If you do not use triaxial cable enter 0 zero len_usrtrx_l Triaxial cable length in m between connector plate and DUT low terminal If you do not use triaxial cable ente...

Page 243: ..._ruleseq ViInt16 rule ViInt16 sequence Parameters vi Instrument handle returned from hpe5250a_init cardno_ruleseq Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the automatic configuration mode For the configuration mode see hpe5250a_func rule Connection rule 0 free route or 1 single route sequence Connection sequence 0 1 or 2 See be...

Page 244: ...ax ViStatus _VI_FUNC hpe5250a_couplePort ViSession vi ViInt16 coupleport_cardno ViInt16 port1 ViInt16 port3 ViInt16 port5 ViInt16 port7 ViInt16 port9 Parameters vi Instrument handle returned from hpe5250a_init coupleport_cardn o Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the normal configuration mode or 0 all card in the automatic configuration mode For the configuration mode...

Page 245: ...d in the automatic configuration mode For the configuration mode see hpe5250a_func couple_state Couple port mode 0 OFF or 1 ON hpe5250a_dcl This function sends a device clear DCL to the instrument A device clear will abort the present operation and enable the instrument to accept a new command or query This is particularly useful in situations where it is not possible to determine the instrument s...

Page 246: ... function returns the error numbers and corresponding error messages in the error queue of a instrument See Chapter 11 for a listing of the instrument error numbers and messages Instrument errors may occur when you places the instrument in a bad state such as sending an invalid sequence of coupled commands Instrument errors can be detected by polling Automatic polling can be accomplished by using ...

Page 247: ...I_FUNC hpe5250a_errorQueryDetect ViSession vi ViBoolean errorQueryDetect Parameters vi Instrument handle returned from hpe5250a_init errorQueryDetect Error checking enable VI_TRUE or disable VI_FALSE hpe5250a_errorQueryDetect_Q This function indicates if automatic instrument error detection is enabled or disabled Syntax ViStatus _VI_FUNC hpe5250a_errorQueryDetect_Q ViSession vi ViPBoolean pErrDete...

Page 248: ...250a_init errstr Response from instrument Bit Value Message 1 ESR_OPC 2 ESR_RQL 4 ESR_QYE_ERROR 8 ESR_DEVICE_DEPENDENT_ERROR 16 ESR_EXECUTION_ERROR 32 ESR_COMMAND_ERROR 64 ESR_URQ 128 ESR_PON OTHERS ESR_MULTI_EVENT hpe5250a_func This function is used to set the channel configuration to the auto configuration mode or the normal configuration mode Syntax ViStatus _VI_FUNC hpe5250a_func ViSession vi ...

Page 249: ...nit ViRsrc InstrDesc ViBoolean id_query ViBoolean do_reset ViPSession vi Parameters InstrDesc Instrument description Examples GPIB0 1 INSTR id_query VI_TRUE to perform In System Verification or VI_FALSE do not perform In System Verification do_reset VI_TRUE to perform reset operation or VI_FALSE do not perform reset operation vi Instrument handle This is VI_NULL if an error occurred during the ini...

Page 250: ...ation mode see hpe5250a_func hpe5250a_openList This function will disconnect the input ports from the output ports specified by the channel list The parameter openchan_list is an array of integers with each integer representing one channel The last number of the openchan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list i...

Page 251: ...parameter Syntax ViStatus _VI_FUNC hpe5250a_openList_Q ViSession vi ViInt32_VI_FAR openchan_list ViInt32 _VI_FAR open_status Parameters vi Instrument handle returned from hpe5250a_init openchan_list Channel numbers to know the open status 5 digits integer ABCDE where A card number BC input port number DE output port number Top zero s can be ignored For example if A 0 BC 01 and DE 01 channel number...

Page 252: ...on Syntax ViStatus _VI_FUNC hpe5250a_reset ViSession vi Parameters vi Instrument handle returned from hpe5250a_init hpe5250a_revision_query This function returns the driver revision and the instrument firmware revision Syntax ViStatus _VI_FUNC hpe5250a_revision_query ViSession vi ViChar_VI_FAR driver_rev ViChar _VI_FAR instr_rev Parameters vi Instrument handle returned from hpe5250a_init driver_re...

Page 253: ...ta refer to Chapter 6 To get the R L and C value measure R L and C of the cable using the 4284A and divide them by cable length in m Compensation data must be the value for 1 m length Do not change the data format in the file E5250A C Compensation coefficient data table CAUTION Do not add or delete REVISION line and DATAxx line Change the value for R L C of DATA05 06 07 or 08 REVISION A 03 00 R oh...

Page 254: ...est_result Numeric result from self test operation 0 No error test_message Self test status message This is limited to 256 characters hpe5250a_testClear This function clears the test result for the specified relay card or the front panel or the controller Syntax ViStatus _VI_FUNC hpe5250a_testClear ViSession vi ViInt16 framecard_clear Parameters vi Instrument handle returned from hpe5250a_init fra...

Page 255: ...ard 4 relay test 5 relay test for all card 6 front panel test or 7 controller test exec_result Test result 0 No error hpe5250a_timeOut This function sets a minimum timeout value for driver I O transactions in milliseconds The default timeout period is 2 seconds Syntax ViStatus_VI_FUNC hpe5250a_timeOut ViSession vi ViInt32 timeOut Parameters vi Instrument handle returned from hpe5250a_init timeOut ...

Page 256: ...8 32 Agilent E5250A User s Guide Edition 11 VXIplug play Driver Driver Functions ...

Page 257: ...9 Executing Sample Programs ...

Page 258: ...IC workstation to execute the programs The Vth and Capacitance Measurement Program uses the Agilent 4155 4156 Agilent 4284A Precision LCR Meter and the E5250A with the E5252A card The HCI Measurement Program uses the 4155 4156 Bias Sources and the E5250A with the E5255A cards CAUTION These are sample programs so you may need to modify these programs and the 4155 4156 setup files for your applicati...

Page 259: ... parameters of the devices shown in Table 9 1 by using the Agilent 4155 4156 Semiconductor Parameter Analyzer the Agilent 4284A Precision LCR Meter and the Agilent E5250A with the E5252A card The program flow is shown in Table 9 2 In this program the 4155 4156 is set up by loading the 4155 4156 setup file E5252 MES which is saved on the E5250A Program Disk So the program disk must be in the 4155 4...

Page 260: ...sets up the 4155 4156 measurement conditions 2 Creates connection channels in the E5250A for Vth measurement 3 Measures Vth of MOSFET 4 Disconnects the connection channels in the E5250A 5 Judges pass or fail 6 Displays result and measurement data on computer s screen 7 Resets instrument 3 Measures Capacitance 1 Sets up the 4284A measurement conditions 2 Creates connection channels in the E5250A fo...

Page 261: ...52 MES file For details of the setup data GET the E5252 MES file using the 4155 4156 and refer to the setup displayed on the 4155 4156 screen Channel Source Setup User Function Setup Slot No Channels 1 10101 10202 10303 and 10404 2 not used 3 not used 4 not used SMU VNAME I NAME MODE FUNCTION Source Setup SMU1 Vd Id V CONST 5V SMU2 Vg Ig V VAR1 0 to 5V 50mV step SMU3 Vs Is COMMON CONST Common SMU4...

Page 262: ... GRAD LINE2 MARKER At a point where GRAD MAX GRAD Interpolate OFF Capacitance Measurement Setup Measurement setup of the E5250A and 4284A for this program is as follows E5250A E5252A Setup 4284A Setup Xaxis Y1axis Y2axis NAME Vg SQRTId GRAD SCALE LINEAR LINEAR LINEAR MIN 0 V 0 0 MAX 5 V 200 m 80 m Slot No Channels 1 10905 and 11006 2 not used 3 not used 4 not used Measurement Frequency 100 kHz Sig...

Page 263: ...urement Environment on page 4 1 And connect all equipment as shown in Figure 9 1 and Table 9 4 The E5252A must be installed in slot1 of the E5250A Table 9 3 Required Equipments Agilent Model Part No Description Qty E5250A Low Leakage Switch Mainframe 1 E5252A 10 12 Matrix Switch 1 4155 4156 Semiconductor Parameter Analyzer 1 16494A 003 Triaxial Cable 80 cm 4 16494A 001 or 002 Triaxial Cable 1 5 m ...

Page 264: ...nt and DUT Connection Instrument E5250A DUT Terminal via Connector Plate ModelNo Measurement Port Input Port Output Port 4155 4156 SMU 1 SMU INPUT 1 OUTPUT 1 MOSFET Drain SMU 2 SMU INPUT 2 OUTPUT 2 MOSFET Gate SMU 3 SMU INPUT 3 OUTPUT 3 MOSFET Source SMU 4 SMU INPUT 4 OUTPUT 4 MOSFET Substrate 4284A Hp Hc AUX INPUT CV1 OUTPUT 5 Capacitance H Lp Lc AUX INPUT CV2 OUTPUT 6 Capacitance L ...

Page 265: ...sk drive that is connected to the computer 6 Specify the mass storage device where the program disk is inserted by using the MSI statement For example if the device is CS80 702 1 enter the following command MSI CS80 702 1 7 GET the Vth and C measurement program SP_MAT and RE STORE the program In following example the file is stored as program file P_MAT GET SP_MAT RE STORE P_MAT 8 GET the Capacita...

Page 266: ...k drive connected to the computer 4 Insert the E5250A Program Disk into the 4155 4156 s disk drive Setup file E5252 MES is stored on the disk and is used to set up 4155 4156 for the Vth measurement 5 RUN the program 6 After the measurement measurement results are displayed on the computer as shown in example in Figure 9 2 Figure 9 2 Example of Vth and C Measurement Results Comment Vth C Meas Sampl...

Page 267: ...he GPIB Address You can EDIT the program to change the following parameters in the Init_setting subprogram To change the header of the measurement result report You can EDIT to change the following parameters in the Init_setting subprogram This is for header of report displayed on the computer For the display example refer to Figure 9 2 Parameter Description Default Hpib_sc GPIB select code 7 Ad41...

Page 268: ...libration will be done automatically before measurement CALL Cal415x DISP Agilent 4155 4156 Calibration Completed To save the 4155 4156 measurement data To save the Vth measurement data to a diskette in the 4155 4156 s disk drive remove the exclamation marks from the program lines shown below and enter the lines These lines are in the Save Measurement Data block of the Meas_vth subprogram OUTPUT H...

Page 269: ...ur desired setup file To change the name of parameter Vth entered from the 4155 4156 change VTH and Vth to the desired name on the 3 lines shown below Where VTH is the parameter defined by the E5252 MES setup file Meas_vth subprogram Measurement block OUTPUT Hp415x TRAC VTH ENTER Hp415x Vth Meas_vth subprogram Test measurement data block IF Vth Vth_min OR Vth Vth_max THEN Meas_vth subprogram Reset...

Page 270: ...0E 11 Capa_min The minimum capacitance limit in F 8 0E 12 Sig_volt Signal level for C measurement in V 0 03 Meas_freq Frequency for C measurement in Hz 1 0E 5 Cable_len Length in meters of 16048D E cable 1 Clen_hptriax Length in meters of 16494A cable connected from E5252A output to connector plate 1 5 Clen_usrtriax_h Length in meters of triaxial cable connected from connector plate to DUT High te...

Page 271: ...es Subprogram Program Line Meas_vth Constant Definition block Test_comm MOSFET Vth Measurement Channel 10101 10202 10303 10404 Meas_vth Connect to DUT block OUTPUT Hp5250 ROUT CLOS Channel OUTPUT Hp5250 OPC ENTER Hp5250 A Meas_vth Connection All Open block OUTPUT Hp5250 ROUT OPEN CARD ALL OUTPUT Hp5250 OPC ENTER Hp5250 A Meas_c Constant Definition block Test_comm Capacitance Measurement Channel 10...

Page 272: ...um See Note c Meas_c Connect to DUT block Connect_vfp Setup_data Setup_num See Note c Meas_c Connection All Open block Connect_vfp Setup_data Setup_num See Note b Set5250init COM Vfp_com_data Setup_data 14000 Adrs Adrs5250 CALL Load_vfp_data Adrs VFP_FILE Setup_data CALL Init_vfp_setup Setup_data See Note d a You must replace the Setup_num parameter with number of the VFP setup memory to use for V...

Page 273: ..._M performs HCI degradation test according to the JEDEC proceeding titled A PROCEDURE FOR MEASURING HCI 29 JULY 93 Analysis Program SP_MUX_A determines the lifetime of MOSFET from the data measured by HCI test program The SP_MUX_M program flow is shown in Table 9 5 Table 9 5 also lists the files that are used to set up the 4155 4156 for each part of the SP_MUX_M program These setup files are store...

Page 274: ... to determine the stress conditions step 2 should not be used for Hot Carrier stress testing steps 3 to 5 step Description 4155 4156 setup file 1 Initializes the Instruments 1 Resets the 4155 4156 2 Resets and initializes the E5250A Configuration Mode AUTO Bias Mode OFF Connection Rule FREE Channel Status All Relays Open 2 Determines Stress Condition See later IBVG MES 3 Selects devices valid for ...

Page 275: ...racterizes the initial parameters This step initially before stress measures parameters for the devices that were determined to be valid by the previous step The PARAM MES file sets up the 4155 4156 A summary of the measurement setup saved in PARAM MES is shown below For details of the setup data GET the PARAM MES file using the 4155 4156 and refer to the setup displayed on the 4155 4156 Channel S...

Page 276: ... Interpolate ON PARAM MES setup file extracts Idlin and Vtci by using the 4155 4156 User Function and Auto Analysis Function These parameters are extracted with the following conditions Idlin Gate voltage VG 5 V Substrate voltage VB 0V Vtci W L Ratio Gate width Gate length ratio 10 μm 1 μm For changing the conditions refer to Modifying the Program on page 9 35 NAME UNIT DEFINITION Gm S DIFF ID VG ...

Page 277: ...ycle is terminated when total stress time reaches 100 000 sec or when there is no device satisfies all of the following conditions Idlin value is within 10 of initial value Gmmax value is within 10 of initial value Vtext value is within 20 mV of initial value Vtci value is within 20 mV of initial value If none of these termination conditions has occurred stress time duration is increased and these...

Page 278: ...able 9 6 which lists the required equipment to execute the program Table 9 6 Required Equipment Agilent Model Part No Description Qty E5250A Low Leakage Switch Mainframe 1 E5255A 24 8 3 Channel Multiplexer 3 4155 4156 Semiconductor Parameter Analyzer 1 41501 SMU PGU expander for GNDU 1 16494A 001 or 002 Triaxial Cable 1 5 m or 3 m 1 16494A 003 Triaxial Cable 80 cm 3 16494D 001 or 002 8 Channel Shi...

Page 279: ...e_on and Bias_source_off subprograms Then modify the OUTPUT statements to match your Bias Sources The SOUR XXX SCPI command is used to control the output voltage of the Bias Sources Bias_source_on SUB Bias_source_on Bias Source On COM Meas_info5 REAL Vdstr Vgstr Vdd Vbb Gate_length Gate_w idth OUTPUT 701 SOUR VAL Vgstr Set Gate Stress Voltage OUTPUT 702 SOUR VAL Vdstr Set Drain Stress Voltage OUTP...

Page 280: ...e 9 3 Three E5255As are used which are installed in Slot1 Slot2 and Slot3 of the E5250A The internal connections of the three E5255As are almost the same except for the following IVin1 internal connection 1 in Figure 9 3 for each E5255A for Slot1 IVin1 to SMU1 for Slot2 IVin1 to SMU3 for Slot3 IVin1 to SMU4 DIP SW settings in each slot are different as shown in Figure 9 3 But within each E5255A SW...

Page 281: ...LOT 1 Gate SMU 3 SMU INPUT 3 Output 25 to 48 SLOT 2 Drain SMU 4 SMU INPUT 4 Output 49 to 72 SLOT 3 Sub GNDU directly connected to Connector Plate Source IVin1 cable IVin3 cable IVin2 cable SW1 SW2 SW3 SMU 1 SMU3 SMU 4 1 2 3 IVout1 IVout2 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 4 5 For E5255A in Slot 1 Connect IVin1 to SMU1 and set SW1 SW2 SW3 to For E5255A in Slot 2 Connect ...

Page 282: ...str So during the program you are prompted to replace Device1 after these voltages are determined GPIB Cable GNDU BIAS SOURCE 1 HP BASIC CONTROLLER E5250A SLOT1 Bias Input Shielding Box Source Drain Gate Sub Device1 Device24 Total 24ea Output 1 24 25 48 49 72 1 25 49 GNDU Device2 1 GNDU 72 24 24 48 72 to to to 48 26 50 49 25 2 BIAS SOURCE 3 BIAS SOURCE 2 SMU 16494D 001 or 002 9 ea 16494A 001 or 00...

Page 283: ...cify the computer s mass storage device disk drive the diskette is inserted by using MSI statement For example if the device is CS80 702 1 enter the following command MSI CS80 702 1 6 Load your HCI test program The following example loads and displays SP_MUX program in this example LOAD SP_MUX EDIT 7 Insert the E5250A Program Disk into the 4155 4156 s disk drive then get the setup file IDVD MES to...

Page 284: ...tion 11 Executing Sample Programs HCI Measurement Program Drain stress voltage should be determined by Id Vd charact eristics Vdstr 5 Drain stress voltage After defining the value re store the program Figure 9 5 Id Vds Measurement Example ...

Page 285: ...e the device used to determine Vdstr and Vgstr after the following message is displayed Connect HCI degradation test devices This device must be Device1 which was connected to the E5255A output port numbers 1 25 49 and GNDU as shown in Figure 9 4 4 Connect a new device in place of device removed by previous step Then press Continue function key to continue the program The program executes the leak...

Page 286: ...fractional change in a parameter versus the stress time is displayed on GRAPHICS page of the 4155 4156 as shown in Figure 9 8 After testing the test result data is saved to the diskette in the computer s disk drive and the following message is displayed HCI Degradation Test is Completed Figure 9 6 Example of Ib Vgs Measurement Results ...

Page 287: ...Agilent E5250A User s Guide Edition 11 9 31 Executing Sample Programs HCI Measurement Program Figure 9 7 Initial Interim Characterization Example Figure 9 8 HCI Degradation Test Result Example ...

Page 288: ...ple if the directory is test_data enter MSI test_data Execute the SP_MUX_A program as follows 1 Press the RUN function key on the computer The following message is displayed Enter number of devices default 24 2 Enter the number of devices to be analyzed Default number is 24 Then the following softkeys are displayed Tdc is the time to target The SP_MUX_A program extracts Tdc from the measurement da...

Page 289: ...e file 4 Select Continue function key to continue the program after each graph is displayed If you select the ALL softkey in step 3 the 4155 4156 screen displays the graph for the next parameter of the same device number And then program pauses If you select the softkey to specify parameter in step 3 the 4155 4156 screen displays the graph for the next device for the parameter And program pauses T...

Page 290: ...n After analyzing saving and listing the data the 4155 4156 is initialized For example in the case that you selected Idlin softkey in step 3 the following is saved to the file Number of devices Vdstr Vgstr Gate length Gate width Idlin Device Validity Tdc_idlin First device number 0 or 1 Extracted Tdc for the device Last device number 0 or 1 Extracted Tdc for the device Averaged Tdc_idlin Calculate...

Page 291: ... Idlin and Gmmax extraction condition To change the number of devices To change the stress times To change the test limits To specify the data displayed on the 4155 4156 screen To change the timing for saving the test data To change the GPIB address To change the GPIB address of the instruments change the following parameters in the GPIB Setup block Parameter Description Default Hpib_sc 4155 4156 ...

Page 292: ...T the PARAM MES setup file by using the 4155 4156 2 Change the setting of ID parameter in LINE2 on the ANALYSIS SETUP screen The value of ID can be calculated by the following expression ID 1 μA W L where W means Gate width in m and L means Gate length in m 3 Change the following parameters in the Device geometries block of program Parameter Description Default Ibvg_file Setup file for extracting ...

Page 293: ...Parameters block To test more than 25 devices you must change the configuration of the E5250A See chapter 2 To change the stress times Change the data at the DATA statement in the Stress duration setup block Each data shows the cumulative stress data Example DATA 10 20 50 DATA 100 200 500 DATA 1000 2000 5000 DATA 10000 20000 50000 DATA 100000 If you change the number of the data defined in DATA st...

Page 294: ...wing saving data in main menu block Save_at_last 0 Saves the data after each parameter measurement Save_at_last 1 Saves the data after HCI test is completely finished For this parameter the default is 1 Parameter Description Default Igleak_max Maximum Gate leakage current in A 2 E 10 Idleak_max Maximum Drain leakage current in A 1 E 8 Parameter Description Default Show_device To display the data f...

Page 295: ...10 Specifications ...

Page 296: ... 3 Channel Multiplexer This chapter also provides the supplemental data when used with the Agilent 4155 4156 The specifications are the performance standards or limits against which these units have been tested The typical data and supplemental data are not warranted but provide useful information about functions and performance If not noted otherwise the conditions for specifications and other da...

Page 297: ...o 1010 1 IEC61010 1 EMC CISPR 11 Group 1 class A EN50082 1 Power Requirement 100 to 240V 10 47 to 63 Hz maximum 100 VA Number of Slots 4 slots for 30 mm height switch cards Dimensions Mainframe 230 mm H 430 mm W 600 mm D Option 001 30 mm H 395 mm W 424 mm D Option 501 30 mm H 395 mm W 424 mm D Weight Mainframe 11 2 kg Option 001 2 0 kg Option 501 2 1 kg Number of Ports with option 001 Low Leakage ...

Page 298: ... A 23 C 5 C 5 to 60 RH B 5 C to 18 C 28 C to 40 C 5 to 60 RH C 28 C to 40 C 60 to 80 RH A B C Max Current Rating A 1 0 1 0 1 0 Max Voltage Rating V Channel to Guard 200 200 200 Channel to Channel 300 300 300 Closed Channel Residual Resistance Ω Low Leakage I V Port 0 6 0 6 0 6 General I V Port 1 0 1 0 1 0 C V Port HF Port 1 0 1 0 1 0 Channel Isolation Resistance Ω Low Leakage I V Port 1013 5 1012 ...

Page 299: ...nd these are offset voltages after applying voltage and waiting 5 minutes 3 This is guard capacitance for an I O channel for following conditions Only one E5252A is installed in mainframe and only one I O channel is connected 4 Additional error for the following measurement conditions Applicable for the data compensated by the capacitance compensation routine Frequency 1 kHz to 1 MHz Measurement R...

Page 300: ... A 23 C 5 C 5 to 60 RH B 5 C to 18 C 28 C to 40 C 5 to 60 RH C 28 C to 40 C 60 to 80 RH A B C Max Current Rating A 1 0 1 0 1 0 Max Voltage Rating V Channel to Guard 200 200 200 Channel to Channel 300 300 300 Closed Channel Residual Resistance Ω Low Leakage I V Port 0 6 0 6 0 6 BIAS Port a 1 0 1 0 1 0 Channel Isolation Resistance Ω Low Leakage I V Port 1013 5 1012 2 1012 BIAS Port 109 5 108 2 108 a...

Page 301: ...60 pF Low Leakage I V Port when the port is open 1 The offset current when 0 V is applied to all I O channels 2 EMF means Electro Motive Force and these are offset voltages after applying voltage and waiting 5 minutes 3 This is guard capacitance for an I O channel for following conditions Only one E5255A is installed in mainframe and only one I O channel is connected Supplemental Data Relay Contac...

Page 302: ... with 12 8ch Shield Intlk GNDU Agilent 16495E Half size Blank Plate Agilent 16495F Connector Plate with 12 Triax Intlk GNDU Agilent 16495G Connector Plate with 24 Triax Intlk GNDU Temperature Range Operating 5 C to 40 C Storage 40 C to 70 C Humidity Range Operating 5 to 80 RH non condensing Storage 5 to 90 RH at 65 C The following specifications are applied for the Agilent 16494E Wide Temperature ...

Page 303: ...Data when used with Agilent 4156 non Kelvin connection Voltage Range and Offset Accuracy with HRSMU Current Range and Offset Accuracy with HRSMU Range Setting Measurement 2 V 960 μV 0 5 Iout V 780 μV 0 5 Iout V Range Setting Measurement 1 nA 3 pA 0 2 Vout pA 3 pA 0 2 Vout pA 10 nA 7 pA 0 2 Vout pA 5 pA 0 2 Vout pA 100 nA 50 pA 0 4 Vout pA 30 pA 0 4 Vout pA Range Setting Measurement 2 V 500 μV 0 5 ...

Page 304: ...10 10 Agilent E5250A User s Guide Edition 11 Specifications Supplemental Data when used with Agilent 4155 4156 ...

Page 305: ...11 Error Messages ...

Page 306: ... listed in the following table When an error occurs the corresponding bit is set in the Standard Event Status Register see Chapter 7 Also the error number and message are placed in the error queue which can be read by the SYSTem ERRor query command The error queue is cleared by the common command CLS and when power is turned on For these commands see Chapter 7 Error Range Error Category 0 No error...

Page 307: ... the command header and 1 is the parameter A subsystem command header consists of mnemonics keywords separated by colons Query commands have a question mark at end of last mnemonic Common command SRE 48 SRE is the command header and 48 is the parameter A common command header consists of an asterisk followed by 3 characters Query commands have a question mark at end of header Error Number Error Me...

Page 308: ...oo many parameters for the command were received 109 Missing parameter Fewer parameters were received than required for the command 110 Command header error An error was detected in the header This error message is reported if the E5250A cannot determine the more specific header errors 111 through 114 111 Header separator error An illegal character for a header separator was received for example n...

Page 309: ...4 Too many digits The mantissa of a decimal numeric parameter contained more than 255 digits excluding leading zeros 128 Numeric data not allowed Numeric data is not allowed in this position for this command 138 Suffix not allowed A suffix was received after a numeric parameter For the E5250A no parameters have suffix 140 Character data error An error was detected in a character parameter This err...

Page 310: ...s point 160 Block data error An error was detected in a block data This error is reported if the E5250A cannot determine more specific errors 161 and 168 161 Invalid block data An invalid block data was received for example an END message was received before the length was satisfied 168 Block data not allowed A legal block data was received but was not allowed at this point 170 Expression error An...

Page 311: ...rameter value is valid but not executable due to some condition of the E5250A This error occurs if more specific errors 221 through 224 cannot be determined 222 Data out of range A valid parameter setting could not be executed because interpreted value was out of range as defined by the E5250A 223 Too much data A valid parameter setting block expression or string type could not be executed because...

Page 312: ...e not SCPI defined For these errors an error number and message are placed in the error queue and bit3 of the Standard Event Status Register is set Error Number Error Message and Description 300 Device specific error Generic device dependent error for the E5250A that cannot be determined more specifically 311 Memory error An error was detected in the E5250A s memory 350 Queue overflow If error que...

Page 313: ...neric query error for the E5250A that cannot be determined more specifically 410 Query INTERRUPTED A condition causing an INTERRUPTED query error occurred for example a query followed by DAB or GET before a response was completely sent 420 Query UNTERMINATED A condition causing an UNTERMINATED query error occurred for example the E5250A was addressed to talk and an incomplete program message was r...

Page 314: ...These errors indicate that an E5250A operation did not properly complete due to card channel port or mode errors For the SCPI defined device dependent codes see Device Dependent Errors on page 11 8 For these errors an error number and message are placed in the error queue and bit3 of the Standard Event Status Register is set The E5250A specific error messages have positive error numbers ...

Page 315: ...d in the channel list Confirm the channel number the card configuration and the configuration mode of the E5250A 2006 Command not supported on this card Command was used that is not supported by the card 2009 Too many channels in channel list Too many channels are specified in the channel list Maximum number of channels E5252A number of cards 120 E5255A number of cards 48 2011 Empty channel list N...

Page 316: ...A or card installed in slot 2 of the E5250A may be defective Or if card is the E5255A the internal cable connection or the DIP switch setting may be wrong 3003 Card3 initialization fail The E5250A or card installed in slot 3 of the E5250A may be defective Or if card is the E5255A the internal cable connection or the DIP switch setting may be wrong 3004 Card4 initialization fail The E5250A or card ...

Page 317: ... the channel list for the E5252A card For input ports can specify only one of input port numbers 5 7 and 9 and only one of input port numbers 6 8 and 10 For example channel list cannot specify input ports 5 and 7 3016 Config error Re install E5255A May be problem with the E5255A installation Re install the E5255A 3017 Too many relays closed Max 200 Too many physical relays have been closed To clos...

Page 318: ...11 14 Agilent E5250A User s Guide Edition 11 Error Messages E5250A Specific Error Messages ...

Page 319: ...12 SCPI Command Summary ...

Page 320: ...r see Chapter 5 Textual Notation for Subsystem Commands Square brackets are used to enclose optional information not required for execution of the command sequence So you can omit the characters in brackets and the command will still execute correctly For example for the ROUTe BIAS PORT command you can execute ROUT BIAS PORT or BIAS PORT which are exactly the same italic font Text you supply For e...

Page 321: ...interface test DIAG TEST FRAM EXEC unit Executes specified test then returns test result 1 fail 0 pass unit CONT controller test or FPAN front panel interface test DIAG TEST FRAM STAT unit Returns most recent test result of specified test 1 fail 0 pass 1 not tested unit CONT Controller test FPAN Front panel interface test ROUT BIAS CHAN DIS CARD card_number Bias disables all channels of specified ...

Page 322: ... the Bias port on specified card Only for the E5252A card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL bias_port 1 to 10 ROUT BIAS PORT card_number Returns the input Bias Port number for the specified card Only for the E5252A card card_number For Auto Config mode 0 For Normal Config mode 1 2 3 4 ROUT BIAS STAT card_number state Turns Bias Mode ON or OFF for the s...

Page 323: ...1 channel is closed connected channel_list Channels to check ROUT CONN RULE card_number rule Sets the connection rule for the specified card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL rule FREE free route or SROUte single route ROUT CONN RULE card_number Returns the connection rule of the specified card FREE free route SROU single route card_number For Auto Con...

Page 324: ...Normal Config mode 1 2 3 4 or ALL couple_port One or more input port numbers 1 3 5 7 or 9 Enclose by single quotation marks Separate multiple input port numbers by comma For example 1 5 ROUT COUP PORT card_number Returns the lower input port number of each couple pair on the specified card Only for the E5252A card card_number For Auto Config mode 0 For Normal Config mode 1 2 3 4 ROUT COUP STAT car...

Page 325: ...T OPEN CARD card_number Disconnects all input ports from all output ports for specified card card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL ROUT OPEN LIST channel_list Disconnects the input ports from output ports as specified in channel_list channel_list Channels to open ROUT OPEN LIST channel_list Returns whether specified channels are opened 0 channel is closed ...

Page 326: ...ard_number Resets the specified card to the power on state card_number For Auto Config mode 0 or ALL For Normal Config mode 1 2 3 4 or ALL SYST CTYP card_number Returns ID of specified card model number and revision card_number For Auto Config mode 0 For Normal Config mode 1 2 3 or 4 SYST ERR Reads error from head of error queue and removes that error from queue SYST VERS Returns SCPI version numb...

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