6.5
Variable Speed Operation
53
6
6.5.4 Operation from Low Speed Rotation to Rated Speed Rotation
This is the procedure to select normal speed operation during low speed rotation.
6.5.4.1 REMOTE Operation
(1) Cancel the "LOW SPEED" signal (Refer to Table 6-4) inputted in the remote-control
connector.
(2) Pump starts to accelerate. If the set low speed value did not exceed 80 % rated speed, the
"NORMAL" signal turns off. At this time, "ACCELERATION" signal turns on in this product
of a standard spec.
(3) When the rotational speed reaches 80 % rated speed, the "NORMAL" signal turns on
(Refer to Table 6-4).
At this time, "ACCELERATION" signal turns off in this product of a standard spec.
(4) If the set low speed value exceed 80 % rated speed, remote-control signals remain
unchanged and the pump accelerates.
(5) When the rated speed is reached, the pump stops accelerating and the pump speed is
maintained.
6.5.4.2 Serial Interface Operation
(1) "NORMAL SPEED" command is input via the serial communication.
(2) Pump starts to accelerate. If the set low speed value did not exceed 80 % rated speed,
status is changed from "NORMAL" to "ACCELERATION".
(3) When the rotational speed reaches 80 % rated value, status is changed from
"ACCELERATION" to "NORMAL".
(4) If the set low speed value exceed 80 % rated speed, status remain unchanged and the
pump accelerates.
(5) When the rated speed is reached, the pump stops accelerating and the pump speed is
maintained.
(Note) If low speed value is set to 100 %, the same operation occurs.
Содержание UTM1600 Series
Страница 2: ...This page is intentionally left blank...
Страница 10: ...viii Location of Label...
Страница 26: ...12 2 2 4 External I F Panel This page is intentionally left blank...
Страница 27: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
Страница 32: ...18 3 3 3 Controller This page is intentionally left blank...
Страница 38: ...24 4 4 4 Standards Fulfilled This page is intentionally left blank...
Страница 54: ...40 5 5 5 Notes on Transportation This page is intentionally left blank...
Страница 78: ...64 6 6 8 Communication Specifications This page is intentionally left blank...
Страница 79: ...7 7GAS PURGE...
Страница 88: ...74 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Страница 101: ...10 10WARRANTY CLAUSES...
Страница 104: ...90 10 This page is intentionally left blank...
Страница 106: ...Index Index 2 This page is intentionally left blank...