Ulvac UTM1600 Series, Инструкция по эксплуатации

Страница: 91 / 108

9.3 Nothing Happens After an Operation is Made
77
9
9.3
Nothing Happens After an Operation is Made
Table 9-1 Nothing Happens After an Operation is Made
Problem Possible causes Corrective action Section
1
Power ON/OFF switch
in the ON position but
the turbo molecular
pump fails to operate. Electrical power cable
not properly connected. Properly connect the electrical
power cable. 5.2
Electrical power outside
power supply unit’s
power range. Operate within power supply
unit’s power range.
4.1
2
START/STOP button is
pushed but turbo
molecular pump does
not accelerate. In REMOTE mode.
(POWER lamp lights) By maintained push, change to
LOCAL mode
(POWER lamp blinks) 6.2
Other causes. Check the Alarm lamp is not lights
in orange. If an alarm is indicated,
correct the malfunction and reset
alarm.
9.5
3
Remote "STOP" signal
active but the turbo
molecular pump does
not accelerate. In LOCAL mode.
(POWER lamp blinks) By maintained push, change to
REMOTE mode.
(POWER lamp lights) 6.2
"STOP" signal active. Deactivate "STOP" signal.
6.7
Other problems. Check the Alarm lamp is not ON.
If an alarm is indicated, correct
the malfunction and reset. 9.5
4
START/STOP button is
pushed but the turbo
molecular pump does
not decelerate. In REMOTE mode.
(POWER lamp lights) By maintained push, change to
LOCAL mode.
(POWER lamp blinks)
6.2
5
Remote "STOP" signal
activated but the turbo
molecular pump does
not decelerate. In LOCAL mode.
(POWER lamp blinks) By maintained push, change to
REMOTE mode.
(POWER lamp lights) 6.2