
6.7
Remote-control Connector
57
6
6.7.2 Pin Assignment
Table 6-4
Remote-control Signals
(Note 1) Don't connect any pins other than specified above.
(Note 2) It takes 6 seconds until it comes to show that this signal is correct, after the POWER switch
is turned on.
(Note 3) "STOP" signal is prior to "START" signal.
(Note 4) One reset signal is received each time when the contact closes. Repeatedly short and open
the contact to input multiple reset signals.
(Note 5) It is possible to change movement by remote-control signal settings of serial communication
(Refer to Table 6-5).
Name
Pin No.
(Note 1)
Operation
(Note 2)
Electric
spec
In-
put
START
1
Starting operation on short-circuiting between GND
and pin No.1. (Note 3)
Contact
Input
STOP
2
Pump stop by opening GND and pin No.2.
(Note 3)(Note 5)
RESET (Note 4)
14
Resetting operation on short-circuiting between GND
and pin No.14.
LOW SPEED
15
Variable speed operation on short-circuiting between
GND and pin No.15.
GND
16
GND
Out-
put
ROTATION
8
20
During rotation
( 8 )-(20) open
→
close (make contact)
Contact
Output
Contact
capacity
(resistance
load)
30 VDC
1 A
NORMAL
6
18
During rotational speed is more than 80 % rated value
( 6 )-(18) open
→
close (make contact)
ACCELERATION
5
17
During acceleration
( 5 )-(17) open
→
close (make contact)
BRAKE
7
19
During deceleration
( 7 )-(19) open
→
close (make contact)
REMOTE
9
21
Remote-controlled operation is available (Note 5)
( 9 )-(21) open
→
close (make contact)
ALARM
11
23
24
Against ALARM (Note 5)
(11)-(24) open
→
close (make contact)
(23)-(24) close
→
open (break contact)
WARNING
12
13
25
Against WARNING (Note 5)
(12)-(25) open
→
close (make contact)
(13)-(25) close
→
open (break contact)
Содержание UTM1600 Series
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Страница 27: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
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