Ulvac UTM1600 Series, Инструкция по эксплуатации, Страница: 49 / 108

5.1 Installation
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5.1.3.2 Connection of Cooling Water Line
(1) Correctly connect the cooling water pipes so that the cooling water is supplied to IN port
and discharged from the OUT port, as shown in Fig. 5-9. The valve to isolate (Lockout /
Tagout) cooling water should be installed at user equipment.
Fig. 5-9 Connector of Cooling Water Line
(2) When connecting the cooling water pipes, screw the pipe joint while also holding the nozzle
of the pump with a spanner in order to avoid deforming the cooling water pipe, as illustrated
in Fig. 5-10.
Fig. 5-10 Water Coolant Tubing Connections
PIPE JOINT