SECTION 9
TROUBLESHOOTING
84
9
Table 9-6
Table of Alarms
Alarm
code
Alarm name
Possible cause
Protective action
11
TD COUNTER LIMIT
Counts of the high speed touch-down counter
exceeded the specified number.
Start-up impossible
(detected during
power supply self-
diagnostics)
12
PF COUNTER LIMIT
Counts of the power failure touch-down counter
exceeded the specified number.
15
POWER FAILURE
Power failure.
Regenerative
braking
16
TMP:OVERLOAD
After accelerating to 80 % of the designated
speed or low-speed setting, the speed dropped
below 80 % due to overloading etc.
Deceleration
19
EI:FAILURE
The power supply unit cannot recognize the pump
correctly.
Start-up impossible
(detected during
power supply self-
diagnostics)
21
TMP TEMP/MB CABLE
Increased pump drive motor temperature.
Free run
(motor stop)
23
EI:MOTOR OVERCURR
Overcurrent ran through the motor.
24
TMP:OVER TEMP
Pump temperature.
Deceleration
30
EI:CONT. TEMP ERR
Increased temperature inside the control system
32
EI:DC-DC OVERTEMP
Increased temperature inside control system.
Free run
(motor stop)
34
EI:INV. OVERCURR
Overcurrent ran through the motor.
35
EI:INV. OVERVOLT
Defective circuit.
36
EI:DC-DC LOW VOLT
Defective circuit.
Regenerative
braking
37
EI:DC-DC OVERCURR
Defective circuit.
Deceleration
38
EI:DC-DC OVERVOLT
Defective circuit.
39
EI:DEW ERROR
Dew ERROR
43
EI:PARAM ERROR
Stored parameters are not correct.
Start-up impossible
(detected during
power supply self-
diagnostics)
44
EI:CPU ERROR
Error in the CPU for inverter control.
Free run
(motor stop)
45
EI:BRAKE OVERTIME
Pump does not stop within the specified time after
the stop operation.
46
MOTOR OVERSPEED
Pump rotation speed is too high.
47
EI:R-SPEED ERROR
Pump rotation speed cannot be detected.
48
EI:ACCEL OVERTIME
Pump does not accelerate to 80 % of the
designated speed or low-speed setting within the
specified time after start-up.
Deceleration
49
TMP:CAN NOT START
Pump fails to rotate within 2 minutes after start-up.
51
MB:VIBRATION2 X1
Continuous excessive vibration of the magnetic
bearing.
52
MB:VIBRATION2 Y1
53
MB:VIBRATION2 X2
54
MB:VIBRATION2 Y2
55
MB:VIBRATION2 Z
Содержание UTM1600 Series
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Страница 27: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
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Страница 79: ...7 7GAS PURGE...
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