Ulvac UTM1600 Series, Инструкция по эксплуатации, Страница: 34 / 108

SECTION 4 SPECIFICATIONS
20
4
4.1
Standard Specifications for Pump Unit
Turbo molecular pump model UTM1600 Series (Note 1) UTM1200 Series (Note 1)
Inlet flange
VG200 /
ISO200F
VG250 /
ISO250F
VG150 ISO160F
Outlet flange KF40
Mass 41 kg 43 kg
Ultimate pressure (after baking)
10
-7
Pa order
Maximum allowable gas throughput
(Note 2)
Refer to Section 4.2
Maximum allowable inlet pressure
(N
2
continuous exhaust) (Note 2)
28 Pa
Maximum allowable outlet pressure
(N
2
continuous exhaust) (Note 2)
266 Pa
Pumping speed
(Note 3)
N
2
Ar
H
2
1400 L/s
1330 L/s
750 L/s
1490 L/s
1420 L/s
780 L/s
1080 L/s
1020 L/s
710 L/s
950 L/s
890 L/s
680 L/s
Compression ratio
N
2
H
2
He
2×10
8
8×10
2
9×10
3
Rated speed 37200 rpm
Start-up time 8 minutes or less
Mounting position In any desired direction (Note 4)
Vibration level (by ULVAC’s method) 0.01 μm or less (0-peak)
Noise 57 dB(A) or less (37200 rpm)
Recommended flow rate of purge gas 30 mL/min (Note 5)
Admissible pumping speed of backing
pump in case of gas purge
600 L/min or more
Display LED POWER / NORMAL / ALARM
Communication
Contact
REMOTE (D-sub 25 pin female, Screw lock size UNC 4-40)
Input : START / STOP / RESET / LOW SPEED
Output : ROTATION / NORMAL / ACCELERATION / BRAKE /
REMOTE / ALARM / WARNING
Serial RS-232C / RS-485 (2-wire)
Water valve 3-way valve 24 VDC, 10 W
Speed variation
Speed is variable between 25 % and 100 % of the rated
speed. (set as 0.1 %)
Alarm history Stores up to latest 99 alarms.
Momentary power failure
(Note 6)
If the electrical power is recovered in 2 seconds or less, then
the power supply operation prior to the electrical power failure
is continued. No change output signal.
Otherwise, the turbo molecular pump rotor is decelerated.