Ulvac UTM1600 Series, Инструкция по эксплуатации

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5.1 Installation
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5
5.1.2 Installation of the Pump
WARNING
Do not operate the turbo molecular pump until safety is confirmed.
・
The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown
torque should be generated when abnormality occurs in the pump by any chance. Incidental
accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by
insufficient method.
・
Fix the pump to host equipment according to Section 5.1.2.2 and 5.1.2.3. The method to fix the
pump is different depending on the pump model and the size of inlet flange of the pump.
・
Host equipment should be fixed to the floor so as not to move. Host equipment should be
designed to have enough margins in strength, in preparation for an emergency accident.
WARNING
Ensure that no oil mist or hazardous substances are present in process line as safe ducting
procedure when turbo molecular pump is installed to host equipment.
CAUTION
Avoid to install the pump at the following places.
(1) Place where the pump is inevitably exposed to significant vibration and impact.
(2) Unstable place.
(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.
The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/
impact to it during transportation. This pump is not an explosion-proof product. This pump is not
intended to be used in a potentially explosive atmosphere.
CAUTION
The pump surface may get hot, there are risk of burn.
Prevent the installation, operation, maintenance, and service personnel from contacting the
pump surface easily in all tasks that they are intended to perform.