Ulvac UTM1600 Series, Инструкция по эксплуатации

Страница: 85 / 108

8.6 Turbo Molecular Pump Return Request
71
8
8.6
Turbo Molecular Pump Return Request
WARNING
Improper turbo molecular pump use may be hazardous to operator's health in applications not
recommended or approved by ULVAC. In the event removal of the turbo molecular pump from
an application is required, full protective measures including purging of the turbo molecular pump
with an inert gas and/or apparel are recommended when the turbo molecular pump has been
used in applications that required the use of corrosive, reactive, stimulative, or toxic gasses.
WARNING
When pump is removed from host equipment, follow the procedure described below. If not,
cause injury by electrical shock, water leak, or gas leak.
(1) Power off the primary power (AC SWITCH "OFF", disconnect the power cable).
(2) Confirm that the lamps on the control panel turns off.
(3) Confirm that there is no rotational sound of touch-down bearing.
(4) Confirm that water line and gas line are cut off.
Annual overhaul is recommended.
Overhaul, re-manufacturing, refurbishing, or repair of the turbo molecular pump system should
always be performed by ULVAC or an approved service company. (A copy of this from is printed
at the end of this manuals "Repair of the turbo molecular pump")
The following precautions are required before forwarding the turbo molecular pump to ULVAC
or an approved service company for all service related requests.
(1) The turbo molecular pump must be void of all process gasses. Turbo molecular pumps that
were operated in applications using special gasses (doping gas, epitaxial gas, film forming
gas, etching gas, etc.), likely have the process by-products, reaction-produced matter, etc.
Remove them from the turbo molecular pump by repeated gas purge to the pump and fill
the pump with an inert gas. The pump interior must be adequately purged with inert gas
before uninstalling from the unit.
(2) The customer is required to submit MSDS (Material Safety Data Sheet) sheets and
information of all gasses, materials, etc. that have been associated with the turbo
molecular pump.
ULVAC will accept and perform service only on turbo molecular pumps that have been properly
prepared as stated in (1) and (2) above. ULVAC will advice the customer of any failure
precaution/prevention procedures that are appropriate to each individual turbo molecular pump
service request.
Remove the pump in the manner shown in Fig. 8-1.