9 Troubleshooting
9-1. <FAILURE>
71 / 87
Display
State explanation
Main cause and required action
Optical sensor unit:
Abnormally low contrast of
interference fringe image
data detected
A damage of the optical sensor unit due to
inhalation of foreign substances or waste
materials is suspected.
Optical sensor unit:
Reference gas flow rate
abnormality detected
Unless a significantly low or high supply volume
is found, clogging or leak of a flow path in and
out of the product is suspected.
Optical sensor unit:
Measuring gas flow rate
abnormality detected
Unless a significantly low or high supply volume
is found, clogging or leak of a flow path in and
out of the product is suspected.
Optical sensor unit:
Out-of-detection-range
measuring gas detected
Unless an abnormality in the composition of the
measuring gas is found, a malfunction of the
optical sensor unit is suspected.
Sonic sensor unit:
Measuring sound pressure
abnormality detected
A damage of the sonic sensor unit due to
inhalation of foreign substances or waste
materials is suspected.
Sonic sensor unit:
ROM abnormality detected
An abnormality in the sonic sensor unit ROM.
The sonic sensor unit must be replaced.
Sonic sensor unit:
RAM abnormality detected
An abnormality in the sonic sensor unit RAM.
The sonic sensor unit must be replaced.
Sonic sensor unit:
EEP-ROM abnormality
detected
An abnormality in the sonic sensor unit
EEP-ROM. The sonic sensor unit must be
replaced.
Содержание OHC-800
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