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46
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ME12058B
Operation Section
9.2
Startup
Troubles
Causes and remedies
The goniometer cannot be
initialized.
Check to make sure that the side doors of the main module or
EFEM are not open. (See “2.3 Interlock List”.)
Check to make sure that the load port panels or rear panels
are not open.
Opening any of these panels or doors turns off the power of
the goniometer. Be sure to close the side doors and panels.
If the cause of the problem is unknown, shut down the PC,
turn off the main breaker lock-out handle of the equipment,
then restart the equipment.
(Refer to “2.4 Lock-out/Tag-out”.)
The sample transfer system
cannot be initialized.
Check to make sure that the side doors of the main module or
EFEM are not open. (See “2.3 Interlock List”.)
Check to make sure that the load port panels or rear panels
are not open.
Opening any of these panels or doors turns off the power of
the sample feed system. Be sure to close the side doors and
panels.
Check to make sure that the manual robot controller (inside
the EFEM) is not set to the manual mode.
Set the manual robot controller to the remote mode ([RMT] is
indicated).
Check to make sure that CDA and vacuum are supplied.
Make sure of utility connections.
If the cause of the problem is unknown, shut down the PC,
turn off the main breaker lockout handle of the equipment,
then restart the equipment.
(Refer to “2.4 Lock-out/Tag-out”.)
CAUTION
When checking the manual robot controller,
contact the maintenance personnel.
NOTE:
When checking the CDA,
contact the maintenance personnel.
Содержание MFM65S2RFFFLFL
Страница 19: ...14 ME12058B Operation Section Goniometer Figure Fig 3 1 2 Gonimeter...
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