Rigaku MFM65S2RFFFLFL, Инструкция по эксплуатации

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ME12058B
Operation Section
6.2 Beam Diagnosis
Execute the
[Jobs]
–
[Diagnosis]
command.
Upon completion of the beam diagnosis, the beam intensity and the 2
θ
position are displayed along
with the previous values, and the confirmation dialog box appears.
Click on
[OK]
; the beam position is saved in the XRR and XRF setup data of Setup, and is added to
“Diagsis.log” of the equipment.
Make sure the beam-intensity error and angle position error are
within 5% and 0.01 degree
,
respectively.
NOTE :
If the result of diagnosis is NG, see “9.Trouble Shooting”.
And then, contact to the maintenance personnel.
Fig. 6-2-1 Diagnosis Button
Fig. 6-2-2 Diagnosis Dialog