−
43
−
ME12058B
Operation Section
7.4 Start Measurement
Click on
[Start Job]
.
The steps are executed from the create job list sequentially for measurement purposes.
The status lamp of the signal tower turns green during the measurement.
7.5 End Analysis
Upon completion of measurement, all of the job-list lines turn light yellow and
[Control Job is
finished.]
is displayed in the title screen.
The status lamp of the signal tower then turns yellow and blinks as it waits for an operator command.
If
V
automatic carrier unloading is selected, the carrier is unloaded.
7.6 Unload the Cassette
(1) Confirm that the
[UNLOAD]
and
[OP-ACCESS]
lamps are ON.
(2)
Push
[OP-ACCESS]
button to undock the FOUP carrier.
(3)
Remove the FOUP carrier from the loadport.
(4)
[LOAD]
lamp becomes on, and next FOUP cassette can be loaded.
Fig. 7-4-1 START Button
Содержание MFM65S2RFFFLFL
Страница 19: ...14 ME12058B Operation Section Goniometer Figure Fig 3 1 2 Gonimeter...
Страница 20: ...15 ME12058B Operation Section EFEM Figure Fig 3 1 4 EFEM Figure Wafer Robot Wafer Aligner Load Port Top View...
Страница 37: ...32 ME12058B Operation Section Fig 5 2 5 Power Switch 5 6...
Страница 66: ...61 ME12058B Operation Section APPENDIX 3 A3 1 Power Circuit Diagram Fig A3 1 1 Power Circuit Diagram 1...
Страница 67: ...62 ME12058B Operation Section Fig A3 1 2 Power Circuit Diagram 2...
Страница 69: ...64 ME12058B Operation Section A4 2 MSDS of Beryllium...
Страница 70: ...65 ME12058B Operation Section...
Страница 71: ...66 ME12058B Operation Section...
Страница 72: ...67 ME12058B Operation Section...
Страница 73: ...68 ME12058B Operation Section...
Страница 74: ...69 ME12058B Operation Section...
Страница 75: ...70 ME12058B Operation Section...
Страница 76: ...71 ME12058B Operation Section...
Страница 77: ...72 ME12058B Operation Section...
Страница 78: ...73 ME12058B Operation Section...
Страница 79: ...74 ME12058B Operation Section...
Страница 80: ...75 ME12058B Operation Section A4 3 MSDS of Lead...
Страница 81: ...76 ME12058B Operation Section A4 4 MSDS of Lithium...
Страница 82: ...77 ME12058B Operation Section...
Страница 83: ...78 ME12058B Operation Section...
Страница 84: ...79 ME12058B Operation Section A4 5 MSDS of Mercury...
Страница 85: ...80 ME12058B Operation Section...
Страница 86: ...81 ME12058B Operation Section...
Страница 87: ...82 ME12058B Operation Section...
Страница 88: ...83 ME12058B Operation Section...
Страница 89: ...84 ME12058B Operation Section...
Страница 90: ...85 ME12058B Operation Section A4 6 MSDS of Mechanical Lubricating Grease...
Страница 91: ...86 ME12058B Operation Section...
Страница 92: ...87 ME12058B Operation Section...
Страница 93: ...88 ME12058B Operation Section...
Страница 94: ...89 ME12058B Operation Section...
Страница 95: ...90 ME12058B Operation Section...
Страница 96: ...91 ME12058B Operation Section...
Страница 97: ...92 ME12058B Operation Section A4 7 MSDS of Ethanol...
Страница 98: ...93 ME12058B Operation Section...
Страница 99: ...94 ME12058B Operation Section...
Страница 100: ...95 ME12058B Operation Section...
Страница 101: ...96 ME12058B Operation Section...
