Rigaku MFM65S2RFFFLFL, Инструкция по эксплуатации, Страница: 62 / 102

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ME12058B
Operation Section
Degree of difficulty
in analysis
Analysis contents Target of analysis/
Film structure
Easy
Difficult
Oscillation interval
→
Film thickness
(roughly estimated from the FFT results)
Critical angle
→
Density
(roughly estimated from the critical angle)
The accuracy of film thickness, density, and roughness can be
improved through fitting analysis.
Analysis of film thickness, density, and roughness fitting
Analysis is relatively easy, as there are few parameters.
Analysis of film thickness, density, and roughness fitting
Through the study of various structure models and detailed
analysis, one can learn about surface layers, intermediate
layers, interface reactions, and interface diffusion.
The larger the number of parameters and the less accurate the
initial values, the more difficult the analysis.
Single layer
Two layers
Multi-layers